公开(公告)号：US06757051B2

公开(公告)日：2004-06-29

申请号：US09883253

申请日：2001-06-19

申请人： Tetsuo Takahashi ,  Jin Nishikawa ,  Yasuhiro Omura

发明人： Tetsuo Takahashi ,  Jin Nishikawa ,  Yasuhiro Omura

IPC分类号： G03B2754

CPC分类号： G02B17/0892 ,  G02B13/143 ,  G02B17/0808 ,  G02B17/0856 ,  G02B27/18 ,  G03F7/70225

摘要： A projection optical system forms an image of an object in a first plane onto a second plane. The projection optical system has an optical element group including at least one refractive member and plural reflective members, and a plurality of lens-barrel units holding the optical element group divided into a plurality of respective groupings. The reflective members are all held by a single lens-barrel unit of the plurality of lens-barrels units.

摘要翻译： 投影光学系统将第一平面中的物体的图像形成到第二平面上。 投影光学系统具有包括至少一个折射构件和多个反射构件的光学元件组，以及保持被分成多个分组的光学元件组的多个透镜筒单元。 反射构件都由多个透镜筒单元中的单个镜筒单元保持。

公开(公告)号：US07583361B2

公开(公告)日：2009-09-01

申请号：US11369493

申请日：2006-03-07

申请人： Yi-Ping Hsin ,  Hideyuki Hashimoto ,  Jin Nishikawa ,  Bausan Yuan ,  Douglas C. Watson

发明人： Yi-Ping Hsin ,  Hideyuki Hashimoto ,  Jin Nishikawa ,  Bausan Yuan ,  Douglas C. Watson

IPC分类号： G03B27/58

CPC分类号： G03F7/70725

摘要： A precision assembly (210) for positioning a device (226) includes a stage (260) that retains the device (226), a dual mover assembly (228) that moves the stage (260), and the device (226) along a movement axis (266), a measurement system (222) and a control system (224). The dual mover assembly (228) includes a first mover (262) that moves the stage (260) along the movement axis (266) and a second mover (264) that moves the device (226) along the movement axis (266). The second mover (264) is rigidly coupled to the first mover (262) so that movement of the first mover (262) results in movement of the second mover (264). Further, the total output of the dual mover assembly (228) along the movement axis (266) is equal to the sum of the movement of the first mover (262) and the movement of the second mover (264). The measurement system (222) measures a movement position along the movement axis (266). The control system (224) controls the dual mover assembly (228) utilizing the movement position. The control system (224) is designed to effectively decouple the control of the first mover (262) from the control of the second mover (264). Further, the control system (224) includes a quantization feedforward loop.

摘要翻译： 用于定位设备（226）的精密组件（210）包括保持所述设备（226）的平台（260），使所述平台（260）移动的所述双推进器组件（228），以及沿着 运动轴（266），测量系统（222）和控制系统（224）。 双推动器组件（228）包括沿着移动轴线（266）移动平台（260）的第一移动器（262）和沿着移动轴线（266）移动设备（226）的第二移动器（264）。 第二移动器（264）刚性地联接到第一移动器（262），使得第一移动器（262）的运动导致第二移动器（264）的运动。 此外，沿着移动轴线（266）的双推动器组件（228）的总输出等于第一移动器（262）与第二移动器（264）的运动的总和。 测量系统（222）测量沿着移动轴线（266）的移动位置。 控制系统（224）利用移动位置控制双推动器组件（228）。 控制系统（224）被设计成有效地将第一移动器（262）的控制与第二移动器（264）的控制分离。 此外，控制系统（224）包括量化前馈回路。

公开(公告)号：US20090141257A1

公开(公告)日：2009-06-04

申请号：US12292384

申请日：2008-11-18

申请人： Jin Nishikawa

发明人： Jin Nishikawa

IPC分类号： G03B27/54 ,  F21S8/00 ,  G03B27/32

CPC分类号： G03F7/70916 ,  G03F7/702 ,  G03F7/70841 ,  G03F7/70883

摘要： A reflection type illumination optical apparatus, which guides an exposure light to a reticle surface via a curved mirror, a concave mirror, etc. includes a vacuum chamber which accommodates the curved mirror, the concave mirror, etc; and a subchamber which is arranged in the vacuum chamber and which accommodates the curved mirror. The subchamber has openings through which the exposure light coming into the curved mirror and the exposure light exiting from the curved mirror pass, respectively. Each of the openings is arranged in the vicinity of a position at which the cross-sectional area of the light flux is smallest. It is possible to decrease the amount of adhesion of minute particles such as debris to the reflecting optical element, without unnecessarily enhancing the ability of the vacuum gas discharge mechanism.

摘要翻译： 通过曲面镜，凹面镜等将曝光光引导到掩模版面的反射型照明光学装置包括：容纳曲面镜，凹面镜等的真空室; 以及设置在真空室中并容纳曲面镜的子室。 子室具有开口，通过该开口分别进入曲面镜的曝光光和从曲面镜出射的曝光光通过。 每个开口布置在光通量的横截面积最小的位置附近。 可以在不必要地增强真空气体排出机构的能力的情况下，将诸如碎屑的微小颗粒附着到反射光学元件上。

公开(公告)号：US06791766B2

公开(公告)日：2004-09-14

申请号：US10259385

申请日：2002-09-30

申请人： Jin Nishikawa

发明人： Jin Nishikawa

IPC分类号： G02B702

CPC分类号： G03F7/70933 ,  G02B7/022 ,  G03F7/70833 ,  G03F7/70866 ,  G03F7/70883

摘要： A flange portion is provided to at least a part of the periphery at the center position in the direction of the optical axis of a lens. The lens is held with clamping members and a lens holding metallic part, with the flange portion pressed by the clamping members. The portion where the flange portion is provided, suffers no compressive strain and tensile strain due to the bending of the lens, and is a part of the periphery of a neutral plane, which is the farthest plane from the optical surface of the lens. Therefore, the influence of the clamping force on the flange portion acting on other portions of the lens is reduced to the utmost, and the deformation of the optical surface due to the force acting on the flange portion is reduced to a minimum. As a result, the deterioration of the optical properties of the lens can be suppressed to the utmost.

摘要翻译： 在透镜的光轴方向的中心位置的周边的至少一部分上设有凸缘部。 透镜保持夹紧构件和透镜保持金属部分，凸缘部分被夹紧构件按压。 设置凸缘部分的部分由于透镜的弯曲而没有压缩应变和拉伸应变，并且是与透镜的光学表面最远的平面的中性平面的周边的一部分。 因此，夹紧力对作用在透镜其他部分上的凸缘部分的影响最大程度地降低，并且由于作用在凸缘部分上的力引起的光学表面的变形减小到最小。 结果，可以最大限度地抑制透镜的光学特性的劣化。

公开(公告)号：US20090190117A1

公开(公告)日：2009-07-30

申请号：US12320267

申请日：2009-01-22

申请人： Kazuya Ono ,  Toshimasa Shimoda ,  Yoichi Arai ,  Jin Nishikawa

发明人： Kazuya Ono ,  Toshimasa Shimoda ,  Yoichi Arai ,  Jin Nishikawa

IPC分类号： G03B27/54

CPC分类号： G03F7/709 ,  G03F7/70833

摘要： An exposure apparatus includes an illumination optical system that guides illumination light to a mask; a projection optical system that projects the pattern irradiated with the illumination light, onto a substrate; and a supporting device that integrally suspendingly supports at least part of the illumination optical system and the projection optical system, with a supporting member having a flexible structure.

摘要翻译： 曝光装置包括将照明光引导到面罩的照明光学系统; 将照射光照射的图案投影到基板上的投影光学系统; 以及支撑装置，其利用具有柔性结构的支撑构件一体地悬挂地支撑照明光学系统和投影光学系统的至少一部分。

公开(公告)号：US20090103063A1

公开(公告)日：2009-04-23

申请号：US12253099

申请日：2008-10-16

申请人： Jin Nishikawa

发明人： Jin Nishikawa

IPC分类号： G03B27/52 ,  G03B27/32

CPC分类号： G02B7/008 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F7/70891 ,  G21K1/062 ,  G21K2201/065

摘要： An optical member cooling apparatus for cooling an optical member such as a mirror. The optical member cooling apparatus includes a cooling member fixed to the rear surface of the mirror by an engagement mechanisms. The rear surface of the mirror and the contact surface of the cooling mirror have a high flatness. A locking portion including a groove and an extended portion is formed in the rear surface of the mirror. A shaft of the engagement mechanism is hooked to the extended portion of the locking portion. The engagement member is urged toward the cooling member by a spring.

摘要翻译： 一种用于冷却诸如反射镜的光学构件的光学构件冷却装置。 光学构件冷却装置包括通过接合机构固定到反射镜的后表面的冷却构件。 反射镜的后表面和冷却镜的接触表面具有高的平坦度。 包括凹槽和延伸部分的锁定部分形成在反射镜的后表面中。 接合机构的轴钩在锁定部分的延伸部分上。 接合构件通过弹簧被推向冷却构件。

公开(公告)号：US20090135386A1

公开(公告)日：2009-05-28

申请号：US12292381

申请日：2008-11-18

申请人： Jin Nishikawa

发明人： Jin Nishikawa

IPC分类号： G03B27/52

CPC分类号： G03F7/70916 ,  G03F7/70075 ,  G03F7/702 ,  G03F7/70841 ,  G03F7/70908

摘要： An illumination optical apparatus which illuminates an illumination objective surface with an exposure light includes: an illumination optical system having a curved mirror and a concave mirror and defining a position substantially conjugate with the illumination objective surface between the curved and concave mirrors; and a second aperture plate separating a space in which the curved mirror is arranged and a space in which the concave mirror is arranged into mutually different vacuum environments or pressure-reduced environments, and having an aperture through which the exposure light passes, the aperture being arranged at a position at which a cross-sectional area of the exposure light is smallest, or in the vicinity of the position. It is possible to decrease the amount of passage of minute particles such as debris in relation to any downstream-side optical system.

摘要翻译： 用曝光灯照明照明物镜表面的照明光学装置包括：照明光学系统，具有弯曲镜和凹面镜，并且限定与弯曲和反射镜之间的照明物镜表面基本共轭的位置; 以及分隔其中布置有曲面镜的空间和将凹面镜布置在相互不同的真空环境或减压环境中的空间的第二孔板，并且具有曝光光通过的孔，孔是 布置在曝光光的横截面积最小的位置处或位于该位置附近。 相对于任何下游侧光学系统，可以减少诸如碎屑的微小颗粒的通过量。

公开(公告)号：US20070284502A1

公开(公告)日：2007-12-13

申请号：US11644467

申请日：2006-12-21

申请人： Yi-Ping Hsin ,  Hideyuki Hashimoto ,  Jin Nishikawa ,  Scott Coakley ,  Kunitomo Fukai ,  Wen-Hou Ma ,  Bausan Yuan

发明人： Yi-Ping Hsin ,  Hideyuki Hashimoto ,  Jin Nishikawa ,  Scott Coakley ,  Kunitomo Fukai ,  Wen-Hou Ma ,  Bausan Yuan

IPC分类号： A47G1/24

CPC分类号： G02B7/005

摘要： “Hexapod” mountings are disclosed for use with optical elements. An exemplary mounting includes a base, a platform that is movable relative to the base, and six legs having nominally identical length. Three pairs of legs, having substantially equal stiffness, extend between the base and platform and support the platform relative to the base. In each pair of legs, respective first ends are coupled together in a Λ-shaped manner forming a respective apex. Respective second ends are splayed relative to the apex, desirably forming an angle of substantially 109.5° at the apex. The apices are mounted equidistantly from each other on a circle on the platform. The respective second ends of the pairs of legs are mounted at respective locations on a circle on the base. The axes of each pair of legs define a respective leg plane substantially perpendicular to the base plane. Each leg has an actuator that, when energized, changes a length of the respective leg. Coordinated energization of the actuators in selected legs produces a desired movement of the platform relative to the base in all six degrees of freedom of motion.

摘要翻译： “六足”安装件被公开用于光学元件。 示例性的安装包括底座，相对于底座可移动的平台以及具有标称相同长度的六个腿。 具有基本上相同刚度的三对腿在基座和平台之间延伸并且相对于基座支撑平台。 在每对腿中，相应的第一端以形成相应顶点的L形方式联接在一起。 相对于顶点显示相应的第二端，期望在顶点形成大致109.5°的角度。 顶点在平台上的圆圈上彼此等距地安装。 成对的腿的相应的第二端安装在基座上的圆圈上的相应位置处。 每对腿的轴线限定基本上垂直于基础平面的相应腿部平面。 每个腿都有一个致动器，当被通电时，改变相应腿部的长度。 所选腿中的致动器的协调通电在所有六个运动自由度中产生平台相对于基座的期望运动。

公开(公告)号：US08576375B2

公开(公告)日：2013-11-05

申请号：US12181849

申请日：2008-07-29

申请人： Jin Nishikawa

发明人： Jin Nishikawa

IPC分类号： G03B27/70 ,  G03B27/54 ,  G02B7/182 ,  G03F7/20

CPC分类号： G03F7/70233 ,  G03F7/70258 ,  G03F7/70825 ,  G03F7/70833

摘要： There is provided is an optical member-holding apparatus which can hold a plurality of optical members of two different optical systems, even when the optical members exist in a common barrel in a mixed manner, such that the relative positions between the optical members can be easily adjusted; and which holds a mirror in a projection optical system and a mirror in an illumination optical system and includes a barrel unit, an inner ring holding the mirror, a holding member holding the mirror, a support plate attached to the barrel unit, and a holding-supporting mechanism attached to the support plate and adjusting the relative position of the mirror to the mirror.

摘要翻译： 提供了一种光学构件保持装置，其可以容纳两个不同光学系统的多个光学构件，即使当光学构件以混合的方式存在于公共筒中时，光学构件之间的相对位置可以是 轻松调整; 并且其在照明光学系统中的投影光学系统和反射镜中保持反射镜，并且包括镜筒单元，保持镜的内圈，保持镜的保持构件，附接到镜筒单元的支撑板和保持 支撑机构附接到支撑板并且将镜子的相对位置调整到反射镜。

公开(公告)号：US07719661B2

公开(公告)日：2010-05-18

申请号：US12292381

申请日：2008-11-18

申请人： Jin Nishikawa

发明人： Jin Nishikawa

IPC分类号： G03B27/54 ,  G03B27/52

CPC分类号： G03F7/70916 ,  G03F7/70075 ,  G03F7/702 ,  G03F7/70841 ,  G03F7/70908

摘要： An illumination optical apparatus which illuminates an illumination objective surface with an exposure light includes: an illumination optical system having a curved mirror and a concave mirror and defining a position substantially conjugate with the illumination objective surface between the curved and concave mirrors; and a second aperture plate separating a space in which the curved mirror is arranged and a space in which the concave mirror is arranged into mutually different vacuum environments or pressure-reduced environments, and having an aperture through which the exposure light passes, the aperture being arranged at a position at which a cross-sectional area of the exposure light is smallest, or in the vicinity of the position. It is possible to decrease the amount of passage of minute particles such as debris in relation to any downstream-side optical system.

摘要翻译： 用曝光灯照明照明物镜表面的照明光学装置包括：照明光学系统，具有弯曲镜和凹面镜，并且限定与弯曲和反射镜之间的照明物镜表面基本共轭的位置; 以及分隔其中布置有曲面镜的空间和将凹面镜布置在相互不同的真空环境或减压环境中的空间的第二孔板，并且具有曝光光通过的孔，孔是 布置在曝光光的横截面积最小的位置处或位于该位置附近。 相对于任何下游侧光学系统，可以减少诸如碎屑的微小颗粒的通过量。