公开(公告)号：US20180097006A1

公开(公告)日：2018-04-05

申请号：US15480983

申请日：2017-04-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung Gil Kim ,  Ji-Hoon Choi ,  Dongkyum Kim ,  Jintae Noh ,  Seulye Kim ,  Hong Suk Kim ,  Phil Ouk Nam ,  Jaeyoung Ahn

IPC: H01L27/11556 ,  H01L29/08 ,  H01L27/11582 ,  H01L29/10

CPC classification number: H01L27/11556 ,  H01L27/1157 ,  H01L27/11582 ,  H01L29/0847 ,  H01L29/1037 ,  H01L29/42324 ,  H01L29/4234 ,  H01L29/42364

Abstract: A semiconductor memory device may include: a stacking structure including a plurality of insulating layers and a plurality of gate electrodes alternately stacked on a substrate; a lower semiconductor pattern that protrudes from the top of the substrate; a vertical insulating pattern that extends in a vertical direction from the substrate and penetrates the stacking structure; and a vertical channel pattern on the inner surface of the vertical insulating pattern and contacting the lower semiconductor pattern, wherein an upper part of the lower semiconductor pattern includes a recess region including a curve-shaped profile, and in the recess region, the outer surface of a lower part of the vertical channel pattern contacts the lower semiconductor pattern along a curve of the recess region.

公开(公告)号：US10263006B2

公开(公告)日：2019-04-16

申请号：US15480983

申请日：2017-04-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung Gil Kim ,  Ji-Hoon Choi ,  Dongkyum Kim ,  Jintae Noh ,  Seulye Kim ,  Hong Suk Kim ,  Phil Ouk Nam ,  Jaeyoung Ahn

IPC: H01L27/11556 ,  H01L27/11582 ,  H01L29/08 ,  H01L29/10 ,  H01L27/1157 ,  H01L29/423

Abstract: A semiconductor memory device may include: a stacking structure including a plurality of insulating layers and a plurality of gate electrodes alternately stacked on a substrate; a lower semiconductor pattern that protrudes from the top of the substrate; a vertical insulating pattern that extends in a vertical direction from the substrate and penetrates the stacking structure; and a vertical channel pattern on the inner surface of the vertical insulating pattern and contacting the lower semiconductor pattern, wherein an upper part of the lower semiconductor pattern includes a recess region including a curve-shaped profile, and in the recess region, the outer surface of a lower part of the vertical channel pattern contacts the lower semiconductor pattern along a curve of the recess region.

公开(公告)号：US11189636B2

公开(公告)日：2021-11-30

申请号：US16870082

申请日：2020-05-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ji Hoon Choi ,  Sung Gil Kim ,  Seulye Kim ,  Jung Ho Kim ,  Hong Suk Kim ,  Phil Ouk Nam ,  Jae Young Ahn ,  Han Jin Lim

IPC: H01L27/11582 ,  H01L23/528 ,  H01L27/11565

Abstract: A semiconductor device includes a stack structure on a substrate, the stack structure including interlayer insulating layers and first gate electrodes alternately stacked on each other, a semiconductor layer in an opening penetrating through the stack structure, a first dielectric layer between the semiconductor layer and the stack structure, and a lower pattern closer to the substrate than to the first gate electrodes in the stack structure, the lower pattern including a first surface facing the first dielectric layer, and a second surface facing the stack structure, the second surface defining an acute angle with the first surface, wherein the first dielectric layer includes a first portion facing the stack structure, and a second portion facing the first surface of the lower pattern, the second portion having a thickness greater than a thickness of the first portion.

公开(公告)号：US10651194B2

公开(公告)日：2020-05-12

申请号：US16142637

申请日：2018-09-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ji Hoon Choi ,  Sung Gil Kim ,  Seulye Kim ,  Jung Ho Kim ,  Hong Suk Kim ,  Phil Ouk Nam ,  Jae Young Ahn ,  Han Jin Lim

IPC: H01L29/792 ,  H01L27/11582 ,  H01L23/528 ,  H01L27/11565

Abstract: A semiconductor device includes a stack structure on a substrate, the stack structure including interlayer insulating layers and first gate electrodes alternately stacked on each other, a semiconductor layer in an opening penetrating through the stack structure, a first dielectric layer between the semiconductor layer and the stack structure, and a lower pattern closer to the substrate than to the first gate electrodes in the stack structure, the lower pattern including a first surface facing the first dielectric layer, and a second surface facing the stack structure, the second surface defining an acute angle with the first surface, wherein the first dielectric layer includes a first portion facing the stack structure, and a second portion facing the first surface of the lower pattern, the second portion having a thickness greater than a thickness of the first portion.

公开(公告)号：US10600806B2

公开(公告)日：2020-03-24

申请号：US16459337

申请日：2019-07-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung Gil Kim ,  Seul Ye Kim ,  Hong Suk Kim ,  Jin Tae Noh ,  Ji Hoon Choi ,  Jae Young Ahn

IPC: H01L27/11582 ,  H01L23/532 ,  H01L27/108 ,  H01L23/00 ,  H01L29/06 ,  H01L25/065 ,  H01L27/11565

Abstract: A stack structure includes conductive layer patterns and interlayer insulating layer patterns alternately stacked on one another. A channel hole penetrates the stack structure. A dielectric layer is disposed on a sidewall of the channel hole. A channel layer is disposed on the dielectric layer and in the channel hole. A passivation layer is disposed on the channel layer and in the channel hole. The channel layer is interposed between the passivation layer and the dielectric layer. An air gap is surrounded by the passivation layer. A width of the air gap is larger than a width of the passivation layer.

公开(公告)号：US11737277B2

公开(公告)日：2023-08-22

申请号：US17523014

申请日：2021-11-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ji Hoon Choi ,  Sung Gil Kim ,  Seulye Kim ,  Jung Ho Kim ,  Hong Suk Kim ,  Phil Ouk Nam ,  Jae Young Ahn ,  Han Jin Lim

IPC: H10B43/27 ,  H10B43/10 ,  H01L23/528

CPC classification number: H10B43/27 ,  H01L23/5283 ,  H10B43/10

Abstract: A semiconductor device includes a stack structure on a substrate, the stack structure including interlayer insulating layers and first gate electrodes alternately stacked on each other, a semiconductor layer in an opening penetrating through the stack structure, a first dielectric layer between the semiconductor layer and the stack structure, and a lower pattern closer to the substrate than to the first gate electrodes in the stack structure, the lower pattern including a first surface facing the first dielectric layer, and a second surface facing the stack structure, the second surface defining an acute angle with the first surface, wherein the first dielectric layer includes a first portion facing the stack structure, and a second portion facing the first surface of the lower pattern, the second portion having a thickness greater than a thickness of the first portion.

公开(公告)号：US20190206886A1

公开(公告)日：2019-07-04

申请号：US16298247

申请日：2019-03-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung Gil Kim ,  Ji-Hoon Choi ,  Dongkyum Kim ,  Jintae Noh ,  Seulye Kim ,  Hong Suk Kim ,  Phil Ouk Nam ,  Jaeyoung Ahn

IPC: H01L27/11556 ,  H01L29/10 ,  H01L27/1157 ,  H01L27/11582 ,  H01L29/08

CPC classification number: H01L27/11556 ,  H01L27/1157 ,  H01L27/11582 ,  H01L29/0847 ,  H01L29/1037 ,  H01L29/42324 ,  H01L29/4234 ,  H01L29/42364

Abstract: A semiconductor memory device may include: a stacking structure including a plurality of insulating layers and a plurality of gate electrodes alternately stacked on a substrate; a lower semiconductor pattern that protrudes from the top of the substrate; a vertical insulating pattern that extends in a vertical direction from the substrate and penetrates the stacking structure; and a vertical channel pattern on the inner surface of the vertical insulating pattern and contacting the lower semiconductor pattern, wherein an upper part of the lower semiconductor pattern includes a recess region including a curve-shaped profile, and in the recess region, the outer surface of a lower part of the vertical channel pattern contacts the lower semiconductor pattern along a curve of the recess region.

公开(公告)号：US10090323B2

公开(公告)日：2018-10-02

申请号：US15484339

申请日：2017-04-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ji Hoon Choi ,  Sung Gil Kim ,  Seulye Kim ,  Jung Ho Kim ,  Hong Suk Kim ,  Phil Ouk Nam ,  Jae Young Ahn ,  Han Jin Lim

IPC: H01L29/792 ,  H01L27/11582 ,  H01L23/528 ,  H01L27/11565

Abstract: A semiconductor device includes a stack structure on a substrate, the stack structure including interlayer insulating layers and first gate electrodes alternately stacked on each other, a semiconductor layer in an opening penetrating through the stack structure, a first dielectric layer between the semiconductor layer and the stack structure, and a lower pattern closer to the substrate than to the first gate electrodes in the stack structure, the lower pattern including a first surface facing the first dielectric layer, and a second surface facing the stack structure, the second surface defining an acute angle with the first surface, wherein the first dielectric layer includes a first portion facing the stack structure, and a second portion facing the first surface of the lower pattern, the second portion having a thickness greater than a thickness of the first portion.