Invention Grant
- Patent Title: Method and system for providing a perpendicular magnetic recording head
- Patent Title (中): 用于提供垂直磁记录头的方法和系统
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Application No.: US12262572Application Date: 2008-10-31
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Publication No.: US08334093B2Publication Date: 2012-12-18
- Inventor: Jinqiu Zhang , Hai Sun , Hongping Yuan , Tsung Yuan Chen , Guanxiong Li
- Applicant: Jinqiu Zhang , Hai Sun , Hongping Yuan , Tsung Yuan Chen , Guanxiong Li
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: H04R31/00
- IPC: H04R31/00

Abstract:
A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask on the intermediate layer. The mask includes a line having at least one side. A hard mask layer is provided on the mask. At least a portion of the hard mask layer resides on the side(s) of the line. At least part of the hard mask layer on the side(s) of the line is removed. Thus, at least a portion of the line is exposed. The line is then removed, providing an aperture in the hard mask corresponding to the line. The method also includes forming a trench in the intermediate layer under the aperture. The trench top is wider than its bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.
Public/Granted literature
- US20100112486A1 METHOD AND SYSTEM FOR PROVIDING A PERPENDICULAR MAGNETIC RECORDING HEAD Public/Granted day:2010-05-06
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