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公开(公告)号:US20240203793A1
公开(公告)日:2024-06-20
申请号:US18141313
申请日:2023-04-28
Applicant: Samsung Electronics Co., Ltd.
Inventor: Tae Sun Kim , Wonhyuk Hong , Jongjin Lee , Buhyun Ham , Kang-ill Seo
IPC: H01L21/768 , H01L21/74
CPC classification number: H01L21/76897 , H01L21/74 , H01L21/76834 , H01L21/76885
Abstract: In order to achieve higher contact quality for backside power distribution networks, provided is a backside contact to a semiconductor device having a positive slope and a dielectric sidewall liner, and methods for making the same.
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公开(公告)号:US20230275021A1
公开(公告)日:2023-08-31
申请号:US17738393
申请日:2022-05-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: BYOUNGHAK HONG , Jeonghyuk Yim , Inchan Hwang , Gilhwan Son , Seungyoung Lee , Saehan Park , Janggeun Lee , Myunghoon Jung , Seungchan Yun , Buhyun Ham , Kang-ILL Seo
IPC: H01L23/528 , H01L23/522 , H01L21/302 , H01L21/8234
CPC classification number: H01L23/5286 , H01L23/5283 , H01L23/5226 , H01L21/302 , H01L21/823475
Abstract: Integrated circuit devices may include a transistor, a passive device, a substrate extending between the transistor and the passive device and a power rail. The passive device may be spaced apart from the substrate. Each of the passive device and the power rail may have a first surface facing the substrate, and the first surface of the passive device is closer than the first surface of the power rail to the substrate.
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