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公开(公告)号：US20180085769A1
公开(公告)日：2018-03-29
申请号：US15710017
申请日：2017-09-20
发明人： Go Ayabe , Minoru Tashiro , Kunihiko Fujimoto
CPC分类号： B05B13/0405 , B05B13/0228 , B05B14/00 , B05D1/02 , H01L21/06 , H01L21/67051 , H01L21/6708 , H01L21/67253 , H01L21/67259
摘要： A substrate processing apparatus according to the present disclosure includes a holding unit, a nozzle, a driving unit, and a controller. The holding unit holds a substrate. The nozzle supplies a processing liquid to the substrate held on the holding unit. The driving unit moves the nozzle. The controller controls the driving unit, so as to move the nozzle while supplying the processing liquid to the substrate from the nozzle. Further, the controller controls the driving unit based on recipe information including step information including positions of first and second points above the substrate, total time for moving the nozzle between the first and second points, and a moving speed of the nozzle, so as to cause reciprocation of the nozzle.
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公开(公告)号：US10668494B2
公开(公告)日：2020-06-02
申请号：US15710017
申请日：2017-09-20
发明人： Go Ayabe , Minoru Tashiro , Kunihiko Fujimoto
摘要： A substrate processing apparatus according to the present disclosure includes a holding unit, a nozzle, a driving unit, and a controller. The holding unit holds a substrate. The nozzle supplies a processing liquid to the substrate held on the holding unit. The driving unit moves the nozzle. The controller controls the driving unit, so as to move the nozzle while supplying the processing liquid to the substrate from the nozzle. Further, the controller controls the driving unit based on recipe information including step information including positions of first and second points above the substrate, total time for moving the nozzle between the first and second points, and a moving speed of the nozzle, so as to cause reciprocation of the nozzle.
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公开(公告)号：US11699608B2
公开(公告)日：2023-07-11
申请号：US16487533
申请日：2018-02-15
IPC分类号： H01L21/673 , B65G49/05 , H01L21/677
CPC分类号： H01L21/67386 , B65G49/05 , H01L21/67373 , H01L21/67393 , H01L21/67772
摘要： A substrate storage apparatus includes a stage on which a cassette that has a lid detachably mounted to an opening is disposed, a lid attaching/detaching plate that performs attaching/detaching of the lid to/from the opening of the cassette disposed on the stage, and is provided to be movable between a mounting position in contact with the lid disposed at a position of the opening and a retracted position not in contact with the lid disposed at the position of the opening, a lid holding sensor that detects whether the lid is being held by the lid attaching/detaching plate, and a controller that determines presence/absence of abnormality related to attachment/detachment of the lid based on a detection result of the lid holding sensor.
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公开(公告)号：US20210260612A1
公开(公告)日：2021-08-26
申请号：US17179551
申请日：2021-02-19
发明人： Terufumi Wakiyama , Yuichi Douki , Akinori Tanaka , Minoru Tashiro , Reo Kitayama , Shu Yamamoto
摘要： A controller is configured to control a liquid supply to change a landing position of a liquid on a surface of a substrate continuously by discharging the liquid toward the surface of the substrate from a first liquid discharge nozzle while moving the first liquid discharge nozzle. The controller is also configured to derive discharge position deviation information of the liquid supply by comparing first temperature information based on a spot temperature measured by a temperature measurement device when the first liquid discharge nozzle is moved along a first nozzle path and second temperature information based on the spot temperature measured by the temperature measurement device when the first liquid discharge nozzle is moved along a second nozzle path which is different from the first nozzle path.
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