公开(公告)号：US11887998B2

公开(公告)日：2024-01-30

申请号：US17966256

申请日：2022-10-14

Applicant: Samsung Display Co., LTD.

Inventor： Soo Young Jung ,  Joon Hyung Kim ,  Jeong Mok Kim ,  Chung Hyuk Lee ,  Sung Jae Jung

IPC: H01L27/12 ,  H01L21/67 ,  H01L21/02 ,  H01L29/786 ,  H01L29/66 ,  H01L21/687 ,  H10K59/121

CPC classification number: H01L27/1274 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/02675 ,  H01L21/67115 ,  H01L21/68735 ,  H01L27/1222 ,  H01L29/66757 ,  H01L29/78675 ,  H10K59/1213

Abstract: A manufacturing apparatus and a manufacturing method are provided. A manufacturing apparatus includes a chamber, and a stage disposed in the chamber. The stage includes an upper surface on which a target substrate is disposed, a lower surface opposite to the upper surface, a first side surface extending between the upper surface and the lower surface in a first direction, and a second side surface extending between the upper surface and the lower surface in a second direction perpendicular to the first direction. The first side surface is in a round shape, and at least a portion of the first side surface is convex toward an outside of the stage.

公开(公告)号：US11488991B2

公开(公告)日：2022-11-01

申请号：US16938426

申请日：2020-07-24

Applicant: Samsung Display Co., LTD.

Inventor： Soo Young Jung ,  Joon Hyung Kim ,  Jeong Mok Kim ,  Chung Hyuk Lee ,  Sung Jae Jung

IPC: H01L27/12 ,  H01L21/67 ,  H01L21/02 ,  H01L29/786 ,  H01L29/66 ,  H01L21/687 ,  H01L27/32

Abstract: A manufacturing apparatus and a manufacturing method are provided. A manufacturing apparatus includes a chamber, and a stage disposed in the chamber. The stage includes an upper surface on which a target substrate is disposed, a lower surface opposite to the upper surface, a first side surface extending between the upper surface and the lower surface in a first direction, and a second side surface extending between the upper surface and the lower surface in a second direction perpendicular to the first direction. The first side surface is in a round shape, and at least a portion of the first side surface is convex toward an outside of the stage.