公开(公告)号：US20210143258A1

公开(公告)日：2021-05-13

申请号：US17153976

申请日：2021-01-21

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Hiroyuki Tomomatsu ,  Sameer Pendharkar ,  Hiroshi Yamasaki

IPC: H01L29/40 ,  H01L29/778 ,  H01L29/423 ,  H01L23/482

Abstract: A transistor device includes a field plate that extends from a source runner layer and/or a source contact layer. The field plate can be coplanar with and/or below a gate runner layer. The gate runner layer is routed away from a region directly above the gate metal layer by a gate bridge, such that the field plate can extend directly above the gate metal layer without being interfered by the gate runner layer. Coplanar with the source runner layer or the source contact layer, the field plate is positioned close to the channel region, which helps reduce its parasitic capacitance. By vertically overlapping the metal gate layer and the field plate, the disclosed HEMT device may achieve significant size efficiency without additional routings.

公开(公告)号：US20210143145A1

公开(公告)日：2021-05-13

申请号：US17123413

申请日：2020-12-16

Applicant: Texas Instruments Incorporated

Inventor： Sunglyong Kim ,  David LaFonteese ,  Seetharaman Sridhar ,  Sameer Pendharkar

IPC: H01L27/02 ,  H01L29/10 ,  H01L29/78 ,  H01L29/08

Abstract: An electrostatic discharge (ESD) protection structure that provides snapback protections to one or more high voltage circuit components. The ESD protection structure can be integrated along a peripheral region of a high voltage circuit, such as a high side gate driver of a driver circuit. The ESD protection structure includes a bipolar transistor structure interfacing with a PN junction of a high voltage device, which is configured to discharge the ESD current during an ESD event. The bipolar transistor structure has a collector region overlapping the PN junction, a base region embedded with sufficient pinch resistance to launch the snapback protection, and an emitter region for discharging the ESD current.

公开(公告)号：US10811530B2

公开(公告)日：2020-10-20

申请号：US15638707

申请日：2017-06-30

Applicant: Texas Instruments Incorporated

Inventor： Marie Denison ,  Sameer Pendharkar ,  Guru Mathur

IPC: H01L29/78 ,  H01L29/66 ,  H01L29/10 ,  H01L29/08 ,  H01L21/8234 ,  H01L29/40 ,  H01L29/06 ,  H01L29/423 ,  H01L21/225 ,  H01L21/283 ,  H01L21/324 ,  H01L29/51

Abstract: A semiconductor device having a vertical drain extended MOS transistor may be formed by forming deep trench structures to define vertical drift regions of the transistor, so that each vertical drift region is bounded on at least two opposite sides by the deep trench structures. The deep trench structures are spaced so as to form RESURF regions for the drift region. Trench gates are formed in trenches in the substrate over the vertical drift regions. The body regions are located in the substrate over the vertical drift regions.

公开(公告)号：US20200075576A1

公开(公告)日：2020-03-05

申请号：US16677044

申请日：2019-11-07

Applicant: Texas Instruments Incorporated

Inventor： Sunglyong Kim ,  David LaFonteese ,  Seetharaman Sridhar ,  Sameer Pendharkar

IPC: H01L27/02 ,  H01L29/08 ,  H01L29/78 ,  H01L29/10

Abstract: An electrostatic discharge (ESD) protection structure that provides snapback protections to one or more high voltage circuit components. The ESD protection structure can be integrated along a peripheral region of a high voltage circuit, such as a high side gate driver of a driver circuit. The ESD protection structure includes a bipolar transistor structure interfacing with a PN junction of a high voltage device, which is configured to discharge the ESD current during an ESD event. The bipolar transistor structure has a collector region overlapping the PN junction, a base region embedded with sufficient pinch resistance to launch the snapback protection, and an emitter region for discharging the ESD current.

公开(公告)号：US10580775B2

公开(公告)日：2020-03-03

申请号：US15681466

申请日：2017-08-21

Applicant: Texas Instruments Incorporated

Inventor： Sameer Pendharkar ,  Binghua Hu ,  Alexei Sadovnikov ,  Guru Mathur

IPC: H01L21/762 ,  H01L27/092 ,  H01L29/06 ,  H01L21/8238 ,  H01L21/765

Abstract: A semiconductor device adopts an isolation scheme to protect low voltage transistors from high voltage operations. The semiconductor device includes a substrate, a buried layer, a transistor well region, a first trench, and a second trench. The substrate has a top surface and a bottom surface. The buried layer is positioned within the substrate, and the transistor well region is positioned above the buried layer. The first trench extends from the top surface to penetrate the buried layer, and the first trench has a first trench depth. The second trench extending from the top surface to penetrate the buried layer. The second trench is interposed between the first trench and the transistor well region. The second trench has a second trench depth that is less than the first trench depth.

公开(公告)号：US10559681B2

公开(公告)日：2020-02-11

申请号：US15850854

申请日：2017-12-21

Applicant: Texas Instruments Incorporated

Inventor： Sunglyong Kim ,  Seetharaman Sridhar ,  Sameer Pendharkar

IPC: H01L29/78 ,  H01L21/28 ,  H03K17/687 ,  H01L29/10 ,  H01L21/761 ,  H01L29/49 ,  H01L29/66 ,  H01L29/06

Abstract: A lateral junction diode device includes a substrate having at least a semiconductor surface layer. A depletion-mode LDMOS device is in the semiconductor surface layer including a source, drain, and a gate above a gate dielectric, and a channel region under the gate on the gate dielectric. A drift region is between the channel region and the drain, wherein the drain also provides a cathode for the lateral junction diode device. An embedded diode includes a second cathode and an anode that is shared with the device. The embedded diode is junction isolated by an isolation region located between the anode and the source. The anode and isolation region are directly connected to the gate and the second cathode is directly connected to the source.

公开(公告)号：US10510847B2

公开(公告)日：2019-12-17

申请号：US16213013

申请日：2018-12-07

Applicant: Texas Instruments Incorporated

Inventor： Hiroyuki Tomomatsu ,  Hiroshi Yamasaki ,  Sameer Pendharkar

IPC: H01L29/40 ,  H01L29/20 ,  H01L29/41 ,  H01L29/45 ,  H01L29/49 ,  H01L29/778 ,  H01L27/06 ,  H01L29/417

Abstract: A transistor device includes a field plate extending from a source contact layer and defining an opening above a gate metal layer. Coplanar with the source contact layer, the field plate is positioned close to the channel region, which helps reduce its parasitic capacitance. Meanwhile, the opening allows a gate runner layer above the field plate to access and connect to the gate metal layer, which helps reduce the resistance of the gate structure. By vertically overlapping the metal gate layer, the field plate, and the gate runner layer, the transistor device may achieve fast switching performance without incurring any size penalty.

公开(公告)号：US20190245047A1

公开(公告)日：2019-08-08

申请号：US16383857

申请日：2019-04-15

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Hiroyuki Tomomatsu ,  Sameer Pendharkar ,  Hiroshi Yamasaki

IPC: H01L29/40 ,  H01L23/482 ,  H01L29/778 ,  H01L29/423

CPC classification number: H01L29/404 ,  H01L23/4824 ,  H01L29/2003 ,  H01L29/4238 ,  H01L29/7786

Abstract: A transistor device includes a field plate that extends from a source runner layer and/or a source contact layer. The field plate can be coplanar with and/or below a gate runner layer. The gate runner layer is routed away from a region directly above the gate metal layer by a gate bridge, such that the field plate can extend directly above the gate metal layer without being interfered by the gate runner layer. Coplanar with the source runner layer or the source contact layer, the field plate is positioned close to the channel region, which helps reduce its parasitic capacitance. By vertically overlapping the metal gate layer and the field plate, the disclosed HEMT device may achieve significant size efficiency without additional routings.

公开(公告)号：US20190109195A1

公开(公告)日：2019-04-11

申请号：US16213013

申请日：2018-12-07

Applicant: Texas Instruments Incorporated

Inventor： Hiroyuki Tomomatsu ,  Hiroshi Yamasaki ,  Sameer Pendharkar

IPC: H01L29/40 ,  H01L29/778 ,  H01L27/06 ,  H01L29/45 ,  H01L29/417 ,  H01L29/49 ,  H01L29/20

CPC classification number: H01L29/404 ,  H01L27/0605 ,  H01L29/2003 ,  H01L29/402 ,  H01L29/41758 ,  H01L29/452 ,  H01L29/4966 ,  H01L29/778 ,  H01L29/7786 ,  H01L29/7787

Abstract: A transistor device includes a field plate extending from a source contact layer and defining an opening above a gate metal layer. Coplanar with the source contact layer, the field plate is positioned close to the channel region, which helps reduce its parasitic capacitance. Meanwhile, the opening allows a gate runner layer above the field plate to access and connect to the gate metal layer, which helps reduce the resistance of the gate structure. By vertically overlapping the metal gate layer, the field plate, and the gate runner layer, the transistor device may achieve fast switching performance without incurring any size penalty.

公开(公告)号：US10211335B2

公开(公告)日：2019-02-19

申请号：US15830263

申请日：2017-12-04

Applicant: Texas Instruments Incorporated

Inventor： Sameer Pendharkar ,  Ming-yeh Chuang

IPC: H01L29/78 ,  H01L29/06 ,  H01L29/423 ,  H01L29/40 ,  H01L29/10 ,  H01L29/66 ,  H01L29/08

Abstract: A power transistor is provided with at least one transistor finger that lies within a semiconductor material. The gate oxide is segmented into a set of segments with thick field oxide between each segment in order to reduce gate capacitance and thereby improve a resistance times gate charge figure of merit.