Invention Grant
- Patent Title: Electric connection flexures
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Application No.: US15182389Application Date: 2016-06-14
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Publication No.: US10442680B2Publication Date: 2019-10-15
- Inventor: Xiaolei Liu , Kegang Huang , Guiqin Wang , Matthew Ng , Benson Mai , Changgeng Liu
- Applicant: MEMS DRIVE, INC.
- Applicant Address: US CA Arcadia
- Assignee: MEMS Drive, Inc.
- Current Assignee: MEMS Drive, Inc.
- Current Assignee Address: US CA Arcadia
- Agency: Holland & Knight LLP
- Agent Brian J. Colandreo; Michael T. Abramson
- Main IPC: H02N2/02
- IPC: H02N2/02 ; B81B3/00 ; H01L41/09

Abstract:
Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.
Public/Granted literature
- US20170359003A1 ELECTRIC CONNECTION FLEXURES Public/Granted day:2017-12-14
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