公开(公告)号：US11690278B2

公开(公告)日：2023-06-27

申请号：US16406250

申请日：2019-05-08

Applicant: Samsung Display Co., Ltd.

Inventor： Joon Hyung Kim ,  Young Su Chae ,  Woo Hyun Kim ,  Seung Jun Lee

IPC: H01L51/00 ,  H01S3/16 ,  H01S3/23 ,  G02B27/10 ,  H01L51/56 ,  H01L27/32 ,  B23K26/342

CPC classification number: H01L51/003 ,  B23K26/342 ,  G02B27/10 ,  H01L27/3244 ,  H01L51/0097 ,  H01L51/56 ,  H01S3/1618 ,  H01S3/1643 ,  H01S3/2383 ,  H01L2227/326 ,  H01L2251/5338

Abstract: A laser ablation apparatus includes: a laser beam generator including beam sources for generating laser beams, the laser beam generator using a solid-state laser; an output beam generator for generating an output beam using the laser beams; and a substrate stage including at least one stage on which a carrier substrate formed on the front of a panel substrate is disposed. The output beam generator may include: mixers for generating mixed laser beams having two linear-polarizations orthogonal to each other by mixing the laser beams; and a photo molding machine for generating the output beam using the mixed laser beams.

公开(公告)号：US09259910B2

公开(公告)日：2016-02-16

申请号：US14248983

申请日：2014-04-09

Applicant: Samsung Display Co. Ltd.

Inventor： Seung Jun Lee ,  Joon Hyung Kim

IPC: B32B38/10 ,  B32B43/00 ,  B32B37/00 ,  B32B38/18

CPC classification number: B32B43/006 ,  B32B37/0046 ,  B32B38/10 ,  B32B38/1858 ,  B32B2310/0881 ,  B32B2457/08 ,  B32B2457/20 ,  H01L2221/683 ,  Y10T156/11 ,  Y10T156/1132 ,  Y10T156/1168 ,  Y10T156/1184 ,  Y10T156/19 ,  Y10T156/1944 ,  Y10T156/1967

Abstract: Provided are a substrate separation apparatus and method. The substrate separation apparatus includes: an upper transfer part which fixes the upper substrate and transfers the upper substrate in a positive X-axis direction in an XY coordinate system composed of an X axis and a Y axis intersecting each other; and a lower transfer part which is installed under the upper transfer part with a gap therebetween and fixes and transfers the lower substrate, wherein the lower transfer part includes: a lower holding unit on which the lower substrate is placed; and a lower guide unit which includes path guides for guiding movement of the lower holding unit, wherein the path guides include a first path guide which is parallel to the X axis and a second path guide which is continuous with the first path guide and contacts a straight line having a negative slope in the XY coordinate system.

Abstract translation: 提供了一种基板分离装置和方法。 基板分离装置包括：上部传送部，其固定上部基板，并在由X轴和Y轴相交的XY轴构成的XY坐标系中以正X轴方向传送上基板; 以及下部传送部件，其安装在上转印部分之下，其间具有间隙，并固定和传送下基板，其中下转印部分包括：下保持单元，下基板放置在下保持单元上; 以及下引导单元，其包括用于引导下保持单元的运动的路径引导件，其中，路径引导件包括平行于X轴的第一路径引导件和与第一路径引导件连续的第二路径引导件 在XY坐标系中具有负斜率的直线。

公开(公告)号：US09125295B2

公开(公告)日：2015-09-01

申请号：US14063108

申请日：2013-10-25

Applicant: Samsung Display Co., Ltd.

Inventor： Seung Jun Lee ,  Young Woo Lee ,  Joon Hyung Kim

IPC: B32B38/10 ,  H05K3/00 ,  H01L21/683 ,  H01L21/70 ,  H01L51/00 ,  B32B38/18 ,  B32B43/00 ,  G02F1/13 ,  G02F1/1333

CPC classification number: H05K3/007 ,  B32B38/10 ,  B32B38/1858 ,  B32B43/006 ,  B32B2457/20 ,  B32B2457/206 ,  G02F1/1303 ,  G02F1/133305 ,  H01L21/6835 ,  H01L21/707 ,  H01L51/003 ,  H05K2203/0147 ,  Y10T156/1168 ,  Y10T156/1184 ,  Y10T156/1961 ,  Y10T156/1967 ,  Y10T156/1978

Abstract: An apparatus for separating a first substrate and a second substrate which are in contact with each other, includes an upper transfer part which fixes the first substrate and transfers the first substrate in a positive X-axis direction in an XY coordinate system comprised of an X axis and an Y axis which perpendicularly intersect each other and a lower transfer part which is disposed under the upper transfer part with a gap therebetween and fixes and transfers the second substrate, wherein the lower transfer part comprises a first transfer section which transfers the second substrate in the positive X-axis direction, and a second transfer section which transfers the second substrate in the positive X-axis direction as well as a negative Y-axis direction.

Abstract translation: 一种用于分离彼此接触的第一基板和第二基板的设备包括：上转印部，其固定第一基板，并将X基准方向的XY轴坐标系的X轴方向转印 轴和彼此垂直相交的Y轴以及设置在上部转印部下方的下部转印部，并且固定并转印第二基板，其中，下部转印部包括第一转印部，该第二转印部转印第二基板 以及在正X轴方向和负Y轴方向上传送第二基板的第二传送部。

公开(公告)号：US11887998B2

公开(公告)日：2024-01-30

申请号：US17966256

申请日：2022-10-14

Applicant: Samsung Display Co., LTD.

Inventor： Soo Young Jung ,  Joon Hyung Kim ,  Jeong Mok Kim ,  Chung Hyuk Lee ,  Sung Jae Jung

IPC: H01L27/12 ,  H01L21/67 ,  H01L21/02 ,  H01L29/786 ,  H01L29/66 ,  H01L21/687 ,  H10K59/121

CPC classification number: H01L27/1274 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/02675 ,  H01L21/67115 ,  H01L21/68735 ,  H01L27/1222 ,  H01L29/66757 ,  H01L29/78675 ,  H10K59/1213

Abstract: A manufacturing apparatus and a manufacturing method are provided. A manufacturing apparatus includes a chamber, and a stage disposed in the chamber. The stage includes an upper surface on which a target substrate is disposed, a lower surface opposite to the upper surface, a first side surface extending between the upper surface and the lower surface in a first direction, and a second side surface extending between the upper surface and the lower surface in a second direction perpendicular to the first direction. The first side surface is in a round shape, and at least a portion of the first side surface is convex toward an outside of the stage.

公开(公告)号：US11488991B2

公开(公告)日：2022-11-01

申请号：US16938426

申请日：2020-07-24

Applicant: Samsung Display Co., LTD.

Inventor： Soo Young Jung ,  Joon Hyung Kim ,  Jeong Mok Kim ,  Chung Hyuk Lee ,  Sung Jae Jung

IPC: H01L27/12 ,  H01L21/67 ,  H01L21/02 ,  H01L29/786 ,  H01L29/66 ,  H01L21/687 ,  H01L27/32

Abstract: A manufacturing apparatus and a manufacturing method are provided. A manufacturing apparatus includes a chamber, and a stage disposed in the chamber. The stage includes an upper surface on which a target substrate is disposed, a lower surface opposite to the upper surface, a first side surface extending between the upper surface and the lower surface in a first direction, and a second side surface extending between the upper surface and the lower surface in a second direction perpendicular to the first direction. The first side surface is in a round shape, and at least a portion of the first side surface is convex toward an outside of the stage.