公开(公告)号：US11673223B2

公开(公告)日：2023-06-13

申请号：US17711724

申请日：2022-04-01

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Yu-Chen Wei ,  Jheng-Si Su ,  Shih-Ho Lin ,  Jen-Chieh Lai ,  Chun-Chieh Chan

IPC: B24B49/18 ,  B24B49/16 ,  B24B49/10 ,  B24B37/005 ,  B24B37/32 ,  B24B53/017 ,  B24B37/20 ,  B24B37/04 ,  H01L21/321 ,  B24B53/00

CPC classification number: B24B37/20 ,  B24B37/005 ,  B24B37/04 ,  B24B37/32 ,  B24B49/10 ,  B24B49/16 ,  B24B49/18 ,  B24B53/001 ,  B24B53/017 ,  H01L21/3212

Abstract: A chemical mechanical polishing method is provided, including polishing a batch of wafers in sequence on a polishing surface of a polishing pad; conditioning the polishing surface with a pad conditioner, wherein the pad conditioner is operable to apply downward force according to a predetermined downward force stored in a controller to condition the polishing surface; measuring the downward force applied by the pad conditioner with a measurement tool when the pad conditioner is at a home position and after conditioning the polishing surface; comparing the downward force measured by the measurement tool and the predetermined downward force with the controller to determine whether a difference between the downward force measured by the measurement tool and the predetermined downward force exceeds a range of acceptable values; and calibrating the downward force applied by the pad conditioner with the controller when the difference exceeds the range of acceptable values.

公开(公告)号：US20150174729A1

公开(公告)日：2015-06-25

申请号：US14563313

申请日：2014-12-08

Applicant: United Technologies Corporation

Inventor： John P. Rizzo ,  Gordon M. Reed

IPC: B24B53/00 ,  B24B53/12 ,  B24B53/04

CPC classification number: B24B53/001 ,  B23K26/364 ,  B24B53/005 ,  B24B53/04 ,  B24B53/06 ,  B24B53/075 ,  B24B53/12

Abstract: Systems and methods are disclosed herein for adding surface features to grinding wheels. A laser may be directed substantially perpendicular to a grinding surface of a grinding wheel. The laser may be pulsed and may ablate material from the grinding surface. The laser may move relative to the grinding wheel in order to ablate shaped surface features into the grinding surface

Abstract translation: 本文公开了用于将表面特征添加到砂轮的系统和方法。 激光器可以基本上垂直于研磨轮的研磨表面定向。 激光可以是脉冲的并且可以从研磨表面烧蚀材料。 激光器可以相对于砂轮移动，以便将成形的表面特征烧蚀到研磨表面中

公开(公告)号：US08808063B2

公开(公告)日：2014-08-19

申请号：US13308526

申请日：2011-11-30

Applicant: Feng Chen ,  Mingqi Li

Inventor： Feng Chen ,  Mingqi Li

IPC: B24B21/18

CPC classification number: B24B53/001 ,  B24B37/04 ,  B24B37/046 ,  B24B53/017 ,  C25D17/001 ,  H01L21/02074 ,  H01L21/304 ,  H01L21/67051

Abstract: A method for removing polishing byproducts and a polishing device are provided. The method includes mounting a positive electrode on the center of a polishing platen and a negative electrode on an edge of the polishing platen, applying a voltage between the positive electrode and the negative electrode after a polishing process for metal is finished, and rotating the polishing platen and rinsing a polishing pad with deionized water or a chemical cleaning solution to remove polishing byproducts that are formed in the polishing process. The combination of the centrifugal force and the electromotive force increases the removal rate of the polishing byproducts.

Abstract translation: 提供了去除抛光副产物的方法和抛光装置。 该方法包括将正极安装在研磨台板的中心和负极上，在研磨台板的边缘上，在金属抛光处理完成之后，在正极和负极之间施加电压，并旋转抛光 压板并用去离子水或化学清洁溶液冲洗抛光垫以除去在抛光过程中形成的抛光副产物。 离心力和电动势的组合增加了抛光副产物的去除率。

公开(公告)号：US20090163121A1

公开(公告)日：2009-06-25

申请号：US12335183

申请日：2008-12-15

Applicant: Friedhelm ALTPETER ,  Walter H. PFLUGER

Inventor： Friedhelm ALTPETER ,  Walter H. PFLUGER

IPC: B24B53/04 ,  B24B53/095 ,  B23H1/04

CPC classification number: B24B53/001 ,  B24B3/34 ,  B24B53/062

Abstract: A grinding machine for grinding a workpiece comprises a machine frame, a bearing device provided on the machine frame and movable along guides, in which a cup-shaped grinding wheel is rotatably drivable about a grinding wheel axis and electrically insulated. The grinding wheel is electrically connected to a generator. The device for profile dressing, sharpening and cleaning the grinding wheel consists of a single cup-shaped electrode, which is drivable about its central axis and is placed on a slide, which allows a working gap to exist between the machining surface of the cup-shaped electrode and the annular abrasive surface. A spark erosion discharge occurs in the gap when a voltage is applied. The grinding wheel can thereby be optimally conditioned by electric discharge machining.

Abstract translation: 用于研磨工件的研磨机包括机架，设置在机架上并可沿导向件移动的轴承装置，其中杯形砂轮围绕磨轮轴线可旋转地驱动并电绝缘。 砂轮电连接到发电机。 用于轮廓修整，磨削和清洁砂轮的装置由单个杯形电极组成，其可围绕其中心轴线驱动并且放置在滑块上，这允许在杯状电极的加工表面之间存在工作间隙， 形状的电极和环形磨料表面。 当施加电压时，在间隙中产生火花腐蚀放电。 因此，可以通过放电加工来最佳地调节砂轮。

公开(公告)号：US07507143B2

公开(公告)日：2009-03-24

申请号：US11474390

申请日：2006-06-26

Applicant: Hirohisa Yamada

Inventor： Hirohisa Yamada

IPC: B24B49/00 ,  B24B51/00

CPC classification number: B24B53/001 ,  B24B7/17 ,  B24B7/228 ,  B24B37/08 ,  B24B53/017 ,  B24B53/02

Abstract: In a grinding machine comprising conductive grinding wheels, the invention presents a truing technique capable of truing grindstone surfaces of grinding wheels at high precision in a short time.For example, in the case of truing flat annular grindstone surfaces (10a, 10a) of a pair of mutually opposite grinding wheels (1, 2) simultaneously, an electro-discharge truing electrode (20) is disposed oppositely between the grindstone surfaces (10a, 10a) of the two grinding wheels (1, 2), and while traversing relatively parallel along the both grindstone surfaces (10a, 10a), the grindstone surfaces (10a, 10a) are trued without making contact by the electro-discharge action between the electro-discharge truing electrode (20) and both grindstone surfaces (10a, 10a).

Abstract translation: 在包括导电磨轮的研磨机中，本发明提供了一种能够在短时间内以高精度修整砂轮的磨石表面的修整技术。 例如，在同时研磨一对相对的砂轮（1,2）的平面环形砂轮表面（10a，10a）的情况下，将电抛光电极（20）相对设置在磨石表面（10a） ，10a），并且沿着两个砂轮表面（10a，10a）相对平行地移动，并且通过两个砂轮表面（10a，10a）之间的电放电动作 电镀研磨电极（20）和磨石表面（10a，10a）。

公开(公告)号：US20060124473A1

公开(公告)日：2006-06-15

申请号：US11297437

申请日：2005-12-09

Applicant: Hitoshi Omori ,  Yoshihiro Uehara ,  Kazutoshi Katahira ,  Muneaki Asami ,  Norihide Mitsuishi ,  Souichi Ishikawa

Inventor： Hitoshi Omori ,  Yoshihiro Uehara ,  Kazutoshi Katahira ,  Muneaki Asami ,  Norihide Mitsuishi ,  Souichi Ishikawa

IPC: B23H3/00

CPC classification number: B24B57/02 ,  B23H5/08 ,  B24B53/001

Abstract: There is here disclosed a nozzle type ELID grinding apparatus comprising a conductive grindstone 12 having a contact surface with a workpiece 1; and an ion supply nozzle 16 that supplies an electrolytic medium 2 containing hydroxyl ions (OH−) onto a surface of the conductive grindstone, the workpiece being ground while the surface of the grindstone is dressed by electrolysis or chemical reaction. Furthermore, the apparatus comprises a grindstone power source 14 for setting the conductive grindstone to be a positive potential (+).

Abstract translation: 这里公开了一种喷嘴型ELID研磨装置，其包括具有与工件1的接触表面的导电磨石12; 以及离子供给喷嘴16，其将含有羟基离子的电解介质2（OH - SUP）提供到导电性砂轮的表面上，在将磨石的表面通过电解或化学 反应。 此外，该装置包括用于将导电磨石设置为正电位（+）的磨石电源14。

公开(公告)号：US06942555B2

公开(公告)日：2005-09-13

申请号：US10347994

申请日：2003-01-20

Applicant: Toshiya Hayashi ,  Hisatoshi Kojima ,  Kazuki Kataoka ,  Toru Nakanoboh

Inventor： Toshiya Hayashi ,  Hisatoshi Kojima ,  Kazuki Kataoka ,  Toru Nakanoboh

IPC: B24D5/02 ,  B23F21/03 ,  B24B53/00 ,  B24D3/00 ,  B24D3/06 ,  B24D18/00 ,  B24B17/00

CPC classification number: B24D18/0018 ,  B23F21/03 ,  B24B53/001 ,  B24D3/06 ,  Y10S451/90

Abstract: A highly accurate, long-life grindstone for shaping a gear and a method of fabricating the grindstone, without depending on the accuracy of form of a base metal and without using a special grinding machine or a special lapping machine, are disclosed. A super-abrasive layer (29) of a predetermined thickness is fixedly attached on the outer periphery of a body portion (24) of the base metal (23) formed in a cylinder solid. The super-abrasive layer (29) is metal-bonded, and has the outer periphery thereof formed with a toothed portion (31) in the shape of the teeth of an external gear by electric discharge machining.

Abstract translation: 公开了一种用于成形齿轮的高精度，长寿命的磨石和制造磨石的方法，而不依赖于贱金属的形状的精度，而不使用特殊的研磨机或特殊研磨机。 具有预定厚度的超研磨层（29）固定地安装在形成为气缸固体的母材（23）的主体部分（24）的外周上。 超研磨层（29）金属接合，并且其外周形成有通过放电加工形成外齿形齿的齿部（31）。

公开(公告)号：US06939457B2

公开(公告)日：2005-09-06

申请号：US10332773

申请日：2001-07-12

Applicant: Masahiro Mizuno

Inventor： Masahiro Mizuno

IPC: B23H5/00 ,  B24B5/00 ,  B24B53/00 ,  C25F7/00 ,  C25D17/00

CPC classification number: B24B53/04 ,  B24B5/00 ,  B24B53/001

Abstract: A contact-discharge truing/dressing method and a device therefor, capable of very simply conducting truing/dressing of a superabrasive grindstone, especially a superabrasive grindstone having a metal binder. The contact-discharge truing/dressing method brings a rotated conductive grindstone into contact with a pair of electrodes to which a DC voltage or pulse voltage is applied, and subjecting the conductive grindstone to an intermittent truing/dressing by contact discharge produced when opening/closing a circuit of a positive electrode, electrode chips, a grindstone binder, electrode chips, a negative electrode, and parts of the side surfaces of dual-ring rotary electrodes insulated by an insulation layer being used as a pair of electrodes.

Abstract translation: 一种接触排出修整/修整方法及其装置，其能够非常简单地进行超研磨砂石，特别是具有金属粘合剂的超研磨砂轮的修整/修整。 接触排出修整/修整方法使旋转的导电磨石与施加了直流电压或脉冲电压的一对电极接触，并且通过在打开/关闭时产生的接触放电对导电磨石进行间歇整形/修整 正电极，电极芯片，磨石粘合剂，电极芯片，负极以及由绝缘层绝缘的双环形旋转电极的侧面的一部分用作一对电极的电路。

公开(公告)号：US06932896B2

公开(公告)日：2005-08-23

申请号：US09982558

申请日：2001-10-17

Applicant: Bulent M. Basol ,  Cyprian Uzoh ,  Homayoun Talieh

Inventor： Bulent M. Basol ,  Cyprian Uzoh ,  Homayoun Talieh

IPC: B08B1/04 ,  B24B37/04 ,  B24B53/00 ,  B24B53/007 ,  C25D5/22 ,  C25D7/12 ,  C25F3/16 ,  H01L21/288 ,  H01L21/304 ,  H01L21/768

CPC classification number: B24B53/017 ,  B24B37/04 ,  B24B53/001 ,  C25D5/22 ,  C25D17/001 ,  H01L21/2885 ,  H01L21/7684 ,  H01L21/76877

Abstract: Systems and methods to remove or lessen the size of metal particles that have formed on, and to limit the rate at which metal particles form or grow on, workpiece surface influencing devices used during electrodeposition are presented. According to an exemplary method, the workpiece surface influencing device is occasionally placed in contact with a conditioning substrate coated with an inert material, and the bias applied to the electrodeposition system is reversed. According to another exemplary method, the workpiece surface influencing device is conditioned using mechanical contact members, such as brushes, and conditioning of the workpiece surface influencing device occurs, for example, through physical brushing of the workpiece surface influencing device with the brushes. According to a further exemplary method, the workpiece surface influencing device is rotated in different direction during electrodeposition.

Abstract translation: 提出了用于去除或减小在电沉积期间使用的工件表面影响装置上形成金属颗粒的尺寸并限制金属颗粒形成或生长的速率的系统和方法。 根据示例性的方法，工件表面影响装置偶尔地与涂覆有惰性材料的调理基板接触，并且施加到电沉积系统的偏压被反转。 根据另一示例性方法，使用诸如刷子的机械接触构件对工件表面影响装置进行调节，并且例如通过用刷子物理刷刷工件表面影响装置来发生工件表面影响装置的调节。 根据另一示例性方法，在电沉积期间，工件表面影响装置在不同方向上旋转。

公开(公告)号：US06531037B2

公开(公告)日：2003-03-11

申请号：US09796629

申请日：2001-03-02

Applicant: Hitoshi Ohmori

Inventor： Hitoshi Ohmori

IPC: C25F700

CPC classification number: B24B53/001 ,  B24B53/12

Abstract: There is disclosed a removable electrode for electrolytic dressing grinding in which the electrode is disposed opposite to a processing surface of a conductive grinding wheel via a gap, a conductive liquid is passed through between the electrode and the conductive grinding wheel to apply a voltage thereto, the grinding wheel is dressed by electrolysis and a workpiece is simultaneously ground, the electrode comprising: an electrode support member 12 having a surface 12a disposed opposite to the processing surface of the grinding wheel via a constant gap; a conductive foil 14 detachably attached to and along the opposite surface of the electrode support member; and a conductive terminal 16 for contacting the conductive foil to apply the voltage to the conductive foil. Even when a deposit is built up on a cathode surface, the cathode surface can be cleaned in a short time. Even after repeated use, an electrode shape does not change. Therefore, an ELID grinding apparatus can steadily be operated in an unmanned manner for a long time.

Abstract translation: 公开了一种用于电解修整研磨的可移除电极，其中电极经由间隙与导电研磨轮的处理表面相对地布置，导电液体通过电极和导电研磨轮之间以向其施加电压， 通过电解修整砂轮并同时研磨工件，电极包括：电极支撑构件12，其具有经由恒定间隙与砂轮的处理表面相对设置的表面12a; 可拆卸地附接到电极支撑构件的相对表面并且沿着电极支撑构件的相对表面的导电箔14; 以及用于接触导电箔以将电压施加到导电箔的导电端子16。 即使在阴极表面上形成沉积物，也可以在短时间内清洁阴极表面。 即使重复使用，电极形状也不会改变。 因此，ELID研磨装置可以长时间无人操作地稳定地操作。