摘要:
A coating device is provided with a stage on which a substrate is configured to be placed, an applicator movably arranged relative to the substrate placed on the stage and configured to discharge a coating liquid from a nozzle to form a coating film on the substrate, and a dryer having an air supply port with at least one porous member. The dryer is configured to dry the coating film formed on the substrate by the applicator by supplying air to the coating film from the air supply port. The at least one porous member is configured and arranged to suppress formation of local variations in an amount of air supplied from the air supply port.
摘要:
Methods and apparatus for removing deposits in self-assembled monolayer (SAM) based selective deposition process schemes using cryogenic gas streams are described. Some methods include removing deposits in self-assembled monolayer (SAM) based selective depositions by exposing the substrate to cryogenic aerosols to remove undesired deposition on SAM protected surfaces. Processing chambers for cryogenic gas assisted selective deposition are also described.
摘要:
Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (PbxLay)(ZrzTi(1-z))O3 [wherein 0.9
摘要翻译:公开了用于形成选自PLZT,PZT和PT的一种材料的铁电薄膜的铁电薄膜形成用组合物。 铁电薄膜形成用组合物是由通式(1)表示的复合金属氧化物(A):(PbxLay)(ZrzTi(Zr x Ti y))的混合物形成的混合复合金属氧化物的薄膜的液体组合物, 1)表示的复合氧化物(B)或羧酸(B)的化合物(其中0.9
摘要:
The present invention provides a method for forming an oxide film by which normal formation of an oxide film is always achieved without receiving an influence of a change in the atmosphere, a metal oxide film having a low resistance can be formed, and a high efficiency of film formation is obtained. In the present invention, a raw material solution containing an alkyl compound is formed into a mist and ejected to a substrate (100) in the atmosphere. Additionally, an oxidizing agent that exerts an oxidizing effect on the alkyl compound is supplied to the mist of the raw material solution. Through the above-described processes, an oxide film is formed on the substrate in the present invention.
摘要:
Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (PbxLay)(ZrzTi(1-z))O3 [wherein 0.9
摘要翻译:公开了用于形成选自PLZT,PZT和PT的一种材料的铁电薄膜的铁电薄膜形成用组合物。 铁电薄膜形成用组合物是由通式(1)表示的复合金属氧化物(A):(PbxLay)(ZrzTi(Zr x Ti y))的混合物形成的混合复合金属氧化物的薄膜的液体组合物, 1)表示的复合氧化物(B)或羧酸(B),通式(2)表示的化合物(其中0.9
摘要:
Organic films can be annealed by exposure to a solvent vapor. The solvent vapor annealing renders the organic film insoluble even in a solvent of a solution from which it was deposited. This enables deposition of two or more organic films in sequence without having one deposition alter an underlying organic film. Devices can be easily fabricated with organic films annealed in this manner when no other solution processing method is possible.
摘要:
A method for processing an organosiloxane film includes loading a target substrate (W) with a coating film formed thereon into a reaction chamber (2), and performing a heat process on the target substrate (W) within the reaction chamber (2) to bake the coating film. The coating film contains a polysiloxane base solution having an organic functional group. The heat process includes a temperature setting step of setting an interior of the reaction chamber (2) at a process temperature by heating, and a supplying step of supplying a baking gas into the reaction chamber (2) set at the process temperature, while activating the baking gas by a gas activation section (14) disposed outside the reaction chamber (2).
摘要:
The invention concerns a method for forming a coating with excellent adhesion, water resistance and appearance which comprises the combination of steps of applying on the hydrophobic surfaces having a surface tension of 35 dyne/cm or less of a substrate a dry surface treatment selected from vacuum plasma treatment, corona discharge treatment and ozonization treatment, coating thus treated surfaces with a dispersion type aqueous coating composition comprising an aqueous varnish of at least one aqueous resin whose 1 wt % deionized water solution has a surface tension of 51 dyne/cm or less and which has a water tolerance of 4 or more, and water insoluble resin uniformly dispersed in fine particles in said varnish, the water insoluble resin having a SP value which is 1.0 to 2.2 lower than that of said aqueous resin, and baking the coating. The present method is specifically useful in the coating of automobile bodies, appliances and other high-quality products.
摘要:
A razor blade having a fluorinated polymer coating over its cutting edge and a method for its preparation. A hydrocarbon polymer is disposed on the cutting edge, which polymer after appropriate sintering is brought into contact with a fluorine-rich atmosphere resulting in replacement of a plurality of hydrogen atoms by fluorine atoms creating a multiplicity of (--CF.sub.2 --CF.sub.2 --) groups.
摘要:
A method for uniformly forming a nickel-metal alloy catalyst in a fuel electrode of a solid oxide electrolysis cell is provided.Specifically, before the nickel-metal alloy catalyst is formed, a metal oxide is uniformly distributed on nickel oxide contained in the fuel electrode through infiltration of a metal oxide precursor solution and hydrolysis of urea.