公开(公告)号：US11772214B2

公开(公告)日：2023-10-03

申请号：US17476380

申请日：2021-09-15

申请人： Magswitch Technology Worldwide Pty Ltd

发明人： David H. Morton ,  Thomas D. Squillace ,  Paul J. Karp

IPC分类号： B23Q3/154 ,  B25B11/00

CPC分类号： B23Q3/154 ,  B25B11/002

摘要： A magnetic device for magnetically coupling to a ferromagnetic body, comprises a housing having a central bore. A plurality of pole sectors arranged within an envelope of the central bore and forming a workpiece contact interface of the magnetic device, each of the plurality of pole sectors comprising a plurality of spaced-apart pole portions arranged at respective distances, wherein a recess of a plurality of recesses separates each pole portion of the plurality of pole portions, wherein a first sector forms a first pole of the magnetic device and a second sector forms a second pole of the magnetic device. A first permanent magnet. A second permanent being moveable relative to the first permanent magnet. And, an actuator operatively coupled to the at least one second permanent magnet to move the at least one second permanent magnet relative to the at least one first permanent magnet.

公开(公告)号：US20230256551A1

公开(公告)日：2023-08-17

申请号：US18111228

申请日：2023-02-17

申请人： TES Co., Ltd

发明人： Sang-Jean JEON ,  Hyun-Sang HWANG

IPC分类号： B23Q3/154 ,  H01J37/32

CPC分类号： B23Q3/154 ,  H01J37/32715 ,  H01J37/32541 ,  H01J37/32568 ,  H01J37/32697 ,  H01J2237/332

摘要： There is provided a substrate support device. The substrate support device includes a substrate support part on which a wafer is deposited, the substrate support part including a first mesh electrode and a second mesh electrode disposed under the first mesh electrode; a chucking circuit configured to apply a DC voltage to the first mesh electrode; and an edge control circuit configured to control timings of operations related to the first mesh electrode and the second mesh electrode and control RF (Radio Frequency). The second mesh electrode is divided into a plurality of second sub-mesh electrode to remove an induced electromotive force generated due to a closed loop.

公开(公告)号：US20180111237A1

公开(公告)日：2018-04-26

申请号：US15786941

申请日：2017-10-18

申请人： Creative Engineering Solutions, Inc.

发明人： Jim G. Michael

IPC分类号： B23Q3/154 ,  B25B11/00 ,  B23Q1/03

CPC分类号： B23Q3/154 ,  B23Q1/032 ,  B25B11/002 ,  B25B27/14 ,  F16B2001/0035

摘要： An adjustable depth magnetic device comprises a switchable magnet, switchable magnet carrier, or switchable magnet integrated into a carrier, constrained by and locked into position by a receiver that is separate from or integrated into an object or fixture. The adjustable depth magnetic device may be affixed to or integrated into an object for the purpose of constraining said object to a ferrous target; or the adjustable depth magnetic device may be affixed to or integrated into a fixture to facilitate manufacturing, production, and/or assembly operations.

公开(公告)号：US20140008853A1

公开(公告)日：2014-01-09

申请号：US13500566

申请日：2011-11-07

申请人： Daniela Innocente ,  Anja Herrmann

发明人： Daniela Innocente ,  Anja Herrmann

IPC分类号： B23Q3/154

CPC分类号： B23Q3/1546 ,  B23Q3/154

摘要： A magnetic device for gripping and clamping a workpiece in a machining unit or on a machining line including a magnetic plate having a distribution of high-energy permanent-magnet modules, which can be electrically activated. An auxiliary workpiece-holder plate made of ferromagnetic material rests on a main surface of the magnetic plate and has a top surface shaped in a way complementary to a surface of the workpiece that rests thereon. The workpiece rests on the top surface of the auxiliary workpiece-holder plate only in points corresponding to some supporting pads, whilst the facing surfaces of the workpiece and auxiliary workpiece-holder plate are kept slightly set apart from one another for most of their extension.

摘要翻译： 一种用于在加工单元中或在包括具有能够电活动的高能永磁体模块分布的磁性板的加工线上夹持和夹紧工件的磁性装置。 由铁磁材料制成的辅助工件保持器板搁置在磁性板的主表面上，并且具有与搁置在其上的工件的表面互补的方式成形的顶表面。 工件仅在与一些支撑垫相对应的位置处于辅助工件夹持板的顶表面上，而工件和辅助工件夹持板的相对表面在其大部分延伸时保持彼此稍微分开。

公开(公告)号：US08292276B2

公开(公告)日：2012-10-23

申请号：US12677964

申请日：2008-06-30

申请人： Michele Cardone ,  Giovanni Cosmai ,  Roberto Faranda ,  Antonino Giglio

发明人： Michele Cardone ,  Giovanni Cosmai ,  Roberto Faranda ,  Antonino Giglio

IPC分类号： B25B11/00 ,  H01F7/126

CPC分类号： B23Q3/154 ,  B25B11/002

摘要： The present invention relates to a one-piece multipole plate for a magnetic clamping apparatus, a process for making such plate and a magnetic apparatus having such plate, wherein the magnetic apparatus has a plurality of pole pieces and said plurality of pole pieces extend from said plate and are formed of one piece with said plate.

摘要翻译： 本发明涉及一种用于磁性夹紧装置的一件式多极板，用于制造这种板的方法和具有这种板的磁性装置，其中磁性装置具有多个极片，并且所述多个极片从所述 并且与所述板一体形成。

公开(公告)号：US07142405B2

公开(公告)日：2006-11-28

申请号：US10737816

申请日：2003-12-18

申请人： Shinya Miyaji ,  Shinji Saito

发明人： Shinya Miyaji ,  Shinji Saito

IPC分类号： H02N13/00

CPC分类号： B23Q3/154 ,  Y10T279/23

摘要： The present invention relates to an electrostatic chuck in which unification of a dielectric layer and a heating and cooling flange is omitted, whereby production cost can be decreased, resulting in having adequate corrosion resistance especially for high temperature processes for semiconductor. The electrostatic chuck comprises a stage and a dielectric layer formed on an upper surface of the stage by thermal spraying, and the dielectric layer is made of magnesium oxide.

摘要翻译： 本发明涉及一种静电卡盘，其中省略了电介质层和加热和冷却法兰的统一，从而可以降低生产成本，从而具有足够的耐腐蚀性，特别是对于半导体的高温工艺。 静电卡盘包括通过热喷涂形成在台的上表面上的载物台和电介质层，并且电介质层由氧化镁制成。

公开(公告)号：US20060023393A1

公开(公告)日：2006-02-02

申请号：US10529382

申请日：2003-09-25

申请人： Fow-Lai Poh

发明人： Fow-Lai Poh

IPC分类号： H01T23/00

CPC分类号： H02N13/00 ,  B23Q3/154 ,  H01L21/6833

摘要： An electrostatic holding device (100) in which an electrode group (103) having a plurality of electrodes covered with an insulating material (102) is used as a holding surface applies predetermined voltage to the electrode group (103) to hold a holding object (104) by an electrostatic force with a contact state or with a floating non-contact state. The electrostatic holding includes an internal polarization eliminating device (applied voltage control portion 105) to eliminate the internal polarization generating in the insulating material (102) by switching the polarity of voltage to be applied to the electrode group (103). There are provided with the electrostatic holding device in which the electrostatic attraction does not deteriorate by usability, and electrostatic tweezers in which the electrostatic attraction does not deteriorate when the tweezers are manually used.

摘要翻译： 使用具有被绝缘材料（102）覆盖的多个电极的电极组（103）作为保持表面的静电保持装置（100）向电极组（103）施加预定的电压以保持保持对象 104）通过具有接触状态或浮动非接触状态的静电力。 静电保持包括通过切换施加到电极组（103）的电压的极性来消除绝缘材料（102）中产生的内部偏振的内部偏振消除装置（施加电压控制部分105）。 设置有静电吸引装置，其中静电吸引力不会由于可用性而劣化，并且当手动使用镊子时静电吸引不会劣化的静电镊子。

公开(公告)号：US20040218340A1

公开(公告)日：2004-11-04

申请号：US10857068

申请日：2004-05-28

申请人： Toto, Ltd. ,  Ulvac, Inc.

发明人： Tetsuo Kitabayashi ,  Hiroaki Hori ,  Takeshi Uchimura ,  Noriaki Tateno ,  Koh Fuwa ,  Ken Maehara

IPC分类号： H01H001/00

CPC分类号： B23Q3/15 ,  B23Q3/154 ,  H01L21/6833 ,  H02N13/00

摘要： An electrostatic chuck for attracting an insulative substrate to be processed, the electrostatic chuck comprising a dielectric layer having a first surface which attracts an insulative substrate, and a second surface on which are provided a plurality of electrodes, and an insulative support base plate fixing said dielectric layer. A distance between adjacent ones of the electrodes and the thickness of the dielectric layer are adjusted such that when a potential difference is established between the electrodes, a non-uniform electric field is formed in which the insulative substrate is partially polarized and attracted to the first surface by gradient force.

公开(公告)号：US06768627B1

公开(公告)日：2004-07-27

申请号：US09979627

申请日：2002-02-11

申请人： Tetsuo Kitabayashi ,  Hiroaki Hori ,  Takeshi Uchimura ,  Noriaki Tateno ,  Koh Fuwa ,  Ken Maehira

发明人： Tetsuo Kitabayashi ,  Hiroaki Hori ,  Takeshi Uchimura ,  Noriaki Tateno ,  Koh Fuwa ,  Ken Maehira

IPC分类号： H01T2300

CPC分类号： B23Q3/15 ,  B23Q3/154 ,  H01L21/6833 ,  H02N13/00

摘要： According to the present invention, there is provided an electrostatic chuck for electrostatically attracting an insulative substrate, an apparatus for heating/cooling an insulative substrate using the electrostatic chuck, and a method for controlling the temperature of an insulative substrate. The shape and the properties of the dielectric, and the shape of the electrodes, which form the electrostatic chuck, are disclosed. Also the apparatus for heating/cooling an insulative substrate comprising a plate, a gas supply conduit and a temperature controlling system, and the apparatus for processing an insulative substrate in which the apparatus for heating/cooling an insulative substrate is installed are disclosed.

摘要翻译： 一种用于吸引在真空气氛下使用的绝缘衬底的静电吸盘包括：具有吸引绝缘衬底的第一表面的介电层和在其上设有多个电极的第二表面; 绝缘支撑基板，其上固定所述电介质层; 设置在所述绝缘支撑基板上的多个导电端子; 以及电极和导电端子之间的电连接。

公开(公告)号：US20030007308A1

公开(公告)日：2003-01-09

申请号：US10169755

申请日：2002-07-19

发明人： Yoshio Harada ,  Junichi Takeuchi ,  Kenichiro Togoe

IPC分类号： H02N013/00

CPC分类号： B23Q3/154 ,  H01L21/6833

摘要： It is to provide an electrostatic chuck member having a strong adsorption force and an excellent responsibility (release property) in the stop of voltage application and is an electrostatic chuck member comprising a substrate, an undercoat of a metallic layer formed on at least one surface thereof, a lower insulating layer of Al2O3 ceramic formed on the undercoat, a metallic electrode layer formed on the lower insulating layer and an upper insulating layer of Al2O3 ceramic formed on the electrode layer as a topcoat.

摘要翻译： 本发明提供一种静电卡盘部件，其具有强的吸附力和在施加电压停止时的优异的责任（释放特性），并且是静电卡盘部件，其包括基板，在其至少一个表面上形成的金属层的底涂层 形成在底涂层上的Al 2 O 3陶瓷的下绝缘层，形成在下绝缘层上的金属电极层和形成在作为顶涂层的电极层上的Al 2 O 3陶瓷的上绝缘层。