发明授权
US06791766B2 Method and device for holding optical member, optical device, exposure apparatus, and device manufacturing method 失效
保持光学部件的方法和装置,光学装置,曝光装置和装置的制造方法

  • 专利标题: Method and device for holding optical member, optical device, exposure apparatus, and device manufacturing method
  • 专利标题(中): 保持光学部件的方法和装置,光学装置,曝光装置和装置的制造方法
  • 申请号: US10259385
    申请日: 2002-09-30
  • 公开(公告)号: US06791766B2
    公开(公告)日: 2004-09-14
  • 发明人: Jin Nishikawa
  • 申请人: Jin Nishikawa
  • 优先权: JP2000-098042 20000331; JP2000-098093 20000331
  • 主分类号: G02B702
  • IPC分类号: G02B702
Method and device for holding optical member, optical device, exposure apparatus, and device manufacturing method
摘要:
A flange portion is provided to at least a part of the periphery at the center position in the direction of the optical axis of a lens. The lens is held with clamping members and a lens holding metallic part, with the flange portion pressed by the clamping members. The portion where the flange portion is provided, suffers no compressive strain and tensile strain due to the bending of the lens, and is a part of the periphery of a neutral plane, which is the farthest plane from the optical surface of the lens. Therefore, the influence of the clamping force on the flange portion acting on other portions of the lens is reduced to the utmost, and the deformation of the optical surface due to the force acting on the flange portion is reduced to a minimum. As a result, the deterioration of the optical properties of the lens can be suppressed to the utmost.
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