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公开(公告)号：US20240134294A1
公开(公告)日：2024-04-25
申请号：US18396821
申请日：2023-12-27
Applicant: NIKON CORPORATION
Inventor： Yuichi SHIBAZAKI
CPC classification number: G03F9/7046 , G01B11/00 , G01B11/002 , G01D5/34746 , G03F7/70633 , G03F7/70775
Abstract: A measurement device has: a slider which holds a substrate and is movable parallel to the XY plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which receives respective return beams of the beams from the measurement surface, and which is capable of measuring position information in at least directions of three degrees of freedom including the absolute position coordinates of the slider; a mark detection system that detects a mark on the substrate; and a controller which detects the marks on the substrate using the mark detection system while controlling the drive of the slider, and which obtains the absolute position coordinates of each mark based on the detection result of each mark and measurement information by the position measurement system at the time of detection.
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公开(公告)号：US20240118114A1
公开(公告)日：2024-04-11
申请号：US18374180
申请日：2023-09-28
Applicant: Schneeberger Holding AG
Inventor： Roger INFANGER , Roger LEHMANN
IPC: G01D5/347
CPC classification number: G01D5/34746 , G01D5/34715
Abstract: A method for applying a measurement scale to a linear profile rail guide carriage surface, the guide carriage being guided on a guide rail linearly and longitudinally toward the guide rail and having a first side surface extending longitudinally, the measurement scale including at least one track extending linearly and longitudinally, including several mirror regions arranged alternately one behind the other, and marking regions, uses a pulsed laser to generate a laser beam and introduces a microstructure in a first region corresponding to at least one first side surface marking region. A sequence of light pulses is directed at the first region so that the laser beam is moved two-dimensionally relative to the first region to irradiate successively different subregions of the first region by the light pulses. Each different irradiated subregion has an overlap in, or transverse to, the longitudinal direction with at least two other irradiated subregions.
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公开(公告)号：US20230400701A1
公开(公告)日：2023-12-14
申请号：US18207962
申请日：2023-06-09
Applicant: Apton Biosystems, Inc.
Inventor： Windsor OWENS , Bryan P. STAKER , Robert HARTLAGE , Edvinas ZIZMINSKAS , David STERN , Paul HEILMAN
CPC classification number: G02B27/644 , G01D5/34746 , G02B26/101 , H04N3/08 , H04N23/60 , H04N23/685
Abstract: Disclosed herein is a high throughput optical scanning device and methods of use. The optical scanning device and methods of use provided herein can allow high throughput scanning of a continuously moving object with a high resolution despite fluctuations in stage velocity. This can aid in high throughput scanning of a substrate, such as a biological chip comprising fluorophores. Also provided herein are improved optical relay systems and scanning optics.
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公开(公告)号：US20230175873A1
公开(公告)日：2023-06-08
申请号：US17998077
申请日：2021-05-07
Applicant: KYOCERA CORPORATION
Inventor： Hiroshi HAMASHIMA
IPC: G01D5/347
CPC classification number: G01D5/34707 , G01D5/34746
Abstract: A position detecting member includes a base portion including a light-receiving surface having a black color tone and a back surface located on an opposite side to the light-receiving surface. A surface layer portion including at least the base portion is made of ceramic. An average value of root mean square slopes (RΔq) on the light-receiving surface in a roughness curve is larger than an average value of root mean square slope (RΔq) on the back surface.
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公开(公告)号：US20190219422A1
公开(公告)日：2019-07-18
申请号：US16241473
申请日：2019-01-07
Applicant: DR. JOHANNES HEIDENHAIN GmbH
Inventor： Stefan WEIS , Daniel FRESE , Wolfgang HOLZAPFEL
IPC: G01D5/245
CPC classification number: G01D5/2455 , G01D5/34746 , G01D5/34792
Abstract: A position-measuring device for determining an absolute position includes a measuring scale and a scanning unit that is movable relative to the measuring scale along at least one measuring direction. To generate a scannable signal pattern, the measuring scale has a measuring graduation which includes a raster of stripe elements arranged along the measuring direction at a measuring-scale longitudinal period. For the encoding of an absolute position, the stripe elements have a periodic structure having a measuring-scale transverse period along a transverse direction that is oriented perpendicular to the measuring direction. For scanning the signal pattern, the scanning unit has a two-dimensional detector system having a plurality of detector elements, which includes multiple detector columns having a plurality of detector elements in each case. The detector columns are periodically arranged along the measuring direction and the detector elements are periodically arranged along the transverse direction, so that by scanning the signal pattern, at least three periodic partial incremental signals are able to be generated with regard to relative movements along the measuring direction, as well as at least one absolute-position signal per detector column.
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Patent Agency Ranking
公开(公告)号：US10082410B2
公开(公告)日：2018-09-25
申请号：US14870158
申请日：2015-09-30
Applicant: DR. JOHANNES HEIDENHAIN GmbH
Inventor： Karsten Saendig
CPC classification number: G01D5/34746 , G01B9/02097 , G01B11/00 , G01B11/002
Abstract: An optical position-measuring device includes a scanning unit and a material measure that is movable relative thereto in a measuring direction. The scanning unit includes a splitting device and an optoelectronic detector arrangement. The splitting device is configured to separate sub-beams incident thereon as a function of wavelength. The splitting device is configured as an asymmetrical interferometer that includes two interferometer arms having different optical path lengths, within which the sub-beams propagate between splitting and recombination until the recombined sub-beams arrive at the detector arrangement. The optical position-measuring device is configured to generate a plurality of phase-shifted scanning signals indicative of a relative position of the scanning unit and of the material measure, wherein phase relations of the generated phase-shifted scanning signals are wavelength-dependent.
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公开(公告)号：US20180180453A1
公开(公告)日：2018-06-28
申请号：US15391243
申请日：2016-12-27
Applicant: MITUTOYO CORPORATION
Inventor： Akihide KIMURA , Joseph Daniel TOBIASON
IPC: G01D5/347
CPC classification number: G01D5/34746
Abstract: A detection head movable relative to a scale detects diffracted light and outputs a detection result. The diffracted light is diffracted by an incremental pattern. A signal processing unit calculates a relative displacement between the scale and the detection head. The detection head includes: a light source emitting the light to the scale; and a detection unit including a light-receiving unit in which a plurality of light-receiving elements that output a detection signal are arranged. The number of the plurality of light-receiving elements is an even number. A period of the arrangement of the plurality of light-receiving elements is an odd-number multiple of a fundamental period. The fundamental period is a period of interference fringes formed on the light-receiving unit by +1st and −1st order diffracted lights. A width of the light-receiving element is not equal to an integral multiple of the fundamental period.
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8.发明授权公开(公告)号：US09995603B2
公开(公告)日：2018-06-12
申请号：US14754895
申请日：2015-06-30
Applicant: CANON KABUSHIKI KAISHA
Inventor： Takeshi Yonezawa
CPC classification number: G01D5/34776 , G01D3/08 , G01D5/24466 , G01D5/34715 , G01D5/34746
Abstract: A position detector, including: a scale including a pattern array formed cyclically in a movement direction, the scale being provided to a fixed member or a movable member; a detector including detection elements arranged in the movement direction, the detector being provided to the other; a generating unit that selectively generates, from signals received from the detection elements, a first signal obtained by a first combination of the signals or a second signal obtained by a second combination of the signals; an output unit that outputs the first or second signal received from the generating unit; and a switcher that switches over between the first and second signals as a signal to be generated, wherein the first signal changes within a first range, corresponding to a relative position; and the second signal does not change beyond a second range smaller than the first range, corresponding to the relative position.
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公开(公告)号：US09871595B2
公开(公告)日：2018-01-16
申请号：US15395843
申请日：2016-12-30
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chien-Wen Chen , Yung-Chang Chen , Huan-Chi Huang
CPC classification number: H04B10/60 , G01D5/34746 , G01D5/34792 , G02B5/1861 , H04L7/0075 , H04L7/0079
Abstract: A decoding device for an absolute positioning code is provided. The decoding device includes a linear feedback shift register (LFSR), a lookup table (LUT) circuit, a counter circuit, and a computation circuit. The LFSR includes n registers, for loading the absolute positioning code with a first frequency. The LFSR performs shifting operation according to a clock signal having a second frequency greater than or equal to the first frequency. The LUT circuit outputs a lookup result and a valid flag according to values stored in the n registers. The lookup result has k different data, k≦(2n−1). The counter circuit resets according to the valid flag, and performs counting operation according to the clock signal to generate a counting result. The computation circuit performs calculation according to the lookup result and the counting result to generate a decoding result when the valid flag indicates valid.
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10.发明授权公开(公告)号：US09851197B2
公开(公告)日：2017-12-26
申请号：US14652186
申请日：2012-12-13
Applicant: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
CPC classification number: G01B11/005 , G01B11/024 , G01B21/047 , G01D5/34746
Abstract: A device has a displaceable device part, a drive, which is configured to drive the displaceable device part and to thus induce a movement in the displaceable device part, and a control unit, which is connected to the drive and is configured to control the drive. The device further has a first signal transmitter for determining a position and/or speed of the displaceable device part. The first signal transmitter and/or a first signal evaluation device, which is connected to the signal transmitter, are connected to the control unit such that the control unit receives information from the signal transmitter about the position and/or speed of the displaceable device part during operation of the device and controls the drive on the basis of the information received. A second signal transmitter of the device serves to monitor and/or redundantly determine the position and/or speed of the displaceable device part.
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