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公开(公告)号：US20180366333A1
公开(公告)日：2018-12-20
申请号：US15726027
申请日：2017-10-05
IPC分类号： H01L21/304 , H01L21/321 , H01L21/67 , C09K3/14 , H01L21/02 , H01L21/3105 , C09G1/02
CPC分类号： H01L21/3043 , B24B37/00 , B24B37/26 , C09G1/02 , C09K3/1409 , H01L21/0203 , H01L21/31053 , H01L21/3212 , H01L21/67017 , B24B37/22 , B24D18/0036 , B24D18/0045
摘要： The polishing pad is suitable for polishing or planarizing a wafer of at least one of semiconductor, optical and magnetic substrates. The polishing pad includes radial feeder grooves in a polishing layer separating the polishing layer into polishing regions. The radial feeder grooves extend at least from a location adjacent the center to a location adjacent the outer edge of the polishing pad. Each polishing region including a series of biased grooves that connects a pair of adjacent radial feeder grooves. A majority of the biased grooves having either an inward bias toward the center of the polishing pad or an outward bias for directing polishing fluid toward the outer edge of the polishing pad.
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公开(公告)号：US09818618B2
公开(公告)日：2017-11-14
申请号：US14700580
申请日：2015-04-30
发明人： Brian Mrzyglod , Jayakrishnan Nair , Garrett Blake
CPC分类号： H01L21/30625 , B24B37/042 , B24B37/22 , B24B37/24 , B24D11/00 , B24D11/001 , B24D18/0045
摘要： The invention is directed to a multi-layer polishing pad for chemical-mechanical polishing comprising a top layer, a middle layer and a bottom layer, wherein the top layer and bottom layer are joined together by the middle layer, and without the use of an adhesive. The invention is also directed to a multi-layer polishing pad comprising an optically transmissive region, wherein the layers of the multi-layer polishing pad are joined together without the use of an adhesive.
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公开(公告)号：US09643294B2
公开(公告)日：2017-05-09
申请号：US14799498
申请日：2015-07-14
申请人： K&D Pads LLC
发明人： Kenneth Luna , Derek Geisen
CPC分类号： B24D13/145 , B24B37/26 , B24D9/08 , B24D13/14 , B24D13/142 , B24D13/20 , B24D18/0045
摘要： A buffing pad having a front surface portion, a moisture barrier upon which the front surface is disposed, a compressible foam portion disposed below the moisture barrier, and a rear surface. The front surface portion has a plurality of indentations formed by RF welding and the rear surface has an attachment portion capable of attaching the buffing pad to a power tool. Methods of manufacturing and using a buffing pad.
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公开(公告)号：US20160279763A1
公开(公告)日：2016-09-29
申请号：US15035642
申请日：2014-11-11
CPC分类号： B24D13/14 , B24D3/002 , B24D3/28 , B24D5/16 , B24D7/16 , B24D9/085 , B24D11/02 , B24D13/18 , B24D13/20 , B24D18/0045 , B24D18/0072 , B24D2201/00
摘要： The invention relates to a vulcanized fiber grinding tool (1) comprising two vulcanized fiber grinding disks (2, 3) which are adhered to each other over the entire surface by means of an adhesive layer (4) arranged between the vulcanized fiber grinding disks (2, 3) such that the vulcanized fiber grinding disk (2, 3) outer faces provided with the grinding means point away from each other and the use of a support plate is not necessary.
摘要翻译： 本发明涉及一种硫化纤维研磨工具（1），其包括两个硫化纤维研磨盘（2,3），它们通过布置在硫化纤维研磨盘之间的粘合层（4）在整个表面上彼此粘合 2,3），使得设置有研磨装置的硫化纤维研磨盘（2,3）的外表面彼此远离，并且不需要使用支撑板。
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公开(公告)号：US20160074999A1
公开(公告)日：2016-03-17
申请号：US14787308
申请日：2013-07-09
申请人： REN S.R.L.
发明人： Nicola FIORE
CPC分类号： B24D13/16 , B24D18/0045
摘要： Abrasive tools of the disposable type applicable to many types of equipment to sand materials of various types are provided. In particular, the invention relates to devices using rotating abrasive discs for sanding machines, which include a plurality of flexible abrasive discs open at a radial cut and arranged in an overlapping and staggered configuration such as to define an abrasive, lamellar-like work surface with overlapping flaps, wherein each flap is formed of a protruding portion of an abrasive disc. Methods of making such abrasive tools are also provided.
摘要翻译： 提供了一种适用于多种类型设备的各种类型砂磨材料的抛光工具。 特别地，本发明涉及使用用于砂光机的旋转研磨盘的装置，其包括在径向切口处开口并以重叠和交错构造布置的多个柔性研磨盘，以限定磨料层状工作表面， 重叠的翼片，其中每个翼片由研磨盘的突出部分形成。 还提供了制造这种研磨工具的方法。
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公开(公告)号：US07820005B2
公开(公告)日：2010-10-26
申请号：US12175992
申请日：2008-07-18
CPC分类号： B24B37/22 , B24D18/0045 , B24D18/0072 , Y10T156/1092
摘要： A method for making a multilayer chemical mechanical polishing pad comprising: providing a polishing layer, providing a subpad layer, optionally providing additional layers, providing an unset reactive hot melt adhesive, applying the unset reactive hot melt adhesive in a pattern on a surface of at least one of the layers, applying one of the other layers over the pattern of unset reactive hot melt adhesive, pressing the two layers together with the unset reactive hot melt adhesive interposed therebetween, allowing the unset reactive hot melt adhesive to set forming a reactive hot melt adhesive bond between the two layers.
摘要翻译： 一种用于制造多层化学机械抛光垫的方法，包括：提供抛光层，提供子垫层，可选地提供附加层，提供未固化的反应性热熔粘合剂，将未固化的反应性热熔粘合剂以图案的形式施加在表面上 至少一个层，将其它层之一施加在未固化的反应性热熔粘合剂的图案上，将两层压在其间插入的未固化的反应性热熔粘合剂，使得未固化的反应性热熔粘合剂固化形成反应性热 熔融粘合在两层之间。
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公开(公告)号：US20050260937A1
公开(公告)日：2005-11-24
申请号：US11139460
申请日：2005-05-27
申请人： Bahadir Tunaboylu , Jeff Hicklin , Ivan Pipps , Son Dang , Gerry Back
发明人： Bahadir Tunaboylu , Jeff Hicklin , Ivan Pipps , Son Dang , Gerry Back
CPC分类号： B24B19/16 , B24B29/08 , B24D3/28 , B24D13/142 , B24D18/0045 , B24D18/0072
摘要： Methods are provided for shaping, maintaining the shape of, and cleaning a probe tip using a pad such as a multi-layer adhesive and abrasive pad. The multi-layer adhesive and abrasive pad may be formed from layers of adhesive material having abrasive particles in-between each layer. Using the pad, probe tips may be shaped as desired from an unfinished probe stock, substantially limiting the use of relatively expensive conventional machining operations. Further, the pad may also be used to maintain probe tips in a desired operating shape. Still further, the pad may be used to clean accumulated debris from the probe tip. Preferably, the maintenance and cleaning operations are performed on-line, with the probes operatively installed in connection with testing machinery.
摘要翻译： 提供了使用诸如多层粘合剂和研磨垫的垫来成形，保持探针尖端的形状和清洁探针尖端的方法。 多层粘合剂和研磨垫可以由在各层之间具有磨料颗粒的粘合剂材料层形成。 使用垫，探针尖端可以根据需要从未完成的探针坯料成型，从而基本上限制了相对昂贵的常规加工操作的使用。 此外，垫也可以用于将探针尖端保持在期望的操作形状。 此外，垫可以用于清洁来自探针尖端的积聚的碎屑。 优选地，维护和清洁操作在线执行，探头可操作地安装在与测试机器相连接上。
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公开(公告)号：US06528141B1
公开(公告)日：2003-03-04
申请号：US09374339
申请日：1999-08-13
申请人： Stanley A. Watson , David G. Powell
发明人： Stanley A. Watson , David G. Powell
IPC分类号： B32B310
CPC分类号： B24B23/02 , B24D15/02 , B24D18/0045 , Y10T428/24273 , Y10T428/24281 , Y10T428/24289 , Y10T428/24322 , Y10T428/24331 , Y10T428/24339 , Y10T428/24347 , Y10T428/249953
摘要： A support structure includes a first sheet with perforations having a front surface and a back surface and a second sheet with perforation having a front surface and a back surface. Each perforation in the first sheet and the second sheet has a portion adjacent to the front surface of the sheet that is wider than a portion of the perforation that is adjacent to the back surface of the sheet. A core made of a first material is formed between the back surface of the first sheet and the back surface of the second sheet and within the perforations to anchor the first sheet and the second sheet to the core. Molded features may be disposed on the front surfaces of the sheets and integrally formed with the core through perforations in the sheets. The support structure may be used in a horizontal base or an end-of-arm tool.
摘要翻译： 支撑结构包括具有前表面和后表面的穿孔的第一片和具有前表面和后表面的穿孔的第二片。 第一片和第二片中的每个穿孔具有与片的前表面相邻的部分，其宽度大于与片的背面相邻的穿孔的一部分。 在第一片材的后表面和第二片材的后表面之间以及在穿孔内形成由第一材料制成的芯以将第一片材和第二片材锚固到芯部。 模制的特征可以设置在片材的前表面上并且通过片材中的穿孔与芯体整体形成。 支撑结构可以用在水平底座或手臂末端工具中。
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公开(公告)号：US5584754A
公开(公告)日：1996-12-17
申请号：US512454
申请日：1995-08-08
申请人： David Hash , Kirk Henin
发明人： David Hash , Kirk Henin
CPC分类号： B24D13/08 , B24D18/0045
摘要： An improved star head sanding assembly for sanding on the peripheral edges of the individual abrasive discs. The discs are provided with radially arranged non-parallel skip cuts, and are devoid of radial cutout sections to provide maximum peripheral surface area. During use, the free edges of the individual fingers tend to twist through substantially a right angle to present a line contact with the workpiece surface at least partially perpendicular to the direction of movement of the assembly relative to the workpiece.
摘要翻译： 用于在单个研磨盘的周边边缘上打磨的改进的星形头部打磨组件。 盘设置有径向布置的非平行的跳过切口，并且没有径向切口部分以提供最大的外围表面积。 在使用期间，各个手指的自由边缘倾向于基本上直角扭转，以至少部分地垂直于组件相对于工件的移动方向与工件表面线接触。
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公开(公告)号：US5243811A
公开(公告)日：1993-09-14
申请号：US812038
申请日：1991-12-23
IPC分类号： B24D18/00
CPC分类号： B24D18/0045
摘要： A peripheral surface of an annular shaped grinder is distributed with grinding particles. The grinding particles have a particles distribution such that the spacing between the grinding particles in the axial direction is less than 2/3 of the mean diameter of the particle and that the spacing between grinding particles in the circumferential direction is about 5-80 times of the mean particle diameter. The grinder is manufactured by a method of forming a pattern of an adhesive layer on a synthetic resin sheet, fixing the grinding particles to the patterns and laminating the sheets with fixed particles.
摘要翻译： 环形磨床的周边表面与研磨颗粒一起分布。 研磨颗粒具有颗粒分布，使得研磨颗粒在轴向方向上的间隔小于颗粒的平均直径的2/3，并且研磨颗粒在圆周方向上的间隔为约5-80倍 平均粒径。 研磨机是通过在合成树脂板上形成粘合剂层图案的方法制造的，将研磨颗粒固定在图案上并用固定的颗粒层压片材。
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