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公开(公告)号：US09557555B2
公开(公告)日：2017-01-31
申请号：US14117396
申请日：2012-04-04
CPC分类号： G02B26/001 , G01B9/02051 , G01B9/02056 , G01J3/4535 , G01J3/4537 , G02B5/08 , G02B26/0833
摘要： An optical module includes a first plate-shaped member having a light transmissive optical component which is formed by applying etching to a silicon region, and a second plate-shaped member having light reflective optical components (mirrors) for reflecting light transmitting through the light transmissive optical component. The first and second plate-shaped members are bonded to one another, and an optical path for light transmitting through the light transmissive optical component is along a component forming surface of the first plate-shaped member and a principal surface of the second plate-shaped member. Thereby, realizing an optical module in which it is possible to dispose the light reflective optical component and the light transmissive optical component close to one another, and a manufacturing method for the optical module.
摘要翻译： 光学模块包括具有通过对硅区域进行蚀刻形成的透光光学部件的第一板状部件和具有反射透过透光性的光的反射光学部件（反射镜）的第二板状部件 光学元件。 第一和第二板状构件彼此接合，并且用于透过透光性光学构件的光的光路沿着第一板状构件的构件形成表面，并且第二板状构件的主表面 会员。 由此，实现了可以将光反射型光学部件和透光性光学部件配置成彼此靠近的光学模块，以及光学模块的制造方法。
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公开(公告)号：US20140104687A1
公开(公告)日：2014-04-17
申请号：US14117089
申请日：2012-04-04
IPC分类号： G02B1/11
CPC分类号： G02B1/115 , G01B9/02051 , G01B9/02056 , G01J3/4535 , G02B26/06 , G02B26/0841
摘要： A method for manufacturing a light transmissive optical component, includes a first etching process of forming a depressed portion by applying etching to a silicon region of a plate-shaped member, a thermal oxidation process of forming a silicon oxide film by thermally oxidizing an inner side surface of the depressed portion, and a nitride film formation process of forming a silicon nitride film that covers the silicon oxide film. Accordingly, it is possible to realize a manufacturing method for an optical component which is capable of uniformly forming a silicon oxide film on a semi-transmissive reflecting surface which is largely inclined (or nearly vertical) with respect to a substrate surface, and an optical component produced by this method.
摘要翻译： 一种透光性光学部件的制造方法，包括通过对板状部件的硅区域进行蚀刻来形成凹部的第一蚀刻工序，通过热氧化内侧形成氧化硅膜的热氧化工序 凹部的表面，以及形成覆盖氧化硅膜的氮化硅膜的氮化膜形成工序。 因此，可以实现能够在相对于基板表面大倾斜（或接近垂直）的半透射反射面上均匀地形成氧化硅膜的光学部件的制造方法， 通过该方法生产的成分。
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公开(公告)号：US09372285B2
公开(公告)日：2016-06-21
申请号：US14117089
申请日：2012-04-04
CPC分类号： G02B1/115 , G01B9/02051 , G01B9/02056 , G01J3/4535 , G02B26/06 , G02B26/0841
摘要： A method for manufacturing a light transmissive optical component, includes a first etching process of forming a depressed portion by applying etching to a silicon region of a plate-shaped member, a thermal oxidation process of forming a silicon oxide film by thermally oxidizing an inner side surface of the depressed portion, and a nitride film formation process of forming a silicon nitride film that covers the silicon oxide film. Accordingly, it is possible to realize a manufacturing method for an optical component which is capable of uniformly forming a silicon oxide film on a semi-transmissive reflecting surface which is largely inclined (or nearly vertical) with respect to a substrate surface, and an optical component produced by this method.
摘要翻译： 一种透光性光学部件的制造方法，包括通过对板状部件的硅区域进行蚀刻来形成凹部的第一蚀刻工序，通过热氧化内侧形成氧化硅膜的热氧化工序 凹部的表面，以及形成覆盖氧化硅膜的氮化硅膜的氮化膜形成工序。 因此，可以实现能够在相对于基板表面大倾斜（或接近垂直）的半透射反射面上均匀地形成氧化硅膜的光学部件的制造方法， 通过该方法生产的成分。
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公开(公告)号：US20140139924A1
公开(公告)日：2014-05-22
申请号：US14117396
申请日：2012-04-04
CPC分类号： G02B26/001 , G01B9/02051 , G01B9/02056 , G01J3/4535 , G01J3/4537 , G02B5/08 , G02B26/0833
摘要： An optical module includes a first plate-shaped member having a light transmissive optical component which is formed by applying etching to a silicon region, and a second plate-shaped member having light reflective optical components (mirrors) for reflecting light transmitting through the light transmissive optical component. The first and second plate-shaped members are bonded to one another, and an optical path for light transmitting through the light transmissive optical component is along a component forming surface of the first plate-shaped member and a principal surface of the second plate-shaped member. Thereby, realizing an optical module in which it is possible to dispose the light reflective optical component and the light transmissive optical component close to one another, and a manufacturing method for the optical module.
摘要翻译： 光学模块包括具有通过对硅区域进行蚀刻形成的透光光学部件的第一板状部件和具有反射透过透光性的光的反射光学部件（反射镜）的第二板状部件 光学元件。 第一和第二板状构件彼此接合，并且用于透过透光性光学构件的光的光路沿着第一板状构件的构件形成表面，并且第二板状构件的主表面 会员。 由此，实现了可以将光反射型光学部件和透光性光学部件配置成彼此靠近的光学模块，以及光学模块的制造方法。
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公开(公告)号：US20120187517A1
公开(公告)日：2012-07-26
申请号：US13383282
申请日：2010-07-07
IPC分类号： H01L27/144
CPC分类号： G01J3/36 , G01J1/0204 , G01J5/045 , H01L24/01 , H01L25/043 , H01L2924/0002 , H01L2924/12043 , H01L2924/00
摘要： In a photodetector 1, a low-resistance Si substrate 3, an insulating layer 4, a high-resistance Si substrate 5, and an Si photodiode 20 construct a hermetically sealed package for an InGaAs photodiode 30 placed within a recess 6, while an electric passage part 8 of the low-resistance Si substrate 3 and a wiring film 15 achieve electric wiring for the Si photodiode 20 and InGaAs photodiode 30. While a p-type region 22 of the Si photodiode 20 is disposed in a part on the rear face 21b side of an Si substrate 21, a p-type region 32 of the InGaAs photodiode 30 is disposed in a part on the front face 31a side of an InGaAs substrate 31.
摘要翻译： 在光检测器1中，低电阻Si衬底3，绝缘层4，高电阻Si衬底5和Si光电二极管20构成用于放置在凹槽6内的InGaAs光电二极管30的密封封装，同时电 低电阻Si衬底3的通道部分8和布线膜15实现用于Si光电二极管20和InGaAs光电二极管30的电布线。尽管Si光电二极管20的p型区域22设置在后面的部分 21b侧，在InGaAs基板31的正面31a侧的一部分配置有InGaAs光电二极管30的p型区域32。
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6.发明授权Photodetector for detecting energy line in a first wavelength region and in a second wavelength region 有权光检测器，用于检测第一波长区域和第二波长区域中的能量线公开(公告)号：US08564036B2
公开(公告)日：2013-10-22
申请号：US13383282
申请日：2010-07-07
IPC分类号： H01L31/0232
CPC分类号： G01J3/36 , G01J1/0204 , G01J5/045 , H01L24/01 , H01L25/043 , H01L2924/0002 , H01L2924/12043 , H01L2924/00
摘要： In a photodetector 1, a low-resistance Si substrate 3, an insulating layer 4, a high-resistance Si substrate 5, and an Si photodiode 20 construct a hermetically sealed package for an InGaAs photodiode 30 placed within a recess 6, while an electric passage part 8 of the low-resistance Si substrate 3 and a wiring film 15 achieve electric wiring for the Si photodiode 20 and InGaAs photodiode 30. While a p-type region 22 of the Si photodiode 20 is disposed in a part on the rear face 21b side of an Si substrate 21, a p-type region 32 of the InGaAs photodiode 30 is disposed in a part on the front face 31a side of an InGaAs substrate 31.
摘要翻译： 在光检测器1中，低电阻Si衬底3，绝缘层4，高电阻Si衬底5和Si光电二极管20构成用于放置在凹槽6内的InGaAs光电二极管30的密封封装，同时电 低电阻Si衬底3的通道部分8和布线膜15实现用于Si光电二极管20和InGaAs光电二极管30的电布线。尽管Si光电二极管20的p型区域22设置在后面的部分 21b侧，在InGaAs基板31的正面31a侧的一部分配置有InGaAs光电二极管30的p型区域32。
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公开(公告)号：US08335031B2
公开(公告)日：2012-12-18
申请号：US12689413
申请日：2010-01-19
CPC分类号： B81B7/0067 , B81B2201/042 , B81B2207/096 , G01B9/02051
摘要： An optical module 1A is an optical module, which is manufactured from an SOI substrate having a support substrate 10 and a semiconductor layer 14 disposed on a surface 10a of the support substrate 10 via an insulating layer 12, the optical module including a movable mirror 22 in which a mirror surface 22a is formed on a side face intersecting with a Y-direction, that is movable in the Y-direction, a photodiode 32 which is provided on the surface 10a of the support substrate 10, and is optically coupled to the mirror surface 22a of the movable mirror 22, a cap member 34 which is provided on the surface 10a of the support substrate 10, that airtight-seals the movable mirror 22 and the photodiode 32, and an element electrode part 36 which is provided through the support substrate 10 and the insulating layer 12, and is electrically connected to the photodiode 32. Thereby, it is possible to realize an optical module which is capable of enhancing the airtightness of an optical system including a movable mirror, and which also can be downsized.
摘要翻译： 光学模块1A是通过绝缘层12由具有支撑基板10和配置在支撑基板10的表面10a上的半导体层14的SOI基板制造的光学模块，该光学模块包括可移动反射镜22 其中镜面22a形成在与Y方向上可移动的Y方向的侧面上，设置在支撑基板10的表面10a上的光电二极管32，并且光学耦合到 可动镜22的镜面22a，设置在支撑基板10的表面10a上的盖构件34，气密密封可动镜22和光电二极管32，元件电极部36通过 支撑基板10和绝缘层12，并且电连接到光电二极管32.因此，可以实现能够增强光学系统的气密性的光学模块，包括 并且还可以减小尺寸。
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公开(公告)号：US07254301B2
公开(公告)日：2007-08-07
申请号：US10546187
申请日：2004-02-19
申请人： Yasuji Hoshino , Takashi Iida , Yoshihisa Warashina , Kei Tabata
发明人： Yasuji Hoshino , Takashi Iida , Yoshihisa Warashina , Kei Tabata
IPC分类号： G02B6/26
CPC分类号： G02B6/423 , G02B6/4201 , G02B6/4214 , G02B6/4243 , G02B6/4249 , H01L2224/45144 , H01L2224/48091 , H01L2924/00014 , H01L2924/00
摘要： An optical module comprises: a sub-mount 1, having four photodiodes 12 and two guide grooves 10 disposed on an optical element mounting surface 16; a fiber fixing member 2, having four V-grooves 21, four concave mirrors 22, and two guide rails 20 disposed on an optical fiber fixing surface 26; and four optical fibers 3, fixed to the fiber fixing member 2. With this optical module, the sub-mount 1 and fiber fixing member 2 are aligned and fixed by the fitting together of the guide grooves 10 and guide rails 20. A passive alignment type optical module that enables mass production and cost reduction is thus realized.
摘要翻译： 光学模块包括：具有设置在光学元件安装表面16上的四个光电二极管12和两个引导槽10的子安装件1; 具有设置在光纤固定面26上的四个V形槽21，四个凹面镜22和两个导轨20的光纤固定部件2， 和固定在光纤固定部件2上的四根光纤3。 通过该光学模块，副安装座1和光纤固定部件2通过引导槽10和导轨20的嵌合而对准和固定。 从而实现了能够进行批量生产和降低成本的无源对准型光学模块。
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公开(公告)号：US5034921A
公开(公告)日：1991-07-23
申请号：US375983
申请日：1989-07-06
申请人： Kazutoshi Nakajima , Hirofumi Kan , Kenichi Sugimoto , Yoshihiko Mizushima , Toru Hirohata , Takashi Iida , Yoshihisa Warashina , Toru Hirohata , Takashi Iida
发明人： Kazutoshi Nakajima , Hirofumi Kan , Kenichi Sugimoto , Yoshihiko Mizushima , Toru Hirohata , Takashi Iida , Yoshihisa Warashina , Toru Hirohata , Takashi Iida
摘要： An optical memory circuit comprises two photodetectors, and an intermediate signal conductor for connecting the two photodetectors, wherein the two photodetectors and the signal conductor are connected in series in a closed circuit, wherein each of the photodetectors comprises two spaced Schottky electrodes symmetrically disposed on a semiconductor substrate and the signal conductor has a capacitance with a time constant of a potential of the signal conductor such that charges are stored in the signal conductor when an optical write signal is incident on one photodetector and stored charges are released from the signal conductor when an optical read signal is incident on the other photodetector.
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公开(公告)号：US5020064A
公开(公告)日：1991-05-28
申请号：US393275
申请日：1989-08-14
申请人： Yoshihiko Mizushima , Takashi Iida , Toru Hirohata , Kenichi Sugimoto , Yoshihisa Warashina , Kazutoshi Nakajima
发明人： Yoshihiko Mizushima , Takashi Iida , Toru Hirohata , Kenichi Sugimoto , Yoshihisa Warashina , Kazutoshi Nakajima
CPC分类号： H01S3/0903
摘要： An electromagnetic wave device having an amplification function comprises a medium containing free carriers, means for applying a magnetic field to the medium, means for applying an input electromagnetic wave to the medium in a direction perpendicular to the magnetic field, and means for generating an electric field to accelerating the carriers in the direction of the input electromagnetic wave. A frequency of the input electromagnetic wave is within the range of the plasma frequency plus or minus the cyclotron frequency, and a polarization direction of the input electromagnetic wave is perpendicular both to the magnetic field and its own traveling direction. Furthermore, the device has such functions as oscillation, modulation, frequency conversion, etc. depending on the type of added units.
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