公开(公告)号：US20120292539A1

公开(公告)日：2012-11-22

申请号：US13565373

申请日：2012-08-02

申请人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

IPC分类号： G01D5/347

CPC分类号： G01D5/38

摘要： An encoder detects positional information of a moving body using interference of a modulated illumination light. A scale has a pattern arrayed in movement directions of the moving body. An optical member generates an emergent light by the interference of the modulated illumination light. A light receiving device receives the emergent light and outputs a first photoelectric conversion signal and a second photoelectric conversion signal which have a phase difference. A control circuit generates a first signal by subtracting at least the first photoelectric conversion signal from the second photoelectric conversion signal, and outputs the positional information of the moving body based on the first signal. At least one of the scale, the optical member and the light receiving device is fixed to the moving body, and the scale is moved relative to the optical member and the light receiving device.

摘要翻译： 编码器使用调制的照明光的干涉来检测移动体的位置信息。 鳞片具有沿移动体的移动方向排列的图案。 光学构件通过调制的照明光的干涉产生出射光。 光接收装置接收出射光并输出具有相位差的第一光电转换信号和第二光电转换信号。 控制电路通过从第二光电转换信号中减去至少第一光电转换信号来产生第一信号，并且基于第一信号输出移动体的位置信息。 鳞片，光学构件和光接收装置中的至少一个固定到移动体，并且刻度尺相对于光学构件和光接收装置移动。

公开(公告)号：US20110272565A1

公开(公告)日：2011-11-10

申请号：US13186015

申请日：2011-07-19

申请人： Susumu MAKINOUCHI ,  Akihiro WATANABE ,  Toru IMAI

发明人： Susumu MAKINOUCHI ,  Akihiro WATANABE ,  Toru IMAI

IPC分类号： G01D5/34

CPC分类号： G01D5/38 ,  G01D5/34746

摘要： An encoder includes: a light modulation section which modulates at least a portion of light that is emitted from a light source; a moving member which has an incidence plane, on which a plurality of light beams of the light incident, and is relatively movable in at least one direction; and at least two light receiving sections which respectively receive interference fringes that are generated in at least two regions on the moving member, wherein the light enters into the moving member such that at least two interference fringes move in opposite directions on the moving member in accordance with a modulation by the light modulation section.

摘要翻译： 编码器包括：光调制部，其对从光源发出的光的至少一部分进行调制; 具有入射面的移动构件，多个入射光束，并且能够在至少一个方向上相对移动; 以及至少两个光接收部分，其分别接收在所述移动构件上的至少两个区域中产生的干涉条纹，其中所述光进入所述移动构件，使得至少两个干涉条纹沿着所述移动构件沿相反方向在所述移动构件上移动 通过光调制部的调制。

公开(公告)号：US20100176282A1

公开(公告)日：2010-07-15

申请号：US12731725

申请日：2010-03-25

申请人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

IPC分类号： G01D5/347

CPC分类号： G01D5/38 ,  G02B26/0808

摘要： A reflection mirror that causes an illumination light to be incident on a movable scale is oscillated in an X-axis direction based on a modulation signal. Accordingly, the optical path of the illumination light, of the illumination light and another illumination light generated at an index scale, periodically changes, and as a consequence, the illumination light is periodically modulated. Accordingly, an extra scanner that scans the illumination light or another illumination light with respect to the movable scale does not have to be arranged, which allows an apparatus to be reduced in size and cost.

摘要翻译： 使照明光入射到可动标尺上的反射镜基于调制信号在X轴方向上振荡。 因此，照明光的照明光的光路和在指标处产生的其他照明光周期性地变化，结果周期性地调制照明光。 因此，不需要布置扫描照明光或相对于可动标尺的另一照明光的额外的扫描器，这允许设备的尺寸和成本降低。

公开(公告)号：US20090267781A1

公开(公告)日：2009-10-29

申请号：US12432025

申请日：2009-04-29

申请人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

IPC分类号： G08B21/00 ,  G01D5/34

CPC分类号： G01D5/38

摘要： The present invention performs calculations on photoelectric conversion signals (Ia, Ib, Ic, Id) supplied from a light receiving device and calculates two signals (IA, IB) as a result. Furthermore, the signal (IAB) is generated based on the signals (IA, IB), and the signal (IAB) is output from the encoder. As shown in equation, the term in the signal (IAB) that depends on the time t is 4d−sin(ωt). Moreover, as shown in equations (5) and (6), the term that depends on the time t in the signals (IA, IB) is 2d−sin(ωt); consequently, the signal (IAB) varies with respect to the signals (IA, IB) on a scale substantially tantamount to doubling the degree of modulation. Accordingly, if the position of the movable scale is detected based on the signal (IAB), then that position can be detected with good accuracy on a scale tantamount to doubling the degree of modulation.

摘要翻译： 本发明对从光接收装置提供的光电转换信号（Ia，Ib，Ic，Id）进行计算，结果计算出两个信号（IA，IB）。 此外，基于信号（IA，IB）生成信号（IAB），并且从编码器输出信号（IAB）。 如等式所示，取决于时间t的信号（IAB）中的项是4d-sin（ωgat）。 此外，如等式（5）和（6）所示，取决于信号（IA，IB）中的时间t的项是2d-sin（ωgat）; 因此，信号（IAB）相对于信号（IA，IB）而变化，基本上等于将调制度加倍。 因此，如果基于信号（IAB）检测到可移动刻度的位置，那么可以以等于调制度加倍的量级的高精度检测该位置。

公开(公告)号：US20090135388A1

公开(公告)日：2009-05-28

申请号：US12330119

申请日：2008-12-08

申请人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

IPC分类号： G01B9/02 ,  G03B27/58 ,  G03B27/42

CPC分类号： G01D5/38 ,  G01D5/266 ,  G03F7/70716 ,  G03F7/70775

摘要： A moving grating is arranged on a side of a wafer stage, a light source irradiates a light to the moving grating, diffracted lights generated from the moving grating are interfered by fixed scales and an index scale of which positional relation with the light source is fixed, and a detection instrument detects the interfered light. In this case, since the moving grating is arranged on a side of the wafer stage, upsizing of the entire wafer stage can be suppressed. Further, since interference occurs between a plurality of diffracted lights (e.g., the ±1st-order diffracted light) passing extremely close optical paths, influence caused by a fluctuation of ambient atmosphere becomes less in comparison to conventional interferometers, and thus, a high-precision measurement of positional information of the movable body is possible.

摘要翻译： 移动光栅布置在晶片台的一侧，光源将光照射到移动光栅，由移动光栅产生的衍射光被固定的刻度干扰，并且与光源的位置关系固定的折射率 并且检测仪器检测被干扰的光。 在这种情况下，由于移动光栅布置在晶片台的一侧，因此可以抑制整个晶片台的大型化。 此外，由于在通过非常接近的光路的多个衍射光（例如±1级衍射光）之间发生干涉，所以与常规干涉仪相比，由环境大气的波动引起的影响变小， 移动体的位置信息的精度测量是可能的。

公开(公告)号：US20080258050A1

公开(公告)日：2008-10-23

申请号：US12144936

申请日：2008-06-24

申请人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

发明人： Susumu MAKINOUCHI ,  Toru IMAI ,  Akihiro WATANABE

IPC分类号： G01D5/34

CPC分类号： G01D5/38 ,  G01D5/34784

摘要： A light via first and second index scales is split by a beam splitter, and one of the split lights is received by a first light-receiving element via a movable scale and also the other of the split lights is received by a second light-receiving element via a reference scale, and therefore by computing positional information of the movable scale using an output of the first light-receiving element (a first output) and an output of the second light-receiving element (a second output), movement information of the movable scale can be measured with high precision without being affected by drift of the modulation center (the oscillation center) of the beam.

摘要翻译： 通过第一和第二索引刻度的光被分束器分开，并且其中一个分光灯通过可移动刻度被第一光接收元件接收，另一个分光灯由第二光接收 并且因此通过使用第一受光元件（第一输出）的输出和第二光接收元件的输出（第二输出）来计算可移动刻度的位置信息，以及 可以高精度地测量可移动刻度，而不受波束的调制中心（振荡中心）的漂移的影响。