- 专利标题： MEMS Actuator System
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申请号： US17025147申请日： 2020-09-18
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公开(公告)号： US20210088804A1公开(公告)日： 2021-03-25
- 发明人: MATTHEW NG , Xiaolei Liu , Guiqin Wang
- 申请人： MEMS Drive, Inc.
- 申请人地址： US CA Pasadena
- 专利权人： MEMS Drive, Inc.
- 当前专利权人： MEMS Drive, Inc.
- 当前专利权人地址： US CA Pasadena
- 主分类号： G02B27/64
- IPC分类号： G02B27/64 ; H02N1/00 ; H02K41/035 ; H02N2/02
摘要：
A multi-axis MEMS assembly is configured to provide multi-axis movement and includes: a first in-plane MEMS actuator configured to enable movement along at least an X-axis; and a second in-plane MEMS actuator configured to enable movement along at least a Y-axis; wherein the first in-plane MEMS actuator is coupled to the second in-plane MEMS actuator.
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