FAN-OUT PACKAGING METHOD AND PACKAGING STRUCTURE THEREOF

    公开(公告)号:US20240321825A1

    公开(公告)日:2024-09-26

    申请号:US18680211

    申请日:2024-05-31

    发明人: Maohua DU

    IPC分类号: H01L23/00 H01L21/56 H01L23/28

    摘要: A fan-out packaging method and packaging structure are provided. The method includes: providing a wafer carrier, a panel carrier, and groups of first chips; fixing first surfaces of the groups of first chips on the wafer carrier; forming a first plastic encapsulation layer on second surfaces of the groups of first chips; separating the groups of first chips from the wafer carrier; forming a high-density interconnection wiring layer on the first surfaces of the groups of first chips; cutting the groups of first chips; fixing one side of the groups of first chips with the high-density interconnection wiring layer on the panel carrier; forming a second plastic encapsulation layer on another side of the groups of first chips away from the high-density interconnection wiring layer; separating the groups of first chips from the panel carrier; and forming a low-density interconnection wiring layer on the high-density interconnection wiring layer.