公开(公告)号：US10442680B2

公开(公告)日：2019-10-15

申请号：US15182389

申请日：2016-06-14

申请人： MEMS DRIVE, INC.

发明人： Xiaolei Liu ,  Kegang Huang ,  Guiqin Wang ,  Matthew Ng ,  Benson Mai ,  Changgeng Liu

IPC分类号： H02N2/02 ,  B81B3/00 ,  H01L41/09

摘要： Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.

公开(公告)号：US10071903B2

公开(公告)日：2018-09-11

申请号：US14677730

申请日：2015-04-02

申请人： MEMS DRIVE, INC.

发明人： Xiaolei Liu ,  Roman Gutierrez ,  Guiqin Wang ,  Benson Mai ,  Matthew Ng

IPC分类号： B81B3/00

CPC分类号： B81B3/0051 ,  B81B3/007 ,  B81B2203/0163 ,  Y10T74/20

摘要： A flexure includes a support first end connected to a first frame; a support second end connected to a second frame; and a buckled section connecting the first support end to the second support end. The length of the flexure is substantially greater than its width, and the width of the flexure is substantially greater than its thickness. During operation, the flexure is maintained in a buckled state where the flexure's stiffness is significantly less than in the unbuckled state. In one implementation, a stage includes a flexure array joining a first frame and a second frame, where: the first frame and the second frame are substantially on a plane; the flexure array is substantially on the plane prior to buckling by the flexures of the flexure array; and the flexure array is bent substantially out of the plane after buckling by the flexures.