METAL OXIDE FILM-FORMING COMPOSITION AND METHOD OF PRODUCING METAL OXIDE FILM USING THE COMPOSITION

    公开(公告)号:US20230049429A1

    公开(公告)日:2023-02-16

    申请号:US17808218

    申请日:2022-06-22

    IPC分类号: G03F1/38 G03F1/80

    摘要: A metal oxide film-forming composition including a tertiary alkyloxycarbonyloxy group-containing aromatic hydrocarbon ring-modified fluorene compound represented by Formula (1) below; metal oxide nanoparticles surface-treated with a capping agent; and a solvent. In the formula, ring Z1 represents an aromatic hydrocarbon ring, R1a and R1b each independently represents a halogen atom, a cyano group, or an alkyl group, R2a and R2b each independently represents an alkyl group, R3a, R3b, R4a, R4b, R5a, and R5b each independently represents an alkyl group having 1 to 8 carbon atoms, k1 and k2 each independently represents an integer of 0 or more and 4 or less, and m1 and m2 each independently represents an integer of 0 or more and 6 or less