公开(公告)号：US11852969B2

公开(公告)日：2023-12-26

申请号：US17853624

申请日：2022-06-29

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

发明人： Hsin-Chang Lee ,  Pei-Cheng Hsu ,  Hao-Ping Cheng ,  Ta-Cheng Lien

IPC分类号： G03F1/82 ,  G03F1/64

CPC分类号： G03F1/82 ,  G03F1/64

摘要： In a method of cleaning a photo mask, the photo mask is placed on a support such that a pattered surface faces down, and an adhesive sheet is applied to edges of a backside surface of the photo mask.

公开(公告)号：US20230352309A1

公开(公告)日：2023-11-02

申请号：US17732662

申请日：2022-04-29

申请人： Taiwan Semiconductor Manufacturing Company

发明人： Ping-Hsun Lin ,  Hung-Yi Tsai ,  Hao-Ping Cheng ,  Ta-Cheng Lien ,  Hsin-Chang Lee

IPC分类号： H01L21/3065 ,  H01J37/32 ,  H05H1/24 ,  H01J37/22 ,  H01L21/308

CPC分类号： H01L21/3065 ,  H01J37/3244 ,  H01J37/32568 ,  H01J37/32477 ,  H05H1/24 ,  H01J37/22 ,  H01L21/308 ,  H01J2237/334 ,  H01J37/32082 ,  H05H2245/40

摘要： Methods for plasma stability in a plasma treatment tool are disclosed. A laser is positioned within a plasma treatment chamber within a skin depth of the electromagnetic field generated therein. The laser can be synchronized with the electrical triggering signals that generate the electromagnetic field. This scheme provides a stable and efficient method of plasma ignition.