Semiconductor device
    1.
    发明授权

    公开(公告)号:US12211846B2

    公开(公告)日:2025-01-28

    申请号:US18415863

    申请日:2024-01-18

    Abstract: A semiconductor device includes a substrate including a first region, and a second region, a first gate structure and a second gate structure on the substrate of the first region, a third gate structure and a fourth gate structure on the substrate of the second region, a first interlayer insulating film on the substrate of the first region and including a first lower interlayer insulating film and a first upper interlayer insulating film, a second interlayer insulating film on the substrate of the second region and including a second lower interlayer insulating film and a second upper interlayer insulating film, a first contact between the first gate structure and the second gate structure and within the first interlayer insulating film, and a second contact formed between the third gate structure and the fourth gate structure and within the second interlayer insulating film.

    SEMICONDUCTOR DEVICE
    5.
    发明申请

    公开(公告)号:US20240413081A1

    公开(公告)日:2024-12-12

    申请号:US18652067

    申请日:2024-05-01

    Abstract: A semiconductor device includes a via pattern in a first interlayer insulating film, and a wiring pattern that extends in a first direction and is on the first interlayer insulating film and the via pattern. The wiring pattern includes a lower wiring line and an upper wiring line on the lower wiring line, where the lower wiring line and the upper wiring line are stacked in a second direction, where the lower wiring line is between the via pattern and the upper wiring line and is on an upper surface of the via pattern, where a first portion of the lower wiring line is on the upper surface of the via pattern and has a first thickness, and where a second portion of the lower wiring line is on an upper surface of the first interlayer insulating film and has a second thickness.

    Semiconductor device
    6.
    发明授权

    公开(公告)号:US10763254B2

    公开(公告)日:2020-09-01

    申请号:US15333545

    申请日:2016-10-25

    Abstract: A semiconductor device includes a substrate including a first region, and a second region, a first gate structure and a second gate structure on the substrate of the first region, a third gate structure and a fourth gate structure on the substrate of the second region, a first interlayer insulating film on the substrate of the first region and including a first lower interlayer insulating film and a first upper interlayer insulating film, a second interlayer insulating film on the substrate of the second region and including a second lower interlayer insulating film and a second upper interlayer insulating film, a first contact between the first gate structure and the second gate structure and within the first interlayer insulating film, and a second contact formed between the third gate structure and the fourth gate structure and within the second interlayer insulating film.

    SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

    公开(公告)号:US20240038841A1

    公开(公告)日:2024-02-01

    申请号:US18188399

    申请日:2023-03-22

    CPC classification number: H01L29/0673 H01L29/42392 H01L29/775 H01L29/41733

    Abstract: There is provided a semiconductor device capable of capable of improving element performance and reliability. A semiconductor device includes a lower conductive pattern disposed on a substrate, an upper conductive pattern disposed on the lower conductive pattern, and a first plug pattern disposed between the lower conductive pattern and the upper conductive pattern and connected to the lower conductive pattern and the upper conductive pattern. The first plug pattern includes a first barrier pattern that defines a first plug recess and a first plug metal pattern that fills the first plug recess, and the first plug metal pattern includes a first molybdenum pattern and a first tungsten pattern disposed on the first molybdenum pattern.

Patent Agency Ranking