公开(公告)号：US20160268927A1

公开(公告)日：2016-09-15

申请号：US14656618

申请日：2015-03-12

申请人： MEMS DRIVE, INC.

发明人： XIAOLEI LIU ,  GUIQIN WANG ,  ROMAN GUTIERREZ

IPC分类号： H02N1/00 ,  B81C1/00 ,  B81B3/00

CPC分类号： H02N1/008 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/019

摘要： A comb drive includes an inactive comb finger array and an opposing active comb finger array positioned to oppose the inactive comb finger array and configured to move in a non-linear path relative to the inactive comb finger array, wherein each comb finger array includes a comb spine and a plurality of comb fingers extending from its comb spine, and each comb finger on the active comb finger array is shaped to match a non-parallel profile. The non-parallel profile may be tapered, curved, or selected to linearize the capacitance in a gap between adjacent comb fingers from the inactive comb finger array when a comb finger from the active comb finger array moves through the gap.

摘要翻译： 梳状驱动器包括不活动的梳状指状阵列和相对的有源梳状指阵列，定位成与非活性梳状指状阵列相对并配置为相对于非活性梳状指状阵列在非线性路径中移动，其中每个梳齿阵列包括梳子 脊和从其梳脊延伸的多个梳齿，并且活动梳指阵列上的每个梳指被成形为匹配非平行轮廓。 非平行轮廓可以是渐缩的，弯曲的或选择的，以便当来自主动梳齿阵列的梳齿移动穿过间隙时，使来自无源梳指阵列的相邻梳齿之间的间隙中的电容线性化。

公开(公告)号：US20170040909A1

公开(公告)日：2017-02-09

申请号：US14818086

申请日：2015-08-04

申请人： MEMS DRIVE, INC.

发明人： XIAOLEI LIU ,  ROMAN GUTIERREZ ,  MATTHEW NG ,  GUIQIN WANG

IPC分类号： H02N1/00

CPC分类号： H02N1/008

摘要： An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

摘要翻译： 提供了一种装置。 该装置包括双向梳驱动致动器。 该装置还可以包括悬臂。 悬臂包括连接到双向梳状驱动致动器的第一端和连接到内框架的第二端。 此外，悬臂可以包括用于布置电信号的第一和第二导电层。 可以包括多维致动器的所公开的装置的实施例允许将更多数量的电信号路由到致动器。 此外，所公开的设备允许致动多个方向，这可以提供增加的控制，精确度和运动的灵活性。 因此，所公开的实施例提供了关于光学图像稳定和自动聚焦能力的显着益处，例如在尺寸和功率受限的环境中。

公开(公告)号：US20150341534A1

公开(公告)日：2015-11-26

申请号：US14819413

申请日：2015-08-05

申请人： MEMS DRIVE, INC.

发明人： MATTHEW NG ,  ROMAN GUTIERREZ ,  GUIQIN WANG

IPC分类号： H04N5/225 ,  H04N5/335 ,  H02N1/00

CPC分类号： H04N5/2328 ,  B81B3/0021 ,  B81B3/007 ,  B81B2203/0163 ,  B81B2207/07 ,  H02N1/008 ,  H04N5/225 ,  H04N5/2254 ,  H04N5/335 ,  Y10T29/49107

摘要： A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.

摘要翻译： 描述了包括弯曲弯曲的MEMS致动器和组装致动器的方法。 组装的MEMS致动器包括内框架; 外框架包括锁定的电杆，其中第一闩锁杆包括固定到第二闩锁杆的相应闩锁槽的闩锁突起; 以及将内框架连接到外框架的弯曲弯曲。 通过将电杆闭锁机构并入MEMS致动器的外框架的设计中，挠性件在组装MEMS致动器期间被弯曲。 在一个实现中，通过向MEMS致动器提供具有将MEMS致动器的外框架耦合到MEMS致动器的内框架的未弯曲挠曲件的MEMS致动器来组装，其中外框架包括未锁定的电杆，并且锁定 外框，导致弯曲弯曲。

公开(公告)号：US20150321900A1

公开(公告)日：2015-11-12

申请号：US14677730

申请日：2015-04-02

申请人： MEMS DRIVE, INC.

发明人： XIAOLEI LIU ,  ROMAN GUTIERREZ ,  GUIQIN WANG ,  BENSON MAI ,  MATTHEW NG

IPC分类号： B81B3/00

CPC分类号： B81B3/0051 ,  B81B3/007 ,  B81B2203/0163 ,  Y10T74/20

摘要： A flexure includes a support first end connected to a first frame; a support second end connected to a second frame; and a buckled section connecting the first support end to the second support end. The length of the flexure is substantially greater than its width, and the width of the flexure is substantially greater than its thickness. During operation, the flexure is maintained in a buckled state where the flexure's stiffness is significantly less than in the unbuckled state. In one implementation, a stage includes a flexure array joining a first frame and a second frame, where: the first frame and the second frame are substantially on a plane; the flexure array is substantially on the plane prior to buckling by the flexures of the flexure array; and the flexure array is bent substantially out of the plane after buckling by the flexures.

摘要翻译： 挠性件包括连接到第一框架的支撑件第一端; 连接到第二框架的支撑件第二端; 以及将第一支撑端连接到第二支撑端的弯曲部分。 挠曲的长度基本上大于其宽度，并且挠曲件的宽度基本上大于其厚度。 在操作过程中，挠曲保持在弯曲状态，其中挠曲刚度明显小于未弯曲状态。 在一个实施方案中，舞台包括接合第一框架和第二框架的挠曲阵列，其中：第一框架和第二框架基本上在平面上; 弯曲阵列在由弯曲阵列的挠曲弯曲之前基本上在平面上; 并且挠曲阵列在由弯曲部弯曲之后基本上被弯曲成平面。

公开(公告)号：US20170088415A1

公开(公告)日：2017-03-30

申请号：US14872123

申请日：2015-09-30

申请人： MEMS DRIVE, INC.

发明人： ROMAN GUTIERREZ ,  TONY TANG ,  XIAOLEI LIU ,  GUIQIN WANG ,  MATTHEW NG

IPC分类号： B81B7/00 ,  B81C1/00

CPC分类号： H01L21/76816 ,  B81B3/0045 ,  B81B7/0029 ,  B81B2203/0353 ,  B81C1/00674 ,  B81C1/00682 ,  B81C2201/0112 ,  B81C2201/0135 ,  H01L21/768 ,  H01L21/76898 ,  H01L23/485 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/1461 ,  H01L2924/181

摘要： A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.

公开(公告)号：US20160212332A1

公开(公告)日：2016-07-21

申请号：US14599380

申请日：2015-01-16

申请人： MEMS DRIVE, INC.

发明人： TONY TANG ,  ROMAN GUTIERREZ

IPC分类号： H04N5/232 ,  G02B26/08

CPC分类号： H04N5/23232 ,  G02B26/0875 ,  G02B27/646 ,  H04N5/2253 ,  H04N5/2257 ,  H04N5/23258 ,  H04N5/23287 ,  H04N5/349

摘要： Systems and methods are provided for super-resolution imaging using 3-axis OIS. A super-resolution image may be created by enabling optical image stabilization (OIS) in three axes using an OIS system on a camera of an image capturing device; capturing an image of a scene using an image sensor of the camera; shifting the image on the image sensor by a predetermined subpixel amount; capturing the subpixel shifted image; and constructing a super-resolution image of the scene using the image and the subpixel shifted image. In one particular implementation, a position sensor may measure a positional drift of the image sensor after capturing the image. Using this measured positional drift, a time sufficient to shift the image sensor by a predetermined subpixel amount may be determined. The OIS may subsequently be disabled in one or two axes for the determined time.

摘要翻译： 提供了使用3轴OIS的超分辨率成像的系统和方法。 可以通过使用图像捕获装置的相机上的OIS系统在三个轴上实现光学图像稳定（OIS）来创建超分辨率图像; 使用相机的图像传感器捕获场景的图像; 将图像传感器上的图像移动预定的子像素量; 捕获子像素位移图像; 以及使用图像和子像素位移图像构建场景的超分辨率图像。 在一个具体实现中，位置传感器可以在捕获图像之后测量图像传感器的位置漂移。 使用该测量的位置漂移，可以确定足以将图像传感器移动预定子像素量的时间。 随后可以在一个或两个轴上禁用OIS确定的时间。

公开(公告)号：US20170088418A1

公开(公告)日：2017-03-30

申请号：US14872094

申请日：2015-09-30

申请人： MEMS DRIVE, INC.

发明人： ROMAN GUTIERREZ ,  TONY TANG ,  XIAOLEI LIU ,  MATTHEW NG ,  GUIQIN WANG

IPC分类号： B81C1/00

CPC分类号： B81C1/00476 ,  B81B2201/033 ,  B81C1/00619 ,  B81C99/0095 ,  B81C2201/0132 ,  B81C2201/056

摘要： A simplified MEMS fabrication process and MEMS device is provided that allows for cheaper and lighter-weight MEMS devices to be fabricated. The process comprises etching a plurality of holes or other feature patterns into a MEMS device, and then etching away the underlying wafer such that, after the etching process, the MEMS device is the required thickness and the individual die are separated, avoiding the extra steps of wafer thinning and die dicing. By etching trenches into the substrate wafer and filling them with a MEMS base material, sophisticated taller MEMS devices with larger force may be made.

公开(公告)号：US20160182887A1

公开(公告)日：2016-06-23

申请号：US14580919

申请日：2014-12-23

申请人： MEMS DRIVE, INC.

发明人： ROMAN GUTIERREZ

IPC分类号： H04N13/02

CPC分类号： H04N13/207 ,  G06T7/579 ,  G06T7/593 ,  H04N2013/0081

摘要： Systems and methods provide accurate pixel depth information to be applied to a single image taken by a single camera in generating a three-dimensional (3D) image. In particular, two or more images can be captured during, e.g., lateral movement of a camera to ascertain depth in a scene on a pixel level. Use of an optical image stabilization (OIS) system that can provide at least three axes of stabilization eliminates the variability associated with conventional systems that create problems with image registration. Further still, and because actual pixel depth information is being calculated rather than merely generating stereoscopic images to trick the eyes into perceiving depth, the pixel depth information that is calculated can be leveraged in other ways, such as for providing automated measurements merely by taking a picture of an object or scene.

摘要翻译： 系统和方法提供准确的像素深度信息，以应用于单个相机在生成三维（3D）图像时拍摄的单个图像。 特别地，可以在例如相机的横向移动期间捕获两个或更多个图像，以确定像素级上的场景中的深度。 使用能够提供至少三个稳定轴的光学图像稳定（OIS）系统消除了与产生图像配准问题的常规系统相关的可变性。 进一步地，由于正在计算实际的像素深度信息，而不仅仅是产生立体图像以诱使眼睛感知深度，所以计算的像素深度信息可以以其他方式来利用，例如仅通过采取 对象或场景的图片。

公开(公告)号：US20150350500A1

公开(公告)日：2015-12-03

申请号：US14692662

申请日：2015-04-21

申请人： MEMS Drive, Inc.

发明人： ROMAN GUTIERREZ ,  GUIQIN WANG ,  XIAOLEI LIU

IPC分类号： H04N5/225 ,  H05K3/28

CPC分类号： H04N5/2253 ,  H05K1/182 ,  H05K2201/10083 ,  H05K2201/10121 ,  Y10T29/4913

摘要： A moving image sensor package is provided that may be used to provide optical image stabilization (OIS) in the same form factor as non-OIS enabled image sensors utilized in portable/mobile devices. The moving image sensor package includes an image sensor attached to a MEMS actuator mounted within a cutout in a circuit board, wherein the MEMS actuator has substantially the same thickness as the circuit board.

摘要翻译： 提供了一种运动图像传感器封装，其可用于以与便携式/移动设备中使用的非OIS启用的图像传感器相同的形状因数提供光学图像稳定（OIS）。 运动图像传感器封装包括附接到安装在电路板中的切口内的MEMS致动器的图像传感器，其中MEMS致动器具有与电路板基本相同的厚度。

公开(公告)号：US20150334277A1

公开(公告)日：2015-11-19

申请号：US14631782

申请日：2015-02-25

申请人： MEMS DRIVE, INC.

发明人： XIAOLEI LIU ,  ROMAN GUTIERREZ

IPC分类号： H04N5/225 ,  G02B27/00

CPC分类号： H04N5/2253 ,  G02B27/0006 ,  H04N5/2171 ,  H04N5/2252 ,  H04N5/2257

摘要： Systems and methods provide dust removal on an image sensor surface of a digital camera. Dust removal can be achieved by either imparting vibrational movement on a stage upon which the image sensor is mounted and/or by moving the stage towards one or more impact stops. The vibrational movement may shake loose any contaminants present on the image sensor. The impact of the stage at the one or more impact stops also may shake loose any contaminants present on the image sensor.

摘要翻译： 系统和方法在数码相机的图像传感器表面上提供除尘。 除尘可以通过在安装图像传感器的台上施加振动运动和/或通过将台子朝向一个或多个冲击挡块移动来实现。 振动可能会抖动图像传感器上存在的任何污染物。 舞台在一个或多个冲击挡块上的冲击也可能会抖动图像传感器上存在的任何污染物。