SEMICONDUCTOR PROCESSING APPARATUS HAVING GAS SPRAY UNIT
    1.
    发明申请
    SEMICONDUCTOR PROCESSING APPARATUS HAVING GAS SPRAY UNIT 审中-公开
    具有气体喷雾装置的半导体加工装置

    公开(公告)号:US20160194756A1

    公开(公告)日:2016-07-07

    申请号:US14972598

    申请日:2015-12-17

    Abstract: A semiconductor processing apparatus includes a susceptor supporting a processing target, a gas box spaced apart from the susceptor, the gas box including a concave region facing an upper surface of the processing target, and an inclined surface at an outer side of the concave region, an inclination angle of the inclined surface of the gas box relative to an upper surface of the susceptor is more than 10° and less than 35°, and a shower head within the concave region of the gas box.

    Abstract translation: 一种半导体处理装置,包括支撑处理对象的基座,与基座间隔开的气箱,包括面对加工对象的上表面的凹部的气体盒和凹部的外侧的倾斜面, 气箱的倾斜面相对于基座的上表面的倾斜角度大于10°且小于35°,以及在气箱的凹入区域内的喷头。

    LIGHT EMITTING DIODE LIGHTING MODULE
    4.
    发明申请
    LIGHT EMITTING DIODE LIGHTING MODULE 有权
    发光二极管照明模块

    公开(公告)号:US20130083525A1

    公开(公告)日:2013-04-04

    申请号:US13645056

    申请日:2012-10-04

    Abstract: A light emitting diode (LED) lighting module is provided including an LED array, and at least one of a diffusing portion and a reflecting portion. The LED array, equipped with at least one LED, may include a side wall which surrounds the at least one LED . The diffusing portion may be detachably coupled to the LED array and may include a diffusion plate which diffuses light emitted from the at least one LED The reflecting portion may be detachably coupled to one of the LED array and the diffusing portion and may reflect light emitted from the at least one LED. The LED array may be selectively coupled with the diffusing portion, the reflecting portion, or both the diffusing portion and the reflecting portion.

    Abstract translation: 提供了一种发光二极管(LED)照明模块,其包括LED阵列,以及漫射部分和反射部分中的至少一个。 配备有至少一个LED的LED阵列可以包括围绕至少一个LED的侧壁。 漫射部分可以可拆卸地耦合到LED阵列,并且可以包括漫射板,其漫射从至少一个LED发射的光。反射部分可以可拆卸地耦合到LED阵列和漫射部分中的一个,并且可以反射从 所述至少一个LED。 LED阵列可以选择性地与扩散部分,反射部分或扩散部分和反射部分耦合。

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