DEVICE, SYSTEM AND METHOD FOR VOLTAGE GENERATING

    公开(公告)号:US20240395641A1

    公开(公告)日:2024-11-28

    申请号:US18322046

    申请日:2023-05-23

    Abstract: A device in a chamber is provided. The device comprises at least one die. The at least one die comprise a first voltage generator, a dielectric layer and a first voltage regulator circuit. The first voltage generator is charged to have a first induced voltage by induced charges generated in response to a first voltage of a first electrode of a chuck in the chamber. The dielectric layer surrounds the first voltage generator to isolate the first voltage generator from the first electrode. The first voltage regulator circuit is coupled to the first voltage generator to receive the first induced voltage and generates a first power supply voltage according to the first induced voltage for a first circuit in the device.

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