公开(公告)号：US12077392B2

公开(公告)日：2024-09-03

申请号：US17315423

申请日：2021-05-10

Applicant: Tokyo Electron Limited

Inventor： Hitoshi Hashima ,  Tohru Tochihara ,  Michiaki Matsushita ,  Hidekazu Kiyama

IPC: B65G47/90 ,  G03F7/16 ,  H01L21/677 ,  H01L21/683 ,  H01L21/687 ,  H05K9/00

CPC classification number: B65G47/90 ,  G03F7/162 ,  H01L21/67766 ,  H01L21/6838 ,  H01L21/68707 ,  H01L21/6875 ,  H05K9/0067

Abstract: A substrate transfer apparatus includes: a non-conductive support with an upper surface that faces a substrate and supports the substrate; a mover that moves the support to transfer the substrate; a connector that connects the support and the mover while being grounded; a conductive contact that is provided on the upper surface of the support, and supports the substrate in contact with a lower surface of the substrate such that the substrate is not brought into contact with the support; a strip-shaped conductive path that is provided to connect the contact and the connector. The strip-shaped conductive path is provided with a bent portion such that an interval of the strip-shaped conductive path formed by the bent portion is at least twice a width of the strip-shaped conductive path.

公开(公告)号：US10424499B2

公开(公告)日：2019-09-24

申请号：US15450431

申请日：2017-03-06

Applicant: TOKYO ELECTRON LIMITED

Inventor： Akihiro Matsumoto ,  Michiaki Matsushita ,  Satoru Shinto ,  Kazunori Kuratomi

IPC: H01L21/677 ,  H01L21/67

Abstract: A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part.

公开(公告)号：US11699608B2

公开(公告)日：2023-07-11

申请号：US16487533

申请日：2018-02-15

Applicant: Tokyo Electron Limited

Inventor： Akihiro Matsumoto ,  Michiaki Matsushita ,  Akira Murata ,  Minoru Tashiro

IPC: H01L21/673 ,  B65G49/05 ,  H01L21/677

CPC classification number: H01L21/67386 ,  B65G49/05 ,  H01L21/67373 ,  H01L21/67393 ,  H01L21/67772

Abstract: A substrate storage apparatus includes a stage on which a cassette that has a lid detachably mounted to an opening is disposed, a lid attaching/detaching plate that performs attaching/detaching of the lid to/from the opening of the cassette disposed on the stage, and is provided to be movable between a mounting position in contact with the lid disposed at a position of the opening and a retracted position not in contact with the lid disposed at the position of the opening, a lid holding sensor that detects whether the lid is being held by the lid attaching/detaching plate, and a controller that determines presence/absence of abnormality related to attachment/detachment of the lid based on a detection result of the lid holding sensor.

公开(公告)号：US09627237B2

公开(公告)日：2017-04-18

申请号：US14149395

申请日：2014-01-07

Applicant: TOKYO ELECTRON LIMITED

Inventor： Akihiro Matsumoto ,  Michiaki Matsushita ,  Satoru Shinto ,  Kazunori Kuratomi

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/67775 ,  B65G2201/0297 ,  H01L21/67259 ,  H01L21/67265 ,  H01L21/67772 ,  H01L21/67778

Abstract: A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part.