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15 条记录 (耗时 0.015 秒)

    Exposure apparatus, exposure method, and device fabrication method
    4.
    发明申请
    Exposure apparatus, exposure method, and device fabrication method 有权
    曝光装置，曝光方法和装置制造方法

    公开(公告)号：US20070002299A1

    公开(公告)日：2007-01-04

    申请号：US11407210

    申请日：2006-04-20

    申请人： Motokatsu Imai ,  Susumu Makinouchi

    发明人： Motokatsu Imai ,  Susumu Makinouchi

    IPC分类号： G03B27/52

    CPC分类号： G03F7/70341

    摘要： An exposure apparatus forms an immersion area by supplying a liquid onto a part of a substrate, and forms a prescribed pattern on the substrate through the liquid. A spare immersion area, which is capable of holding part of the liquid on the substrate, is formed at the outer circumference of the immersion area. It is possible to prevent the separation of the liquid, which is disposed between a lower surface of a projection optical system and a substrate surface, from the lower surface of the projection optical system in accordance with the relative movement of the projection optical system and the substrate.

    摘要翻译： 曝光装置通过将液体供给到基板的一部分而形成浸渍区域，并通过液体在基板上形成规定的图案。 在浸渍区域的外周形成有能够将一部分液体保持在基板上的备用浸渍区域。 可以根据投影光学系统和投影光学系统的相对移动来防止投影光学系统的下表面和基板表面之间的液体从投影光学系统的下表面分离 基质。

    Exposure apparatus, exposure method, and device fabrication method
    5.
    发明授权
    Exposure apparatus, exposure method, and device fabrication method 有权
    曝光装置，曝光方法和装置制造方法

    公开(公告)号：US08272544B2

    公开(公告)日：2012-09-25

    申请号：US13064361

    申请日：2011-03-21

    申请人： Motokatsu Imai ,  Susumu Makinouchi

    发明人： Motokatsu Imai ,  Susumu Makinouchi

    IPC分类号： G03F7/20

    CPC分类号： G03F7/70341

    摘要： An exposure apparatus forms an immersion area by supplying a liquid onto a part of a substrate, and forms a prescribed pattern on the substrate through the liquid. A spare immersion area, which is capable of holding part of the liquid on the substrate, is formed at the outer circumference of the immersion area. It is possible to prevent the separation of the liquid, which is disposed between a lower surface of a projection optical system and a substrate surface, from the lower surface of the projection optical system in accordance with the relative movement of the projection optical system and the substrate.

    摘要翻译： 曝光装置通过将液体供给到基板的一部分而形成浸渍区域，并通过液体在基板上形成规定的图案。 在浸渍区域的外周形成有能够将一部分液体保持在基板上的备用浸渍区域。 可以根据投影光学系统和投影光学系统的相对移动来防止投影光学系统的下表面和基板表面之间的液体从投影光学系统的下表面分离 基质。

    Exposure apparatus, exposure method, and device fabrication method
    6.
    发明授权
    Exposure apparatus, exposure method, and device fabrication method 有权

    公开(公告)号：US07932996B2

    公开(公告)日：2011-04-26

    申请号：US11407210

    申请日：2006-04-20

    申请人： Motokatsu Imai ,  Susumu Makinouchi

    发明人： Motokatsu Imai ,  Susumu Makinouchi

    IPC分类号： G03B27/52

    CPC分类号： G03F7/70341

    摘要： An exposure apparatus forms an immersion area by supplying a liquid onto a part of a substrate, and forms a prescribed pattern on the substrate through the liquid. A spare immersion area, which is capable of holding part of the liquid on the substrate, is formed at the outer circumference of the immersion area. It is possible to prevent the separation of the liquid, which is disposed between a lower surface of a projection optical system and a substrate surface, from the lower surface of the projection optical system in accordance with the relative movement of the projection optical system and the substrate.

    Multiple rotating absolute encoder capable of accurately latching absolute address data with data on number of rotations
    8.
    发明授权
    Multiple rotating absolute encoder capable of accurately latching absolute address data with data on number of rotations 失效
    多旋转绝对编码器能够精确地将绝对地址数据与转数数据进行锁存

    公开(公告)号：US5663557A

    公开(公告)日：1997-09-02

    申请号：US501651

    申请日：1995-07-12

    申请人： Tohru Morita ,  Kou Ohno ,  Motokatsu Imai ,  Yuuji Yamazaki

    发明人： Tohru Morita ,  Kou Ohno ,  Motokatsu Imai ,  Yuuji Yamazaki

    IPC分类号： G01D5/14 ,  G01D5/16 ,  G01D5/244 ,  G01D5/245 ,  G01D5/249 ,  G01D5/347 ,  G01D5/34

    CPC分类号： G01D5/145 ,  G01D5/2455 ,  G01D5/34792

    摘要： A disclosed multiple rotating absolute encoder comprises an encoding plate with a first pattern and a second pattern formed thereon, a first detection unit for reading the first pattern and outputting an information in one rotation of the encoding plate, a second detection unit for reading the second pattern and outputting a first rotation information of the encoding plate, a calculation unit for calculating a second rotation data based on the information in one rotation and the first rotation data, a selection unit for monitoring a rotation speed of the encoding plate and selecting either the first rotation data or the second rotation data in accordance with the rotation speed, and a data calculation unit for calculating rotation information of the encoding plate on the basis of either the first rotation data or the second rotation data selected by the selection unit and the information in one rotation.

    摘要翻译： 公开的多旋转绝对编码器包括：编码板，其具有形成在其上的第一图案和第二图案;第一检测单元，用于读取第一图案并在编码板的一个旋转中输出信息;第二检测单元，用于读取第二图案 输出编码板的第一旋转信息，计算单元，用于基于一个旋转中的信息计算第二旋转数据和第一旋转数据;选择单元，用于监视编码板的转速，并选择 根据旋转速度的第一旋转数据或第二旋转数据，以及数据计算单元，用于基于由选择单元选择的第一旋转数据或第二旋转数据以及信息来计算编码板的旋转信息 在一个旋转。

    Absolute encoder using interpolation to obtain high resolution
    9.
    发明授权
    Absolute encoder using interpolation to obtain high resolution 失效
    绝对编码器采用插补获得高分辨率

    公开(公告)号：US5252825A

    公开(公告)日：1993-10-12

    申请号：US728269

    申请日：1991-07-11

    申请人： Motokatsu Imai ,  Koh Ohno ,  Tsuyoshi Matsumoto

    发明人： Motokatsu Imai ,  Koh Ohno ,  Tsuyoshi Matsumoto

    IPC分类号： G01D5/249 ,  H03M1/14 ,  H03M1/26 ,  H03M1/30 ,  G01D5/34

    CPC分类号： H03M1/143 ,  H03M1/203 ,  H03M1/26 ,  H03M1/30 ,  H03M1/303

    摘要： An absolute encoder device comprises a code plate having a 1-track type absolute pattern whose minimum reading unit length is .lambda., a first incremental pattern with a pitch .lambda., and a second incremental pattern with pitch 2.sup.-n .lambda.. The device also comprises a detector section, which is movable relative to the code plate, which includes a detector detecting the absolute pattern and obtaining an absolute pattern signal, a detector detecting a first incremental pattern and obtaining a first incremental signal, and a detector detecting a second incremental pattern and obtaining a second incremental pattern signal. A shorter cyclic incremental signal is generated from the first incremental signal by interpolating and the shorter cyclic signal is synchronized with the second incremental signal. The absolute pattern signal, the second incremental signal and the synchronized first incremental signal represent the relative positional relationship between the code plate and the detector section.

    摘要翻译： 绝对编码器装置包括具有最小读取单位长度为λ的1-轨道型绝对图案的代码板，具有间距λ的第一增量图案和具有间距2-nλ的第二增量图案。 该装置还包括可相对于码板移动的检测器部分，其包括检测绝对图案并获得绝对图案信号的检测器，检测第一增量图案并获得第一增量信号的检测器，以及检测器检测 第二增量模式并获得第二增量模式信号。 通过内插从第一增量信号产生较短的循环增量信号，并且较短的循环信号与第二增量信号同步。 绝对模式信号，第二增量信号和同步的第一增量信号表示代码板和检测器部分之间的相对位置关系。

    Modular encoder and method of manufacturing the same
    10.
    发明授权
    Modular encoder and method of manufacturing the same 有权
    模块化编码器及其制造方法

    公开(公告)号：US06107621A

    公开(公告)日：2000-08-22

    申请号：US77115

    申请日：1999-07-29

    申请人： Motokatsu Imai ,  Kou Ohno ,  Yasuhiko Hashimoto ,  Shigeki Yamauchi

    发明人： Motokatsu Imai ,  Kou Ohno ,  Yasuhiko Hashimoto ,  Shigeki Yamauchi

    IPC分类号： G01D5/36 ,  G01D5/347 ,  G01D11/24 ,  G01P3/486 ,  G01D5/34

    CPC分类号： G01D5/34707 ,  G01D11/24 ,  G01D5/3473

    摘要： Each component of a modular encoder can be formed so as to be fixed to a rotary shaft of a rotating unit in a horizontal direction (a direction of a shaft line of a rotary shaft). Consequently, the modular encoder can easily be assembled and fixed, and reliability of fixation can be enhanced at the same time. In addition, the modular encoder has an elliptical shape so that a size thereof can be reduced in a direction in which a dimension should be decreased. Furthermore, if the holding member is rotatably fitted in the locking member in such a manner that the holding member can be rotated around the rotary shaft of the rotating unit, a sign plate can easily be aligned.

    摘要翻译： PCT No.PCT / JP97 / 00736 Sec。 371日期1999年7月29日第 102（e）1999年7月29日PCT 1997年3月6日PCT公布。 出版物WO97 / 33142 日期1997年9月12日模块化编码器的每个部件可以形成为在水平方向（旋转轴的轴线方向）上固定到旋转单元的旋转轴。 因此，可以容易地组装和固定模块化编码器，同时可以提高固定的可靠性。 此外，模块化编码器具有椭圆形状，使得其尺寸可以在尺寸应该减小的方向上减小。 此外，如果保持构件以使得保持构件能够围绕旋转单元的旋转轴旋转的方式可旋转地装配在锁定构件中，则可以容易地对准符号板。