公开(公告)号：US20090267781A1

公开(公告)日：2009-10-29

申请号：US12432025

申请日：2009-04-29

申请人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

IPC分类号： G08B21/00 ,  G01D5/34

CPC分类号： G01D5/38

摘要： The present invention performs calculations on photoelectric conversion signals (Ia, Ib, Ic, Id) supplied from a light receiving device and calculates two signals (IA, IB) as a result. Furthermore, the signal (IAB) is generated based on the signals (IA, IB), and the signal (IAB) is output from the encoder. As shown in equation, the term in the signal (IAB) that depends on the time t is 4d−sin(ωt). Moreover, as shown in equations (5) and (6), the term that depends on the time t in the signals (IA, IB) is 2d−sin(ωt); consequently, the signal (IAB) varies with respect to the signals (IA, IB) on a scale substantially tantamount to doubling the degree of modulation. Accordingly, if the position of the movable scale is detected based on the signal (IAB), then that position can be detected with good accuracy on a scale tantamount to doubling the degree of modulation.

摘要翻译： 本发明对从光接收装置提供的光电转换信号（Ia，Ib，Ic，Id）进行计算，结果计算出两个信号（IA，IB）。 此外，基于信号（IA，IB）生成信号（IAB），并且从编码器输出信号（IAB）。 如等式所示，取决于时间t的信号（IAB）中的项是4d-sin（ωgat）。 此外，如等式（5）和（6）所示，取决于信号（IA，IB）中的时间t的项是2d-sin（ωgat）; 因此，信号（IAB）相对于信号（IA，IB）而变化，基本上等于将调制度加倍。 因此，如果基于信号（IAB）检测到可移动刻度的位置，那么可以以等于调制度加倍的量级的高精度检测该位置。

公开(公告)号：US20090135388A1

公开(公告)日：2009-05-28

申请号：US12330119

申请日：2008-12-08

申请人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

IPC分类号： G01B9/02 ,  G03B27/58 ,  G03B27/42

CPC分类号： G01D5/38 ,  G01D5/266 ,  G03F7/70716 ,  G03F7/70775

摘要： A moving grating is arranged on a side of a wafer stage, a light source irradiates a light to the moving grating, diffracted lights generated from the moving grating are interfered by fixed scales and an index scale of which positional relation with the light source is fixed, and a detection instrument detects the interfered light. In this case, since the moving grating is arranged on a side of the wafer stage, upsizing of the entire wafer stage can be suppressed. Further, since interference occurs between a plurality of diffracted lights (e.g., the ±1st-order diffracted light) passing extremely close optical paths, influence caused by a fluctuation of ambient atmosphere becomes less in comparison to conventional interferometers, and thus, a high-precision measurement of positional information of the movable body is possible.

摘要翻译： 移动光栅布置在晶片台的一侧，光源将光照射到移动光栅，由移动光栅产生的衍射光被固定的刻度干扰，并且与光源的位置关系固定的折射率 并且检测仪器检测被干扰的光。 在这种情况下，由于移动光栅布置在晶片台的一侧，因此可以抑制整个晶片台的大型化。 此外，由于在通过非常接近的光路的多个衍射光（例如±1级衍射光）之间发生干涉，所以与常规干涉仪相比，由环境大气的波动引起的影响变小， 移动体的位置信息的精度测量是可能的。

公开(公告)号：US20080258050A1

公开(公告)日：2008-10-23

申请号：US12144936

申请日：2008-06-24

申请人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

IPC分类号： G01D5/34

CPC分类号： G01D5/38 ,  G01D5/34784

摘要： A light via first and second index scales is split by a beam splitter, and one of the split lights is received by a first light-receiving element via a movable scale and also the other of the split lights is received by a second light-receiving element via a reference scale, and therefore by computing positional information of the movable scale using an output of the first light-receiving element (a first output) and an output of the second light-receiving element (a second output), movement information of the movable scale can be measured with high precision without being affected by drift of the modulation center (the oscillation center) of the beam.

摘要翻译： 通过第一和第二索引刻度的光被分束器分开，并且其中一个分光灯通过可移动刻度被第一光接收元件接收，另一个分光灯由第二光接收 并且因此通过使用第一受光元件（第一输出）的输出和第二光接收元件的输出（第二输出）来计算可移动刻度的位置信息，以及 可以高精度地测量可移动刻度，而不受波束的调制中心（振荡中心）的漂移的影响。

公开(公告)号：US20100176282A1

公开(公告)日：2010-07-15

申请号：US12731725

申请日：2010-03-25

申请人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

IPC分类号： G01D5/347

CPC分类号： G01D5/38 ,  G02B26/0808

摘要： A reflection mirror that causes an illumination light to be incident on a movable scale is oscillated in an X-axis direction based on a modulation signal. Accordingly, the optical path of the illumination light, of the illumination light and another illumination light generated at an index scale, periodically changes, and as a consequence, the illumination light is periodically modulated. Accordingly, an extra scanner that scans the illumination light or another illumination light with respect to the movable scale does not have to be arranged, which allows an apparatus to be reduced in size and cost.

摘要翻译： 使照明光入射到可动标尺上的反射镜基于调制信号在X轴方向上振荡。 因此，照明光的照明光的光路和在指标处产生的其他照明光周期性地变化，结果周期性地调制照明光。 因此，不需要布置扫描照明光或相对于可动标尺的另一照明光的额外的扫描器，这允许设备的尺寸和成本降低。

公开(公告)号：US20120292539A1

公开(公告)日：2012-11-22

申请号：US13565373

申请日：2012-08-02

申请人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

IPC分类号： G01D5/347

CPC分类号： G01D5/38

摘要： An encoder detects positional information of a moving body using interference of a modulated illumination light. A scale has a pattern arrayed in movement directions of the moving body. An optical member generates an emergent light by the interference of the modulated illumination light. A light receiving device receives the emergent light and outputs a first photoelectric conversion signal and a second photoelectric conversion signal which have a phase difference. A control circuit generates a first signal by subtracting at least the first photoelectric conversion signal from the second photoelectric conversion signal, and outputs the positional information of the moving body based on the first signal. At least one of the scale, the optical member and the light receiving device is fixed to the moving body, and the scale is moved relative to the optical member and the light receiving device.

摘要翻译： 编码器使用调制的照明光的干涉来检测移动体的位置信息。 鳞片具有沿移动体的移动方向排列的图案。 光学构件通过调制的照明光的干涉产生出射光。 光接收装置接收出射光并输出具有相位差的第一光电转换信号和第二光电转换信号。 控制电路通过从第二光电转换信号中减去至少第一光电转换信号来产生第一信号，并且基于第一信号输出移动体的位置信息。 鳞片，光学构件和光接收装置中的至少一个固定到移动体，并且刻度尺相对于光学构件和光接收装置移动。

公开(公告)号：US20110272565A1

公开(公告)日：2011-11-10

申请号：US13186015

申请日：2011-07-19

申请人： Susumu MAKINOUCHI ,  Akihiro WATANABE ,  Toru IMAI

发明人： Susumu MAKINOUCHI ,  Akihiro WATANABE ,  Toru IMAI

IPC分类号： G01D5/34

CPC分类号： G01D5/38 ,  G01D5/34746

摘要： An encoder includes: a light modulation section which modulates at least a portion of light that is emitted from a light source; a moving member which has an incidence plane, on which a plurality of light beams of the light incident, and is relatively movable in at least one direction; and at least two light receiving sections which respectively receive interference fringes that are generated in at least two regions on the moving member, wherein the light enters into the moving member such that at least two interference fringes move in opposite directions on the moving member in accordance with a modulation by the light modulation section.

摘要翻译： 编码器包括：光调制部，其对从光源发出的光的至少一部分进行调制; 具有入射面的移动构件，多个入射光束，并且能够在至少一个方向上相对移动; 以及至少两个光接收部分，其分别接收在所述移动构件上的至少两个区域中产生的干涉条纹，其中所述光进入所述移动构件，使得至少两个干涉条纹沿着所述移动构件沿相反方向在所述移动构件上移动 通过光调制部的调制。

公开(公告)号：US20110192964A1

公开(公告)日：2011-08-11

申请号：US13090659

申请日：2011-04-20

申请人： Susumu MAKINOUCHI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Akihiro WATANABE

IPC分类号： G01D5/34

CPC分类号： G01D5/38 ,  G01D5/34746

摘要： An encoder emits modulated light from a light source section and lets a first light and a second light separated from the modulated light interfere with each other in a moving grating. In the encoder, the light emitted from the light source section is electrically modulated, and the first light and the second light have different light path lengths.

摘要翻译： 编码器发射来自光源部分的调制光，并使得与调制光分离的第一光和第二光在移动光栅中相互干扰。 在编码器中，从光源部发射的光被电调制，第一光和第二光具有不同的光路长度。

公开(公告)号：US20100171030A1

公开(公告)日：2010-07-08

申请号：US12726023

申请日：2010-03-17

申请人： Susumu MAKINOUCHI

发明人： Susumu MAKINOUCHI

IPC分类号： G01D5/26 ,  G01D5/12

CPC分类号： G01D5/34707 ,  G01B7/14 ,  G01D5/2451

摘要： An encoder apparatus comprises a first scale member with a scale region on which a scale is arranged; a detector that detects light from the scale region; and a retaining member with a retaining surface that is arranged so as to face a surface of the first scale member including the scale region via a predetermined gap, and that retains a liquid at least between the retaining surface and the first scale member.

摘要翻译： 编码器装置包括具有刻度区域的第一标尺部件，刻度尺布置在其上; 检测来自刻度区域的光的检测器; 以及具有保持面的保持构件，其被配置为经由预定间隙面对包括刻度区域的第一刻度尺的表面，并且至少在保持表面和第一刻度构件之间保持液体。

公开(公告)号：US20090262321A1

公开(公告)日：2009-10-22

申请号：US12366934

申请日：2009-02-06

申请人： Susumu MAKINOUCHI

发明人： Susumu MAKINOUCHI

IPC分类号： G03B27/54 ,  G01B11/14 ,  G03B27/32

CPC分类号： G01D5/34746 ,  G01D5/38 ,  G03F7/70725 ,  G03F7/70775 ,  G03F7/7085

摘要： A mirror block on which moving gratings are arranged is fixed to the lower surface of a stage. Fixed gratings are placed on the upper surface of a stage platform that is opposed to the lower surface of the stage. A Y encoder that measures Y positional information of the stage is configured including the moving gratings and the fixed gratings. Similarly, an X encoder that measures X positional information of the stage is configured including the moving gratings and the fixed grating.

摘要翻译： 安置有移动光栅的镜块固定在舞台的下表面。 固定光栅放置在与平台的下表面相对的平台平台的上表面上。 测量台的Y位置信息的Y编码器被配置为包括移动光栅和固定光栅。 类似地，测量台阶X的位置信息的X编码器被配置成包括移动光栅和固定光栅。

公开(公告)号：US20120320350A1

公开(公告)日：2012-12-20

申请号：US13591583

申请日：2012-08-22

申请人： Motokatsu IMAI ,  Susumu MAKINOUCHI

发明人： Motokatsu IMAI ,  Susumu MAKINOUCHI

IPC分类号： G03B27/52

CPC分类号： G03F7/70341

摘要： An exposure apparatus forms an immersion area by supplying a liquid onto a part of a substrate, and forms a prescribed pattern on the substrate through the liquid. A spare immersion area which is capable of holding part of the liquid on the substrate, is formed at the outer circumference of the immersion area. It is possible to prevent the separation of the liquid, which is disposed between a lower surface of a projection optical system and a substrate surface, from the lower surface of the projection optical system in accordance with the relative movement of the projection optical system and the substrate.

摘要翻译： 曝光装置通过将液体供给到基板的一部分而形成浸渍区域，并通过液体在基板上形成规定的图案。 在浸渍区域的外周形成能够将一部分液体保持在基板上的备用浸渍区域。 可以根据投影光学系统和投影光学系统的相对移动来防止投影光学系统的下表面和基板表面之间的液体从投影光学系统的下表面分离 基质。