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43 条记录 (耗时 0.019 秒)

    Multi-directional actuator
    1.
    发明授权
    Multi-directional actuator 有权

    公开(公告)号：US11005392B2

    公开(公告)日：2021-05-11

    申请号：US16252091

    申请日：2019-01-18

    申请人： MEMS Drive, Inc.

    发明人： Xiaolei Liu ,  Roman Gutierrez ,  Matthew Ng ,  Guiqin Wang

    IPC分类号： H02N1/00

    摘要： An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

    MEMS Actuator System
    2.
    发明申请
    MEMS Actuator System 有权

    公开(公告)号：US20210088804A1

    公开(公告)日：2021-03-25

    申请号：US17025147

    申请日：2020-09-18

    申请人： MEMS Drive, Inc.

    发明人： MATTHEW NG ,  Xiaolei Liu ,  Guiqin Wang

    IPC分类号： G02B27/64 ,  H02N1/00 ,  H02K41/035 ,  H02N2/02

    摘要： A multi-axis MEMS assembly is configured to provide multi-axis movement and includes: a first in-plane MEMS actuator configured to enable movement along at least an X-axis; and a second in-plane MEMS actuator configured to enable movement along at least a Y-axis; wherein the first in-plane MEMS actuator is coupled to the second in-plane MEMS actuator.

    Electric connection flexures
    3.
    发明授权
    Electric connection flexures 有权

    公开(公告)号：US10442680B2

    公开(公告)日：2019-10-15

    申请号：US15182389

    申请日：2016-06-14

    申请人： MEMS DRIVE, INC.

    发明人： Xiaolei Liu ,  Kegang Huang ,  Guiqin Wang ,  Matthew Ng ,  Benson Mai ,  Changgeng Liu

    IPC分类号： H02N2/02 ,  B81B3/00 ,  H01L41/09

    摘要： Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.

    Shock caging features for MEMS actuator structures
    4.
    发明授权
    Shock caging features for MEMS actuator structures 有权

    公开(公告)号：US10259702B2

    公开(公告)日：2019-04-16

    申请号：US15412488

    申请日：2017-01-23

    申请人： MEMS Drive, Inc.

    发明人： Xiaolei Liu ,  Matthew Ng ,  Robert Calvet ,  Gerardo Morabito

    IPC分类号： H02N1/00 ,  B81B3/00 ,  B81B7/00

    摘要： Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

    Low stiffness flexure
    5.
    发明授权
    Low stiffness flexure 有权

    公开(公告)号：US10071903B2

    公开(公告)日：2018-09-11

    申请号：US14677730

    申请日：2015-04-02

    申请人： MEMS DRIVE, INC.

    发明人： Xiaolei Liu ,  Roman Gutierrez ,  Guiqin Wang ,  Benson Mai ,  Matthew Ng

    IPC分类号： B81B3/00

    CPC分类号： B81B3/0051 ,  B81B3/007 ,  B81B2203/0163 ,  Y10T74/20

    摘要： A flexure includes a support first end connected to a first frame; a support second end connected to a second frame; and a buckled section connecting the first support end to the second support end. The length of the flexure is substantially greater than its width, and the width of the flexure is substantially greater than its thickness. During operation, the flexure is maintained in a buckled state where the flexure's stiffness is significantly less than in the unbuckled state. In one implementation, a stage includes a flexure array joining a first frame and a second frame, where: the first frame and the second frame are substantially on a plane; the flexure array is substantially on the plane prior to buckling by the flexures of the flexure array; and the flexure array is bent substantially out of the plane after buckling by the flexures.

    Moving image sensor package
    9.
    发明授权
    Moving image sensor package 有权
    运动图像传感器包装

    公开(公告)号：US09578217B2

    公开(公告)日：2017-02-21

    申请号：US14692662

    申请日：2015-04-21

    申请人： MEMS DRIVE, INC.

    发明人： Roman Gutierrez ,  Guiqin Wang ,  Xiaolei Liu

    IPC分类号： H04N5/228 ,  H04N5/225 ,  H05K1/18

    CPC分类号： H04N5/2253 ,  H05K1/182 ,  H05K2201/10083 ,  H05K2201/10121 ,  Y10T29/4913

    摘要： A moving image sensor package is provided that may be used to provide optical image stabilization (OIS) in the same form factor as non-OIS enabled image sensors utilized in portable/mobile devices. The moving image sensor package includes an image sensor attached to a MEMS actuator mounted within a cutout in a circuit board, wherein the MEMS actuator has substantially the same thickness as the circuit board.

    摘要翻译： 提供了一种运动图像传感器封装，其可用于以与便携式/移动设备中使用的非OIS启用的图像传感器相同的形状因数提供光学图像稳定（OIS）。 运动图像传感器封装包括附接到安装在电路板中的切口内的MEMS致动器的图像传感器，其中MEMS致动器具有与电路板基本相同的厚度。

    COMB DRIVE WITH NON-PARALLEL OVERLAPPING COMB FINGERS
    10.
    发明申请
    COMB DRIVE WITH NON-PARALLEL OVERLAPPING COMB FINGERS 审中-公开
    与非平行重叠组合手指组合驱动

    公开(公告)号：US20160268927A1

    公开(公告)日：2016-09-15

    申请号：US14656618

    申请日：2015-03-12

    申请人： MEMS DRIVE, INC.

    发明人： XIAOLEI LIU ,  GUIQIN WANG ,  ROMAN GUTIERREZ

    IPC分类号： H02N1/00 ,  B81C1/00 ,  B81B3/00

    CPC分类号： H02N1/008 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/019

    摘要： A comb drive includes an inactive comb finger array and an opposing active comb finger array positioned to oppose the inactive comb finger array and configured to move in a non-linear path relative to the inactive comb finger array, wherein each comb finger array includes a comb spine and a plurality of comb fingers extending from its comb spine, and each comb finger on the active comb finger array is shaped to match a non-parallel profile. The non-parallel profile may be tapered, curved, or selected to linearize the capacitance in a gap between adjacent comb fingers from the inactive comb finger array when a comb finger from the active comb finger array moves through the gap.

    摘要翻译： 梳状驱动器包括不活动的梳状指状阵列和相对的有源梳状指阵列，定位成与非活性梳状指状阵列相对并配置为相对于非活性梳状指状阵列在非线性路径中移动，其中每个梳齿阵列包括梳子 脊和从其梳脊延伸的多个梳齿，并且活动梳指阵列上的每个梳指被成形为匹配非平行轮廓。 非平行轮廓可以是渐缩的，弯曲的或选择的，以便当来自主动梳齿阵列的梳齿移动穿过间隙时，使来自无源梳指阵列的相邻梳齿之间的间隙中的电容线性化。