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公开(公告)号：US11495450B2
公开(公告)日：2022-11-08
申请号：US15955693
申请日：2018-04-18
发明人： Alfred Grant Elliot , Brent Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： H01L21/02 , H01L21/67 , H01L21/687 , H05B3/28
摘要： A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.
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公开(公告)号：US11712745B2
公开(公告)日：2023-08-01
申请号：US17583483
申请日：2022-01-25
发明人： Michael Parker , Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： B23K1/00 , B32B18/00 , B32B9/00 , B32B15/20 , C04B37/00 , B23K1/19 , B23K1/20 , B23K35/28 , B23K35/00 , C04B35/645 , B32B9/04 , F16B9/00 , B32B3/30 , B32B7/14 , H01L21/67 , H01L21/683 , H05B1/00 , H01L21/687 , B23K103/10
CPC分类号： B23K1/0008 , B23K1/0016 , B23K1/19 , B23K1/20 , B23K35/005 , B23K35/286 , B32B3/30 , B32B7/14 , B32B9/005 , B32B9/04 , B32B9/041 , B32B15/20 , B32B18/00 , C04B35/645 , C04B37/001 , C04B37/006 , F16B9/00 , H01L21/67103 , H01L21/6831 , H01L21/6833 , H01L21/68757 , H01L21/68785 , H05B1/00 , B23K2103/10 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/6581 , C04B2235/6582 , C04B2235/945 , C04B2237/121 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/36 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/592 , C04B2237/61 , C04B2237/64 , C04B2237/66 , C04B2237/68 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C04B2237/76 , C04B2237/765 , C04B2237/80 , C04B2237/84 , Y10T403/46 , Y10T428/31504 , Y10T428/31678
摘要： A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.
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公开(公告)号：US11222804B2
公开(公告)日：2022-01-11
申请号：US16817627
申请日：2020-03-13
IPC分类号： H01T23/00 , H01L21/683 , B23Q3/15 , B23K1/00 , C04B37/00 , H01L21/687 , B23K1/19 , B23K1/20 , B23K1/008 , B23K103/18 , B23K103/00 , B23K101/42
摘要： An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C. The top surface may be sapphire. The top surface is attached to the lower portion of the electrostatic chuck using a braze layer able to withstand corrosive processing chemistries. A method of manufacturing an electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C.
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公开(公告)号：US11823890B2
公开(公告)日：2023-11-21
申请号：US17981962
申请日：2022-11-07
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： H01L21/02 , H01L21/67 , H01L21/687 , H05B3/28
CPC分类号： H01L21/02002 , H01L21/67103 , H01L21/67248 , H01L21/68792 , H05B3/283 , H05B2203/002 , H05B2203/037
摘要： A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.
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公开(公告)号：US11091397B2
公开(公告)日：2021-08-17
申请号：US16406543
申请日：2019-05-08
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： B23K1/00 , C04B37/00 , B23K35/28 , B23K1/19 , B23K1/20 , B23K35/00 , B32B9/00 , B32B9/04 , B32B15/20 , C04B35/645 , H01L21/687 , B23K35/38 , B23K1/008 , B23K3/08 , F16B9/00 , B32B37/06 , B32B37/10 , H01L21/67 , H01L21/683 , F16B11/00
摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
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