Abstract:
Provided are a hybrid matcher capable of precisely performing impedance matching at a high speed when RF power is applied with a multi-level pulse in a facility using RF plasma, and an RF matching system including the hybrid matcher. The hybrid matcher includes a matching circuit in which a plurality of variable element-switch sets are connected to each other in parallel, the variable element-switch sets each including a variable impedance element and a switch connected to the variable impedance element in series and electrically operating therewith, a sensor disposed at a front stage of the matching circuit and configured to measure a current and a voltage of radio frequency (RF) power applied from an RF generator, a variable element driver configured to drive the variable impedance element, a switch driver configured to drive the switch, and a controller configured to control the variable element driver and the switch driver.
Abstract:
A display driving circuit includes a control logic, a source amplifier, and first and second switching elements. The source amplifier includes a first input terminal, a second input terminal, and an output terminal, and amplifies a pixel voltage for displaying an image on a display panel and provides the amplified pixel voltage to a pixel through a data line. The first switching element is connected between the first input terminal and the output terminal, and the second switching element is connected between the first input terminal and the sensing line. The control logic controls the first switching element and the second switching element such that the source amplifier compares a sample voltage that is input to the first input terminal through a sensing line with a comparison voltage input to the second input terminal and outputs comparison data based on the comparison.
Abstract:
A touch sensing system is provided. The touch sensing system includes a touch panel including touch sensors arranged in a grid along row and column directions; a touch controller including at least one transmission circuit to transmit a signal to the touch sensors and at least one reception circuit to detect a signal from the touch sensors; and a switching circuit to selectively connect each of the touch sensors to the at least one transmission circuit and the at least one reception circuit in accordance with an operation mode. The switching circuit connects each of the touch sensors to the at least one reception circuit in a touch mode and connects a first portion of the touch sensors to the at least one reception circuit and a second portion of the touch sensors to the at least one transmission circuit in a proximity mode.
Abstract:
The present disclosure relates to a pre-5th-Generation (5G) or 5G communication system to be provided for supporting higher data rates Beyond 4th-Generation (4G) communication system such as Long Term Evolution (LTE). An apparatus that monitors a base station in a wireless communication system and a method therefor are provided. The method of operating the apparatus includes detecting an anomaly occurring in the base station, determining at least one measure, based on the detected result, and performing or outputting the determined at least one measure.
Abstract:
Disclosed is an operating method of an electronic apparatus. The method includes measuring the load rate of the electronic apparatus that operates at the first driving frequency level. The method also includes determining a second driving frequency level based on the measured load rate. The method further includes determining whether or not to change the first driving frequency level into the second driving frequency level after the operational duration time of the first driving frequency level. The method includes based on determining the change from the first driving frequency level to the second driving frequency level, controlling to operate at the first driving frequency level or the second driving frequency level.
Abstract:
A display device includes a pixel array including a plurality of pixels connected to a plurality of source lines, a voltage generator configured to generate a reference voltage, and a source driver configured to output a first source signal corresponding to a first source line among the plurality of source lines, receive a first return signal corresponding to the first source signal through a second source line positioned adjacent to the first source line, and generate a first count value based on a first comparison result of the first return signal and the reference voltage.
Abstract:
A substrate support device includes a chuck plate, a shaft connected to a center lower end of the chuck plate, a heater unit provided inside the chuck plate, an electrode unit provided inside the chuck plate, and provided on the heater unit, a jumper unit provided inside the chuck plate, arranged between the electrode unit and the heater unit, and electrically connected to the electrode unit to supply power to the electrode unit, and a power control unit, wherein the electrode unit includes a center electrode and a first electrode arranged in a ring shape around the center electrode, wherein the jumper unit includes a first jumper connected to the first electrode and a center jumper connected to the center electrode, and wherein the first jumper includes a first connection jumper, and a first inclined jumper electrically connecting the first jumper.
Abstract:
A plasma processing apparatus includes a chamber providing a space for processing a substrate, a substrate stage configured to support the substrate within the chamber and including a lower electrode, an upper electrode facing the lower electrode, a focus ring in or on an upper peripheral region of the substrate stage to surround the substrate, and a plasma adjustment assembly in at least one of a first position between the upper electrode and the lower electrode and a second position between the focus ring and the lower electrode, the plasma adjustment assembly including a photoreactive material layer and a plurality of light sources configured to irradiate light onto a local region of the photoreactive material layer. A capacitance of the local region is changed as the light is irradiated to the local region.
Abstract:
An electrostatic chuck includes a base, a dielectric plate on the base, a chuck electrode in the dielectric plate, and a lower heater section including lower heaters in the dielectric plate between the chuck electrode and the base, and a lower ground electrode between the lower heaters and the base. The chuck further includes an upper heater section including upper heaters between the lower heaters and the chuck electrode, and a upper ground electrode between the upper heaters and the lower heaters, and a plurality of via contact electrodes connecting the upper ground electrode into the lower ground electrode.
Abstract:
A touch processing circuit includes: a front-end circuit including an amplifier, a first capacitor, a second capacitor, a third capacitor, and a plurality of switches each having two ends that are selectively connected each other, the front-end circuit being configured to process an input signal varying according to a touch; and a controller controlling the plurality of switches so that the front-end circuit is configured as a first circuit that accumulates deviation of the input signal between a first phase and a second phase during an integration period and a second circuit that converts the accumulated deviation into a digital signal during a conversion period.