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公开(公告)号：US20100122603A1
公开(公告)日：2010-05-20
申请号：US12618839
申请日：2009-11-16
申请人： Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
发明人： Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
IPC分类号： G05G11/00
CPC分类号： H01L21/682 , G03F7/70716 , Y10T74/20348
摘要： A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units (10) are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units (10) are constructed at least partially as swivel joints, and a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part (21) of each swivel joint, and in that the push rods (4) are hollow and constitute a component part of the suction lines for extracting the operating gas.
摘要翻译： 用于真空应用的台式系统具有由空气静力轴承单元引导的基板和移动台。 轴承单元（10）连接到用于供应和提取用于轴承单元的操作所需的气体的供应管线和抽吸管线，并且每个具有至少一个级的密封系统，并且包括吸入通道和密封间隙 用于相对于真空的密封。 台面系统的特征在于，空气静力轴承单元（10）至少部分地构造为旋转接头，并且由用于将移动台横向引导的驱动器（5）致动的推杆（4）连接到旋转 每个旋转接头的部分（21），并且推杆（4）是中空的，并且构成用于抽出操作气体的抽吸管线的组成部分。
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公开(公告)号：US20080197295A1
公开(公告)日：2008-08-21
申请号：US10599659
申请日：2005-03-30
CPC分类号： G11B7/261 , B82Y10/00 , B82Y40/00 , G03F7/0005 , G03F7/0017 , G11B7/007 , H01J37/3174
摘要： The invention relates to a device and a method for producing resist profiled elements. According to the invention, an electron beam lithography system is used to produce an electron beam, the axis of the beam being essentially perpendicular to a resist layer in which the resist profiled element is to be produced. The electron beam can be adjusted in terms of the electron surface dose in such a way that a non-orthogonal resist profiled element can be produced as a result of the irradiation by the electron beam.
摘要翻译： 本发明涉及一种用于制造抗蚀剂成型元件的装置和方法。 根据本发明，使用电子束光刻系统来产生电子束，所述光束的轴线基本上垂直于要在其中产生抗蚀剂成型元件的抗蚀剂层。 可以以电子表面剂量的方式调整电子束，使得由于电子束的照射可以产生非正交抗蚀剂成型元件。
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公开(公告)号：US08267582B2
公开(公告)日：2012-09-18
申请号：US12421798
申请日：2009-04-10
申请人： Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
发明人： Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
IPC分类号： F16C32/06
CPC分类号： G03F7/70716 , B82Y10/00 , B82Y40/00 , G03F7/70816 , G03F7/70991 , H01J37/20 , H01J37/3174 , H01J2237/182 , H01J2237/2005 , H01J2237/20221 , H01L21/68
摘要： A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.
摘要翻译： 用于由空气静力轴承元件引导的真空应用的桌子，具有固定安装的支撑结构和桌面，其可以通过滑块相对于固定安装的支撑结构在x方向和y方向上移位。 滑块设置有用于引导的空气静力轴承元件，这些空气静力轴承元件连接到用于供应用于运行气体轴承所需的气体的供给管线和用于去除该气体的吸入管线。 抽吸管线包括至少一个可变长度的管线装置，其具有第一管道构件和第二管道构件，该管道构件和第二管道构件穿过另一个内部而不接触，至少一个密封间隙设置在管道构件之间。
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公开(公告)号：US10814361B2
公开(公告)日：2020-10-27
申请号：US15185724
申请日：2016-06-17
发明人： Christian Borschel
摘要： In a particle beam apparatus and a method for operating a particle beam apparatus, the particle beam apparatus has a column having a particle-beam optical system for generating a particle beam, to thereby expose a desired pattern in a vacuum sample chamber in an exposure operation. In a cleaning operation, a regulable gas stream having photodissociatable gas is fed to the column and/or the vacuum sample chamber via a gas-feed system. The photodissociation of the supplied gas is brought about in the cleaning operation with the aid of a plurality of light sources distributed spatially in the column and/or in the vacuum sample chamber. In the cleaning operation, individual light sources are able to be switched on and off selectively with respect to time via a control unit connected to the light sources, in order to clean individual elements in the column and/or in the vacuum sample chamber in targeted fashion.
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公开(公告)号：US08496221B2
公开(公告)日：2013-07-30
申请号：US12618839
申请日：2009-11-16
申请人： Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
发明人： Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
IPC分类号： F16C32/06
CPC分类号： H01L21/682 , G03F7/70716 , Y10T74/20348
摘要： A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units (10) are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units (10) are constructed at least partially as swivel joints, and a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part (21) of each swivel joint, and in that the push rods (4) are hollow and constitute a component part of the suction lines for extracting the operating gas.
摘要翻译： 用于真空应用的台式系统具有由空气静力轴承单元引导的基板和移动台。 轴承单元（10）连接到用于供应和提取用于轴承单元的操作所需的气体的供应管线和抽吸管线，并且每个具有至少一个级的密封系统，并且包括吸入通道和密封间隙 用于相对于真空的密封。 台面系统的特征在于，空气静力轴承单元（10）至少部分地构造为旋转接头，并且由用于将移动台横向引导的驱动器（5）致动的推杆（4）连接到旋转 每个旋转接头的部分（21），并且推杆（4）是中空的，并且构成用于抽出操作气体的抽吸管线的组成部分。
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6.发明授权公开(公告)号：US08148702B2
公开(公告)日：2012-04-03
申请号：US12635140
申请日：2009-12-10
IPC分类号： G03F7/00 , G21K5/04 , H01J29/00 , H01J37/147
CPC分类号： H01J37/3177 , B82Y10/00 , B82Y40/00 , G03F1/78 , H01J37/045 , H01J37/09 , H01J37/1471 , H01J37/302 , H01J37/3174 , H01J2237/0435 , H01J2237/045 , H01J2237/0492
摘要： The invention is directed to an arrangement for the illumination of a substrate with a plurality of individually shaped, controllable particle beams, particularly for electron beam lithography in the semiconductor industry. It is the object of the invention to find a novel possibility for illuminating a substrate with a plurality of individually shaped, controllable particle beamlets which permits a high-resolution structuring of substrates with a high substrate throughput without limiting the flexibility of the applicable structure patterns or limiting the high substrate throughput due to a required flexibility.
摘要翻译： 本发明涉及用于照射具有多个单独成形的可控粒子束的衬底的布置，特别是用于半导体工业中的电子束光刻。 本发明的目的是找到用多个单独成形的可控粒子束照射衬底的新型可能性，其允许具有高衬底生产能力的衬底的高分辨率结构化而不限制适用结构图案的柔性， 由于所需的灵活性，限制了高的基板产量。
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7.发明授权Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrate 有权用于粒子束的多光束调制器以及多光束调制器用于衬底无掩模构造的用途公开(公告)号：US07741620B2
公开(公告)日：2010-06-22
申请号：US11666957
申请日：2005-10-25
IPC分类号： G21K1/02
CPC分类号： H01J37/3177 , B82Y10/00 , B82Y40/00 , H01J2237/0437 , H01J2237/31774
摘要： The invention discloses a multibeam modulator which generates a plurality of individual beams from a particle beam. The particle beam illuminates the multibeam modulator at least partially over its surface. The multibeam modulator comprises a plurality of aperture groups composed of aperture row groups. The totality of all aperture rows defines a matrix of m×n cells, where m cells form a row, and k openings are formed in each row. The density of openings within a row is inhomogeneously distributed.
摘要翻译： 本发明公开了一种从粒子束产生多个单独波束的多波束调制器。 粒子束至少部分地在其表面上照射多光束调制器。 多波束调制器包括由孔径行组组成的多个孔径组。 所有孔径行的总和定义了m×n个单元的矩阵，其中m个单元格形成一行，并且在每一行中形成k个开口。 一行内的开口密度不均匀分布。
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公开(公告)号：US20080035853A1
公开(公告)日：2008-02-14
申请号：US11587227
申请日：2005-03-03
IPC分类号： H01J37/141
CPC分类号： H01J37/3175 , B82Y10/00 , B82Y40/00 , H01J2237/1405 , H01J2237/1534
摘要： An illumination condenser for a particle optics projection system is disclosed. The illumination condenser is formed of a magnetic lens comprising a plurality of gaps. The magnetic lens is formed of a sequence of a plurality of partial lenses.
摘要翻译： 公开了一种用于粒子光学投影系统的照明冷凝器。 照明聚光器由包括多个间隙的磁性透镜形成。 磁性透镜由多个部分透镜的顺序形成。
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公开(公告)号：US07880152B2
公开(公告)日：2011-02-01
申请号：US10599659
申请日：2005-03-30
CPC分类号： G11B7/261 , B82Y10/00 , B82Y40/00 , G03F7/0005 , G03F7/0017 , G11B7/007 , H01J37/3174
摘要： The invention relates to a device and a method for producing resist profiled elements. According to the invention, an electron beam lithography system is used to produce an electron beam, the axis of the beam being essentially perpendicular to a resist layer in which the resist profiled element is to be produced. The electron beam can be adjusted in terms of the electron surface dose in such a way that a non-orthogonal resist profiled element can be produced as a result of the irradiation by the electron beam.
摘要翻译： 本发明涉及一种用于制造抗蚀剂成型元件的装置和方法。 根据本发明，使用电子束光刻系统来产生电子束，所述光束的轴线基本上垂直于要在其中产生抗蚀剂成型元件的抗蚀剂层。 可以以电子表面剂量的方式调整电子束，使得由于电子束的照射可以产生非正交抗蚀剂成型元件。
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10.发明申请AEROSTATIC BEARING ARRANGEMENT AND ASSOCIATED ELECTROSTATIC PRELOADING UNIT, PARTICULARLY FOR VACUUM APPLICATION 有权航空轴承安装和相关静电拉伸装置，特别适用于真空应用公开(公告)号：US20100061667A1
公开(公告)日：2010-03-11
申请号：US12553340
申请日：2009-09-03
申请人： Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
发明人： Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
IPC分类号： F16C17/00
CPC分类号： F16C29/007 , F16C32/0404 , F16C32/0603 , F16C32/0666 , F16C32/0674 , F16C39/00
摘要： A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.
摘要翻译： 一种用于将设备移动到基座结构上，特别是在真空环境中的所提出的空气静力轴承装置具有至少一个空气静力轴承元件，其包括具有负载区域和吸入区域的轴承体。 具有至少一个电极的静电预加载单元与至少一个空气静力轴承元件相关联，并且可以以这样的方式施加电压，使得在轴承体的表面法线方向上产生力分量 空气静力轴承元件。
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