-
公开(公告)号：US20180065371A1
公开(公告)日：2018-03-08
申请号：US15812960
申请日：2017-11-14
发明人： Mauro Cattaneo , Carlo Luigi Prelini , Lorenzo Colombo , Dino Faralli , Alessandra Sciutti , Lorenzo Tentori
CPC分类号： B41J2/1626 , B41J2/01 , B41J2/135 , B41J2/16 , B41J2/1607 , B41J2/161 , B41J2/162 , B41J2/1621 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , Y10T29/49401
摘要： A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.
-
2.发明申请ASSEMBLY FOR A MEMS ENVIRONMENTAL SENSOR DEVICE HAVING IMPROVED RESISTANCE, AND CORRESPONDING MANUFACTURING PROCESS 审中-公开具有改进电阻的MEMS环境传感器装置的组装以及相应的制造工艺公开(公告)号：US20150014798A1
公开(公告)日：2015-01-15
申请号：US14327272
申请日：2014-07-09
CPC分类号： B81B3/00 , B81B7/0058 , B81B2201/0257 , B81B2201/0264 , B81B2201/0278 , B81B2203/0127 , B81C1/00 , B81C2203/0109 , G01F1/00 , G01H17/00 , G01K1/00 , G01L1/00 , H01L2224/48145 , H01L2224/73265 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H01L2924/00012
摘要： Described herein is an assembly for a MEMS sensor device, which envisages: a first body made of semiconductor material, integrating a micromechanical detection structure at a first main face thereof; a cap element, set stacked on the first main face of the first body, above the micromechanical detection structure; and an adhesion structure set between the first body and the cap element, defining a gap in a position corresponding to the micromechanical detection structure. At least one first opening is defined through the adhesion structure in fluidic communication with the gap.
摘要翻译： 这里描述的是一种用于MEMS传感器装置的组件，其设想：由半导体材料制成的第一主体，在其第一主面处集成微机械检测结构; 设置在第一主体的第一主面上的盖元件，位于微机械检测结构的上方; 以及设置在第一主体和盖元件之间的粘合结构，在对应于微机械检测结构的位置中限定间隙。 通过与间隙流体连通的粘合结构限定至少一个第一开口。
-
公开(公告)号：US20180236447A1
公开(公告)日：2018-08-23
申请号：US15960509
申请日：2018-04-23
CPC分类号： B01L3/502715 , B01L3/502707 , B01L2300/0627 , B01L2300/0848 , B01L2300/12 , G01F1/6845 , G01F1/6888 , G01K7/02 , G01K7/021 , H01L35/32 , H01L35/325
摘要： A microfluidic-based sensor, comprising: a semiconductor body, having a first and a second side opposite to one another in a direction; a buried channel, extending within the semiconductor body; a structural layer, of dielectric or insulating material, formed over the first side of the semiconductor body at least partially suspended above the buried channel; and a first thermocouple element, including a first strip, of a first electrical conductive material, and a second strip, of a second electrical conductive material different from the first electrical conductive material, electrically coupled to the first strip. The first thermocouple element is buried in the structural layer and partially extends over the buried channel at a first location. A corresponding manufacturing method is disclosed.
-
公开(公告)号：US09849674B2
公开(公告)日：2017-12-26
申请号：US15179096
申请日：2016-06-10
发明人： Mauro Cattaneo , Carlo Luigi Prelini , Lorenzo Colombo , Dino Faralli , Alessandra Sciutti , Lorenzo Tentori
CPC分类号： B41J2/1626 , B41J2/01 , B41J2/135 , B41J2/16 , B41J2/1607 , B41J2/161 , B41J2/162 , B41J2/1621 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , Y10T29/49401
摘要： A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.
-
公开(公告)号：US20170203568A9
公开(公告)日：2017-07-20
申请号：US14523625
申请日：2014-10-24
发明人： Dino Faralli , Michele Palmieri
IPC分类号： B41J2/16
CPC分类号： B41J2/162 , B41J2/1433 , B41J2/1601 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2/164 , B41J2/1642 , B41J2002/14475 , Y10T29/49401
摘要： A nozzle plate for a fluid-ejection device, comprising: a first substrate made of semiconductor material, having a first side and a second side; a structural layer extending on the first side of the first substrate, the structural layer having a first side and a second side, the second side of the structural layer facing the first side of the first substrate; at least one first through hole, having an inner surface, extending through the structural layer, the first through hole having an inlet section corresponding to the first side of the structural layer and an outlet section corresponding to the second side of the structural layer; a narrowing element adjacent to the surface of the first through hole, and including a tapered portion such that the inlet section of the first through hole has an area larger than a respective area of the outlet section of the first through hole.
-
6.发明申请公开(公告)号：US20140159717A1
公开(公告)日：2014-06-12
申请号：US14102899
申请日：2013-12-11
发明人： Dario Paci , Dino Faralli , Andrea Picco
CPC分类号： G01R33/09 , G01R33/0011 , G01R33/0052 , G01R33/096
摘要： An integrated magnetoresistive sensor, formed in a chip including a substrate having a surface and an insulating region covering the surface of the substrate. A magnetoresistor, of a first ferromagnetic material, is formed in the insulating region and has a sensitivity plane parallel to the surface. A concentrator of a second ferromagnetic material is formed in the substrate and has at least one arm extending in a transverse direction to the sensitivity plane. The arm has one end in contact with the magnetoresistor.
摘要翻译： 一种集成磁阻传感器，其形成在包括具有覆盖基板的表面的表面和绝缘区域的基板的芯片中。 第一铁磁材料的磁阻电阻器形成在绝缘区域中并且具有平行于表面的灵敏度平面。 第二铁磁材料的集中器形成在基板中，并且具有至少一个在横向方向上延伸到灵敏度平面的臂。 臂的一端与磁电阻接触。
-
公开(公告)号：US12058938B2
公开(公告)日：2024-08-06
申请号：US17722713
申请日：2022-04-18
发明人： Maria Fortuna Bevilacqua , Flavio Francesco Villa , Rossana Scaldaferri , Valeria Casuscelli , Andrea Di Matteo , Dino Faralli
IPC分类号： H10N30/30 , H02N2/18 , H10N30/01 , H10N30/03 , H10N30/06 , H10N30/082 , H10N30/853 , H10N30/87 , H10N30/88
CPC分类号： H10N30/308 , H02N2/186 , H10N30/01 , H10N30/03 , H10N30/06 , H10N30/082 , H10N30/304 , H10N30/8554 , H10N30/87 , H10N30/88
摘要： A process for manufacturing a MEMS piezoelectric device includes: forming a membrane at a first surface of wafer of semiconductor material further having a second surface (the first and second surfaces being opposite along a vertical axis and extending parallel to a horizontal plane formed by first and second horizontal axes); forming a cavity within the wafer so that the membrane is suspended above the cavity; forming a piezoelectric material layer above a first surface of the membrane; forming an electrode arrangement in contact with the piezoelectric material layer; and forming a proof mass coupled to a second surface of the membrane opposite to the first surface along the vertical axis. The proof mass deforms the membrane in response to environmental mechanical vibrations. Forming the proof mass includes forming a connection element at a central position between the membrane and the proof mass in the direction of the vertical axis.
-
公开(公告)号：US10682645B2
公开(公告)日：2020-06-16
申请号：US15960509
申请日：2018-04-23
摘要： A microfluidic-based sensor, comprising: a semiconductor body, having a first and a second side opposite to one another in a direction; a buried channel, extending within the semiconductor body; a structural layer, of dielectric or insulating material, formed over the first side of the semiconductor body at least partially suspended above the buried channel; and a first thermocouple element, including a first strip, of a first electrical conductive material, and a second strip, of a second electrical conductive material different from the first electrical conductive material, electrically coupled to the first strip. The first thermocouple element is buried in the structural layer and partially extends over the buried channel at a first location. A corresponding manufacturing method is disclosed.
-
公开(公告)号：US09976914B2
公开(公告)日：2018-05-22
申请号：US14308470
申请日：2014-06-18
CPC分类号： B01L3/502715 , B01L3/502707 , B01L2300/0627 , B01L2300/0848 , B01L2300/12 , G01F1/6845 , G01F1/6888 , G01K7/02 , G01K7/021 , H01L35/32 , H01L35/325 , Y10T29/41
摘要： A microfluidic-based sensor, comprising: a semiconductor body, having a first and a second side opposite to one another in a direction; a buried channel, extending within the semiconductor body; a structural layer, of dielectric or insulating material, formed over the first side of the semiconductor body at least partially suspended above the buried channel; and a first thermocouple element, including a first strip, of a first electrical conductive material, and a second strip, of a second electrical conductive material different from the first electrical conductive material, electrically coupled to the first strip. The first thermocouple element is buried in the structural layer and partially extends over the buried channel at a first location. A corresponding manufacturing method is disclosed.
-
10.发明授权Magnetoresistive sensor integrated in a chip for detecting magnetic fields perpendicular to the chip and manufacturing process thereof 有权集成在用于检测垂直于芯片的磁场的芯片中的磁阻传感器及其制造方法公开(公告)号：US09568566B2
公开(公告)日：2017-02-14
申请号：US14102899
申请日：2013-12-11
发明人： Dario Paci , Dino Faralli , Andrea Picco
CPC分类号： G01R33/09 , G01R33/0011 , G01R33/0052 , G01R33/096
摘要： An integrated magnetoresistive sensor, formed in a chip including a substrate having a surface and an insulating region covering the surface of the substrate. A magnetoresistor, of a first ferromagnetic material, is formed in the insulating region and has a sensitivity plane parallel to the surface. A concentrator of a second ferromagnetic material is formed in the substrate and has at least one arm extending in a transverse direction to the sensitivity plane. The arm has one end in contact with the magnetoresistor.
摘要翻译： 一种集成磁阻传感器，其形成在包括具有覆盖基板的表面的表面和绝缘区域的基板的芯片中。 第一铁磁材料的磁阻电阻器形成在绝缘区域中并且具有平行于表面的灵敏度平面。 第二铁磁材料的集中器形成在基板中，并且具有至少一个在横向方向上延伸到灵敏度平面的臂。 臂的一端与磁电阻接触。
-
-
-
-
-
-
-
-
-
搜索结果
22 条记录 (耗时 0.016 秒)
