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公开(公告)号:US20200033309A1
公开(公告)日:2020-01-30
申请号:US16458561
申请日:2019-07-01
Applicant: STMicroelectronics PTE LTD
Inventor: Fangxing YUAN , Ravi SHANKAR , Olivier LE NEEL
Abstract: The present disclosure is directed to a selective multi-gas sensor device that detects when a high concentration level of a particular gas, such as methane, carbon monoxide, and/or ethanol, is present. The selective multi-gas sensor device detects and identifies a particular gas based on a ratio between a sensitivity of a gas sensitive material at a first temperature and a sensitivity of the gas sensitive material at a second temperature.
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公开(公告)号:US20180156747A1
公开(公告)日:2018-06-07
申请号:US15367081
申请日:2016-12-01
Applicant: STMICROELECTRONICS PTE LTD
Inventor: Olivier LE NEEL , Alexandre LE ROCH , Ayoub LAHLALIA , Ravi SHANKAR
CPC classification number: G01N27/18 , G01N33/0047
Abstract: The present disclosure is directed to a gas sensor that includes an active sensor area that is exposed to an environment for detection of elements. The gas sensor may be an air quality sensor that can be fixed in position or carried by a user. The gas sensor includes a heater formed above chamber. The gas sensor includes an active sensor layer above the heater that forms the active sensor area. The gas sensor can include a passive conductive layer, such as a hotplate that further conducts and distributes heat from the heater to the active sensor area. The heater can include a plurality of extensions. The heater can also include a first conductive layer and a second conductive layer on the first conductive layer where the second conductive layer includes a plurality of openings to increase an amount of heat and to more evenly distribute heat from the heater to the active sensor area.
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公开(公告)号:US20180140234A1
公开(公告)日:2018-05-24
申请号:US15873557
申请日:2018-01-17
Applicant: STMICROELECTRONICS PTE LTD
Inventor: Olivier LE NEEL , Suman CHERIAN , Calvin LEUNG
IPC: A61B5/1473 , G01N27/327 , A61B5/145 , A61B5/1468
CPC classification number: A61B5/1473 , A61B5/14532 , A61B5/1468 , G01N27/3272
Abstract: A universal electrochemical micro-sensor can be used either as a biosensor or an environmental sensor. Because of its small size and flexibility, the micro-sensor is suitable for continuous use to monitor fluids within a live subject, or as an environmental monitor. The micro-sensor can be formed on a reusable glass carrier substrate. A flexible polymer backing, together with a set of electrodes, forms a reservoir that contains an electrolytic fluid chemical reagent. During fabrication, the glass carrier substrate protects the fluid chemical reagent from degradation. A conductive micromesh further contains the reagent while allowing partial exposure to the ambient biological or atmospheric environment. The micromesh density can be altered to accommodate fluid reagents having different viscosities. Flexibility is achieved by attaching a thick polymer tape and peeling away the micro-sensor from the glass carrier substrate. The final structure is thereby transferred to the polymer tape, providing a flexible product.
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公开(公告)号:US20210156836A1
公开(公告)日:2021-05-27
申请号:US17166580
申请日:2021-02-03
Applicant: STMICROELECTRONICS S.r.l. , STMICROELECTRONICS PTE LTD
Inventor: Malek BRAHEM , Hatem MAJERI , Olivier LE NEEL , Ravi SHANKAR , Enrico Rosario ALESSI , Pasquale BIANCOLILLO
Abstract: The present disclosure is directed to a gas sensor device that detects gases with large molecules (e.g., a gas with a molecular weight between 150 g/mol and 450 g/mol), such as siloxanes. The gas sensor device includes a thin film gas sensor and a bulk film gas sensor. The thin film gas sensor and the bulk film gas sensor each include a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. The SMO film of the thin film gas sensor is an thin film (e.g., between 90 nanometers and 110 nanometers thick), and the SMO film of the bulk film gas sensor is an thick film (e.g., between 5 micrometers and 20 micrometers thick). The gas sensor device detects gases with large molecules based on a variation between resistances of the SMO thin film and the SMO thick film.
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公开(公告)号:US20190257804A1
公开(公告)日:2019-08-22
申请号:US15901721
申请日:2018-02-21
Applicant: STMICROELECTRONICS PTE LTD , STMICROELECTRONICS S.R.L.
Inventor: Malek BRAHEM , Hatem MAJERI , Olivier LE NEEL , Ravi SHANKAR , Enrico Rosario ALESSI , Pasquale BIANCOLILLO
Abstract: The present disclosure is directed to a gas sensor device that detects gases with large molecules (e.g., a gas with a molecular weight between 150 g/mol and 450 g/mol), such as siloxanes. The gas sensor device includes a thin film gas sensor and a bulk film gas sensor. The thin film gas sensor and the bulk film gas sensor each include a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. The SMO film of the thin film gas sensor is an thin film (e.g., between 90 nanometers and 110 nanometers thick), and the SMO film of the bulk film gas sensor is an thick film (e.g., between 5 micrometers and 20 micrometers thick). The gas sensor device detects gases with large molecules based on a variation between resistances of the SMO thin film and the SMO thick film.
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公开(公告)号:US20150210539A1
公开(公告)日:2015-07-30
申请号:US14679906
申请日:2015-04-06
Applicant: STMICROELECTRONICS PTE LTD
Inventor: Olivier LE NEEL , Tien Choy LOH
IPC: B81C1/00
CPC classification number: B81C1/00158 , B81B3/0021 , B81B2203/0127
Abstract: The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities, and a plurality of diamond shaped anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. A center of each opening is also a center of one of the cavities.
Abstract translation: 本公开涉及一种包括基板和形成在基板上的传感器的装置。 所述传感器包括由多个集成腔体形成的室,在所述衬底上方的膜,所述膜具有多个开口,每个开口位于所述空腔中的一个上方,以及多个位于所述膜和所述衬底之间的菱形锚定件 ,定位在每个空腔之间的锚固件。 每个开口的中心也是其中一个空腔的中心。
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公开(公告)号:US20190257780A1
公开(公告)日:2019-08-22
申请号:US16397635
申请日:2019-04-29
Applicant: STMicroelectronics Pte Ltd.
Inventor: Olivier LE NEEL , Ravi Shankar , Suman Cherian , Calvin Leung , Tien-Choy Loh , Shian-Yeu Kam
IPC: G01N27/22 , G01L19/00 , H01L27/02 , G01K7/16 , G01K7/20 , G01K7/18 , G01K7/01 , G01L9/12 , H01L25/00 , H01L25/065 , H01L29/78
Abstract: A semiconductor-based multi-sensor module integrates miniature temperature, pressure, and humidity sensors onto a single substrate. Pressure and humidity sensors can be implemented as capacitive thin film sensors, while the temperature sensor is implemented as a precision miniature Wheatstone bridge. Such multi-sensor modules can be used as building blocks in application-specific integrated circuits (ASICs). Furthermore, the multi-sensor module can be built on top of existing circuitry that can be used to process signals from the sensors. An integrated multi-sensor module that uses differential sensors can measure a variety of localized ambient environmental conditions substantially simultaneously, and with a high level of precision. The multi-sensor module also features an integrated heater that can be used to calibrate or to adjust the sensors, either automatically or as needed. Such a miniature integrated multi-sensor module that features low power consumption can be used in medical monitoring and mobile computing, including smart phone applications.
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8.
公开(公告)号:US20160118289A1
公开(公告)日:2016-04-28
申请号:US14986130
申请日:2015-12-31
Applicant: STMicroelectronics Pte Ltd
Inventor: Calvin LEUNG , Olivier LE NEEL
IPC: H01L21/683 , H01L29/66 , H01L21/56 , H01L23/498 , H01L23/00 , H01L27/105 , H01L21/48 , H01L21/768 , H01L49/02
CPC classification number: H01L21/6835 , H01L21/4846 , H01L21/568 , H01L21/76895 , H01L23/3135 , H01L23/49822 , H01L23/4985 , H01L23/5389 , H01L24/20 , H01L27/0629 , H01L27/1052 , H01L28/60 , H01L29/6675 , H01L2221/68345 , H01L2221/68359 , H01L2224/18 , H01L2924/0002 , H01L2924/00
Abstract: An electronic device is formed by depositing polyimide on a glass substrate. A conductive material is deposited on the polyimide and patterned to form electrodes and signal traces. Remaining portions of the electronic device are formed on the polyimide. A second polyimide layer is then formed on the first polyimide layer. The glass substrate is then removed, exposing the electrodes and the top surface of the electronic device.
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公开(公告)号:US20240036019A1
公开(公告)日:2024-02-01
申请号:US18485072
申请日:2023-10-11
Applicant: STMICROELECTRONICS S.r.l. , STMICROELECTRONICS PTE LTD
Inventor: Malek BRAHEM , Hatem MAJERI , Olivier LE NEEL , Ravi SHANKAR , Enrico Rosario ALESSI , Pasquale BIANCOLILLO
CPC classification number: G01N33/0047 , G01N27/12 , G01N27/021
Abstract: The present disclosure is directed to a gas sensor device that detects gases with large molecules (e.g., a gas with a molecular weight between 150 g/mol and 450 g/mol), such as siloxanes. The gas sensor device includes a thin film gas sensor and a bulk film gas sensor. The thin film gas sensor and the bulk film gas sensor each include a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. The SMO film of the thin film gas sensor is an thin film (e.g., between 90 nanometers and 110 nanometers thick), and the SMO film of the bulk film gas sensor is an thick film (e.g., between 5 micrometers and 20 micrometers thick). The gas sensor device detects gases with large molecules based on a variation between resistances of the SMO thin film and the SMO thick film.
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公开(公告)号:US20190261899A1
公开(公告)日:2019-08-29
申请号:US16407054
申请日:2019-05-08
Applicant: STMICROELECTRONICS PTE LTD
Inventor: Olivier LE NEEL , Suman CHERIAN , Calvin LEUNG
IPC: A61B5/1473 , A61B5/1468 , G01N27/327 , A61B5/145
Abstract: A universal electrochemical micro-sensor can be used either as a biosensor or an environmental sensor. Because of its small size and flexibility, the micro-sensor is suitable for continuous use to monitor fluids within a live subject, or as an environmental monitor. The micro-sensor can be formed on a reusable glass carrier substrate. A flexible polymer backing, together with a set of electrodes, forms a reservoir that contains an electrolytic fluid chemical reagent. During fabrication, the glass carrier substrate protects the fluid chemical reagent from degradation. A conductive micromesh further contains the reagent while allowing partial exposure to the ambient biological or atmospheric environment. The micromesh density can be altered to accommodate fluid reagents having different viscosities. Flexibility is achieved by attaching a thick polymer tape and peeling away the micro-sensor from the glass carrier substrate. The final structure is thereby transferred to the polymer tape, providing a flexible product.
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