公开(公告)号：US10249729B1

公开(公告)日：2019-04-02

申请号：US15832696

申请日：2017-12-05

申请人： UNITED MICROELECTRONICS CORP.

发明人： Ying-Hsien Chen ,  Chun-Chia Chen ,  Yao-Jhan Wang ,  Chih-wei Yang ,  Te-Chang Hsu

IPC分类号： H01L29/66 ,  H01L21/8238 ,  H01L21/308 ,  H01L21/02 ,  H01L21/3105 ,  H01L29/165 ,  H01L29/78 ,  H01L29/08

摘要： A method for fabricating a semiconductor device. After forming SiGe epitaxial layer within the Core_p region, the hard mask is removed. A contact etch stop layer (CESL) is deposited on the composite spacer structure and the epitaxial layer. An ILD layer is deposited on the CESL. The ILD layer is polished to expose a top surface of the dummy gate. The dummy gate and a first portion of the first nitride-containing layer of the composite spacer structure are removed, thereby forming a gate trench and exposing the first gate dielectric layer. The first gate dielectric layer is removed from the gate trench, and a second portion of the first nitride-containing layer and the oxide layer are removed from the composite spacer structure, while leaving the second nitride-containing layer intact.

公开(公告)号：US20240363430A1

公开(公告)日：2024-10-31

申请号：US18203654

申请日：2023-05-31

申请人： UNITED MICROELECTRONICS CORP.

发明人： Chih-Yi Wang ,  Wei-Che Chen ,  Hung-Chun Lee ,  Yun-Yang He ,  Wei-Hao Chang ,  Chang-Yih Chen ,  Kun-Szu Tseng ,  Yao-Jhan Wang ,  Ying-Hsien Chen

IPC分类号： H01L21/8234 ,  H01L27/088 ,  H01L29/06 ,  H01L29/66 ,  H01L29/78

CPC分类号： H01L21/823481 ,  H01L21/823431 ,  H01L27/0886 ,  H01L29/0607 ,  H01L29/66795 ,  H01L29/7851 ,  H01L29/66545

摘要： A method for fabricating a semiconductor device includes the steps of first providing a substrate having an active region as the substrate includes a medium-voltage (MV) region and a low-voltage (LV) region, forming a first divot adjacent to one side of the active region, forming a second divot adjacent to another side of the active region, forming a first liner in the first divot and the second divot and on the substrate of the MV region and LV region, forming a second liner on the first liner, and then removing the second liner, the first liner, and the substrate on the LV region for forming a fin-shaped structure.