公开(公告)号：US08277669B1

公开(公告)日：2012-10-02

申请号：US12643954

申请日：2009-12-21

申请人： Tsung Yuan Chen ,  Yimin Guo ,  Jinqiu Zhang ,  Ut Tran

发明人： Tsung Yuan Chen ,  Yimin Guo ,  Jinqiu Zhang ,  Ut Tran

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49046

摘要： A method and system for providing a pole of magnetic transducer having an air-bearing surface (ABS) are described. Leading shield and planarization stop layers are provided. Portions of the planarization stop and shield layers distal from the ABS location are removed, providing a depression forming a bevel. The bevel has an angle greater than zero and less than ninety degrees. An intermediate layer having a top surface substantially perpendicular to the ABS location is provided. Part of the intermediate layer is removed, forming a trench having a bottom corresponding to the leading shield and a location and profile corresponding to the pole. A nonmagnetic layer is provided at least partially in the trench. The pole with a leading edge bevel corresponding to the bevel is provided in the trench. A capping layer covering the pole is provided, at least part of the intermediate layer removed, and a wrap-around shield provided.

摘要翻译： 描述了一种用于提供具有空气轴承表面（ABS）的磁换能器极的方法和系统。 提供了领先的屏蔽和平坦化停止层。 除去远离ABS位置的平坦化停止和屏蔽层的部分，提供形成斜面的凹陷。 斜面角度大于零，小于九十度。 提供具有基本上垂直于ABS位置的顶表面的中间层。 中间层的一部分被去除，形成具有对应于前屏蔽的底部的沟槽和对应于极的位置和轮廓。 至少部分地在沟槽中提供非磁性层。 在沟槽中设置有与斜面相对应的前缘斜面的极。 提供覆盖极的覆盖层，去除中间层的至少一部分和设置的环绕护罩。

公开(公告)号：US08018678B1

公开(公告)日：2011-09-13

申请号：US12324442

申请日：2008-11-26

申请人： Jinqiu Zhang ,  Tsung Yuan Chen ,  Steven C. Rudy

发明人： Jinqiu Zhang ,  Tsung Yuan Chen ,  Steven C. Rudy

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3169

摘要： A method for providing a perpendicular magnetic recording (PMR) head is disclosed. The method comprises: providing a stop layer; providing an insulating layer over the stop layer; forming a pole trench in the insulating layer by performing a reactive ion etching (RIE) process in the insulating layer over the stop layer; forming an electronic lapping guide (ELG) in the insulating layer by performing the RIE process in the insulating layer over the stop layer; and providing a PMR pole in which at least a portion of the PMR pole resides in the pole trench.

摘要翻译： 公开了一种用于提供垂直磁记录（PMR）头的方法。 该方法包括：提供停止层; 在停止层上提供绝缘层; 通过在所述绝缘层上在停止层上进行反应离子蚀刻（RIE）工艺，在所述绝缘层中形成极沟槽; 通过在所述阻挡层上的所述绝缘层中进行RIE处理，在所述绝缘层中形成电子研磨导向器（ELG）; 以及提供PMR极，其中PMR极的至少一部分位于极沟中。

公开(公告)号：US08649123B1

公开(公告)日：2014-02-11

申请号：US12324519

申请日：2008-11-26

申请人： Jinqiu Zhang ,  Hai Sun ,  Hongping Yuan ,  Tsung Yuan Chen

发明人： Jinqiu Zhang ,  Hai Sun ,  Hongping Yuan ,  Tsung Yuan Chen

IPC分类号： G11B5/31

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A method for providing a perpendicular magnetic recording (PMR) head is disclosed. The method comprises: providing an insulating layer; covering the insulating layer with a hard mask material; forming a pre-defined shape in the hard mask material; forming a pole trench and a yoke area in the insulating layer by a first reactive ion etching (RIE) process in which the yoke area includes a loading prevention pattern; performing a wet etching process to remove the hard mask material from the pole trench and the yoke area; performing a second RIE process to remove the loading prevention pattern of the yoke area, wherein the pole trench and the remainder of the yoke area are not removed and remain having similar side wall angles; and providing a PMR pole in which at least a portion of the PMR pole resides in the pole trench.

摘要翻译： 公开了一种用于提供垂直磁记录（PMR）头的方法。 该方法包括：提供绝缘层; 用硬掩模材料覆盖绝缘层; 在硬掩模材料中形成预定形状; 通过第一反应离子蚀刻（RIE）工艺在绝缘层中形成极沟和轭区，其中轭区包括负载防止图案; 执行湿蚀刻工艺以从磁极沟槽和磁轭区域去除硬掩模材料; 执行第二RIE处理以去除轭区域的负载防止图案，其中极沟槽和轭区域的其余部分不被去除并保持具有相似的侧壁角度; 以及提供PMR极，其中PMR极的至少一部分位于极沟中。

公开(公告)号：US08334093B2

公开(公告)日：2012-12-18

申请号：US12262572

申请日：2008-10-31

申请人： Jinqiu Zhang ,  Hai Sun ,  Hongping Yuan ,  Tsung Yuan Chen ,  Guanxiong Li

发明人： Jinqiu Zhang ,  Hai Sun ,  Hongping Yuan ,  Tsung Yuan Chen ,  Guanxiong Li

IPC分类号： H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49041

摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask on the intermediate layer. The mask includes a line having at least one side. A hard mask layer is provided on the mask. At least a portion of the hard mask layer resides on the side(s) of the line. At least part of the hard mask layer on the side(s) of the line is removed. Thus, at least a portion of the line is exposed. The line is then removed, providing an aperture in the hard mask corresponding to the line. The method also includes forming a trench in the intermediate layer under the aperture. The trench top is wider than its bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

摘要翻译： 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供掩模。 掩模包括具有至少一个侧面的线。 在掩模上设置硬掩模层。 硬掩模层的至少一部分位于线的一侧。 除去线的侧面上的硬掩模层的至少一部分。 因此，线的至少一部分被暴露。 然后去除线，在对应于线的硬掩模中提供孔。 该方法还包括在孔下方的中间层中形成沟槽。 沟槽顶部比底部宽。 该方法还包括提供PMR极，其至少一部分位于沟槽中。

公开(公告)号：US08310785B1

公开(公告)日：2012-11-13

申请号：US13372316

申请日：2012-02-13

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49041

摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PRM head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a hard mask layer adjacent to the first portion of the at least one side of the PMR pole.

摘要翻译： 垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分 侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PRM头还包括围绕PMR极的底部和至少一个侧面的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层以及邻近PMR极的硬掩模层 PMR极点的至少一侧的第一部分。

公开(公告)号：US08136225B1

公开(公告)日：2012-03-20

申请号：US12121624

申请日：2008-05-15

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49041

摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The method further include providing a hard mask layer on the mask and removing the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

摘要翻译： 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供包括线的掩模。 该方法还包括在掩模上提供硬掩模层并去除线。 因此，提供了对应于该线的硬掩模中的孔。 该方法和系统还包括在孔下方的中间层中形成沟槽。 沟槽的底部和顶部宽于底部。 该方法还包括提供PMR极，其至少一部分位于沟槽中。

公开(公告)号：US09202480B2

公开(公告)日：2015-12-01

申请号：US12579316

申请日：2009-10-14

申请人： Xiaohai Xiang ,  Yun-Fei Li ,  Jinqiu Zhang ,  Hongping Yuan ,  Xianzhong Zeng ,  Hai Sun

发明人： Xiaohai Xiang ,  Yun-Fei Li ,  Jinqiu Zhang ,  Hongping Yuan ,  Xianzhong Zeng ,  Hai Sun

IPC分类号： B44C1/22 ,  C03C15/00 ,  H01L21/4763 ,  G11B5/31 ,  G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T428/11

摘要： Various embodiments of the subject disclosure provide a double patterning process that uses two patterning steps to produce a write structure having a nose shape with sharp corners. In one embodiment, a method for forming a write structure on a multi-layer structure comprising a substrate and an insulator layer on the substrate is provided. The method comprises forming a hard mask layer over the insulator layer, performing a first patterning process to form a pole and yoke opening in the hard mask layer, performing a second patterning process to remove rounded corners of the pole and yoke opening in the hard mask layer, removing a portion of the insulator layer corresponding to the pole and yoke opening in the hard mask layer to form a trench in the insulator layer, and filling the trench with a magnetic material.

摘要翻译： 本发明公开的各种实施例提供一种双重图案化工艺，其使用两个图案化步骤来产生具有尖角的鼻子形状的写入结构。 在一个实施例中，提供了一种用于在包括衬底和衬底上的绝缘体层的多层结构上形成写结构的方法。 该方法包括在绝缘体层上形成硬掩模层，执行第一图案化工艺以在硬掩模层中形成极和轭开口，执行第二图案化处理以去除硬掩模中的极和轭开口的圆角 去除与硬掩模层中的极和轭开口相对应的绝缘体层的一部分，以在绝缘体层中形成沟槽，并用磁性材料填充沟槽。

公开(公告)号：US08451563B1

公开(公告)日：2013-05-28

申请号：US13331208

申请日：2011-12-20

申请人： Jinqiu Zhang ,  Feng Liu ,  Shaoping Li ,  Ming Sun

发明人： Jinqiu Zhang ,  Feng Liu ,  Shaoping Li ,  Ming Sun

IPC分类号： G11B5/17 ,  G11B5/127

CPC分类号： G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49044

摘要： A method fabricates a side shield for a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. The nonmagnetic layer has a pole trench therein. The pole trench has a shape and location corresponding to the pole. A wet etchable layer is deposited. Part of the wet etchable layer resides in the pole trench. A pole is formed. The pole has a bottom and a top wider than the bottom in the pole tip region. Part of the pole in the pole tip region is in the pole trench on at least part of the wet etchable layer. At least parts of the wet etchable layer and the nonmagnetic layer are removed, forming an air bridge. The air bridge is between part of the pole at the ABS location and an underlying layer. Side shield layer(s) that substantially fill the air bridge are deposited.

摘要翻译： 一种制造用于具有对应于ABS的非磁性层和ABS位置的磁换能器的侧屏蔽的方法。 非磁性层在其中具有极沟槽。 极沟具有对应于极的形状和位置。 沉积湿蚀刻层。 湿蚀刻层的一部分位于极沟槽中。 一个极点形成。 电极具有底部和顶部宽于电极尖端区域中的底部。 极尖区域中的极的一部分在至少部分湿蚀刻层的极沟中。 去除湿蚀刻层和非磁性层的至少一部分，形成空气桥。 空气桥在ABS位置的极点的一部分和下层之间。 基本上填充空气桥的侧面屏蔽层被沉积。

公开(公告)号：US07286329B1

公开(公告)日：2007-10-23

申请号：US10788656

申请日：2004-02-27

申请人： Yingjian Chen ,  Wei Zhang ,  Mohamad T. Krounbi ,  Satoru Araki ,  Jinqiu Zhang

发明人： Yingjian Chen ,  Wei Zhang ,  Mohamad T. Krounbi ,  Satoru Araki ,  Jinqiu Zhang

IPC分类号： G11B5/39

CPC分类号： G01R31/318357 ,  G11B5/3932

摘要： A magnetic sensor is disclosed having a shallow contiguous junction. Such a sensor is can greatly increase yield for mass-produced heads, especially for large wafers. The magnetic bias layers can be aligned with a free layer of the sensor, improving performance. Milling may be terminated prior to penetration of an antiferromagnetic layer, so that for example the antiferromagnetic layer may extend significantly beyond the free and pinned layers of the sensor.

摘要翻译： 公开了一种具有浅连续结的磁传感器。 这种传感器可以大大提高批量生产头部的产量，特别是对于大型晶片。 磁偏置层可以与传感器的自由层对准，从而提高性能。 铣削可以在穿透反铁磁层之前终止，使得例如反铁磁层可以显着地延伸超过传感器的自由和固定层。

公开(公告)号：US08663915B2

公开(公告)日：2014-03-04

申请号：US12595824

申请日：2008-04-11

申请人： Lance D. Miller ,  Bing Lim ,  Jinqiu Zhang

发明人： Lance D. Miller ,  Bing Lim ,  Jinqiu Zhang

IPC分类号： C12Q1/68

CPC分类号： G01N33/57423 ,  A61K31/7088 ,  A61K38/1709 ,  G01N33/57407 ,  G01N33/57415 ,  G01N33/57419 ,  G01N33/57492 ,  G01N2500/04 ,  G01N2800/50

摘要： The present invention relates to methods of controlling tumorigenesis, including preventing, inhibiting, arresting or reversing tumorigenesis. The present invention also provides methods of treatment, prevention and diagnosis of neoblastoma, including cancer, such as metastatic cancer. In one method one or more cells having a predisposition to turn tumorigenic are identifyied. In the one or more cells an altered amount, an altered subcellular localisation or an altered activity of a Rab binding protein is detected. In a method of diagnosing the risk of developing a neoplasmt at least one of the expression level, the activity level and the subcellular localisation of a Rab binding protein is determined. In an in-vitro method of identifying a compound capable of forming a complex with a Rab binding protein the components that form the respective complex are contacted with each other. In a method of determining whether a neoplasm is sensitive to an alteration of intracellular calcium levels, at least one of the expression and the activity of a Rab binding protein is determined. An altered expression or an altered activity of the Rab binding protein is an indication that the neoplasm is sensitive to an alteration of intracellular calcium levels.

摘要翻译： 本发明涉及控制肿瘤发生的方法，包括预防，抑制，阻止或逆转肿瘤发生。 本发明还提供了治疗，预防和诊断包括癌症在内的新生血管瘤如转移性癌症的方法。 在一种方法中，鉴定出具有转变成致瘤性倾向的一种或多种细胞。 在一个或多个细胞中，检测到改变的量，改变的亚细胞定位或改变的Rab结合蛋白的活性。 在诊断发展赘生物的风险的方法中，确定Rab结合蛋白的表达水平，活性水平和亚细胞定位中的至少一个。 在鉴定能够与Rab结合蛋白形成复合物的化合物的体外方法中，形成相应复合物的组分彼此接触。 在确定肿瘤是否对细胞内钙水平的改变敏感的方法中，确定Rab结合蛋白的表达和活性中的至少一种。 Rab结合蛋白的改变的表达或改变的活性表明肿瘤对细胞内钙水平的改变敏感。