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公开(公告)号：US09192053B2
公开(公告)日：2015-11-17
申请号：US14094132
申请日：2013-12-02
Inventor： Hui Mu , Gongyu Jiang , Li Ding , Jianliang Li , Wenjian Sun
IPC: B05D5/12 , H05K3/10 , B05D3/00 , C23C14/34 , H01J49/06 , H01J49/42 , H01J37/04 , C23C14/00 , C23C18/18 , C23C14/04 , H05K1/11 , H05K3/00 , H05K3/14
CPC classification number: H05K3/107 , B05D3/002 , B05D5/12 , C23C14/0021 , C23C14/046 , C23C14/34 , C23C18/1806 , H01J37/04 , H01J49/063 , H01J49/421 , H05K1/119 , H05K3/0014 , H05K3/14
Abstract: The present invention provides a method for preparing an ion optical device. A substrate is fabricated with a hard material adapted for a grinding process, the substrate at least including a planar surface, and including at least one insulating material layer. Next, one or more linear grooves are cut on the planar surface, to form multiple discrete ion optical electrode regions on the planar surface separated by the linear grooves. Then, conductive leads are fabricated on other substrate surfaces than the planar surface and in a through hole inside the substrate, to provide voltages required on ion optical electrodes. By using high-hardness materials in cooperation with high-precision machining, higher precision and a desired discrete electrode contour can be obtained.
Abstract translation: 本发明提供了一种离子光学器件的制备方法。 用适于磨削工艺的硬质材料制造衬底，所述衬底至少包括平坦表面，并且包括至少一个绝缘材料层。 接下来，在平坦表面上切割一个或多个线性沟槽，以在由线性沟槽分隔开的平面上形成多个离散的离子光电极区域。 然后，在平坦表面和衬底内的通孔中的其它衬底表面上制造导电引线，以提供离子光电电极所需的电压。 通过与高精度加工配合使用高硬度材料，可以获得更高精度和期望的分立电极轮廓。
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公开(公告)号：US09406495B2
公开(公告)日：2016-08-02
申请号：US14389642
申请日：2013-02-26
Inventor： Gongyu Jiang , Wenjian Sun
CPC classification number: H01J49/423 , H01J49/0027 , H01J49/063 , H01J49/4255 , H01J49/427
Abstract: A linear ion beam bonding apparatus and an array structure thereof, comprising a pair of primary radiofrequency electrodes (501 and 502) extending along the axial direction and oppositely arranged on two sides of the central axis of the linear ion beam bonding apparatus. Section patterns on different section planes of each of the primary radiofrequency electrodes (501 and 502) and perpendicular to the central axis are all kept symmetric via a primary symmetric plane (506) of the central axis. Radiofrequency voltages attached to the primary radiofrequency electrodes (501 and 502) are of identical phases. An ion extraction groove (84) is arranged on at least one of the primary radiofrequency electrodes (501 and 502), while at least one pair of auxiliary electrodes (503 and 505) are arranged on two sides of the pair of primary radiofrequency electrodes (501 and 502). The auxiliary electrodes (503 and 505) are arranged in duality to the primary symmetric plane (506). At least one of the auxiliary electrodes (503 and 505) is provided with a finite number of symmetric planes (507), while a minimal angle greater than 0 degrees and less than 90 degrees is provided between each symmetric plane (507) and the symmetric plane (506) of the primary radiofrequency electrodes (501 and 502). By means of this, a quadrupole field component of an ion beam bonding radiofrequency electric field within the ion beam bonding apparatus is strengthened.
Abstract translation: 一种线性离子束接合装置及其阵列结构，包括沿着轴向延伸并且相对设置在线性离子束接合装置的中心轴线的两侧的一对初级射频电极（501和502）。 主要射频电极（501和502）的每一个并且垂直于中心轴的不同截面的截面图案都通过中心轴的主对称平面（506）保持对称。 附加到主射频电极（501和502）的射频电压具有相同的相位。 离子提取槽（84）布置在主射频电极（501和502）中的至少一个上，而至少一对辅助电极（503和505）布置在一对主射频电极 501和502）。 辅助电极（503和505）与主对称平面（506）的对置布置。 至少一个辅助电极（503和505）设置有有限数量的对称平面（507），而在每个对称平面（507）和对称平面（507）之间提供大于0度且小于90度的最小角度 平面（506）的主射频电极（501和502）。 由此，离子束接合装置内的离子束结合射频电场的四极场成分被加强。
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公开(公告)号：US20150170898A1
公开(公告)日：2015-06-18
申请号：US14389642
申请日：2013-02-26
Inventor： Gongyu Jiang , Wenjian Sun
CPC classification number: H01J49/423 , H01J49/0027 , H01J49/063 , H01J49/4255 , H01J49/427
Abstract: A linear ion beam bonding apparatus and an array structure thereof, comprising a pair of primary radiofrequency electrodes (501 and 502) extending along the axial direction and oppositely arranged on two sides of the central axis of the linear ion beam bonding apparatus. Section patterns on different section planes of each of the primary radiofrequency electrodes (501 and 502) and perpendicular to the central axis are all kept symmetric via a primary symmetric plane (506) of the central axis. Radiofrequency voltages attached to the primary radiofrequency electrodes (501 and 502) are of identical phases. An ion extraction groove (84) is arranged on at least one of the primary radiofrequency electrodes (501 and 502), while at least one pair of auxiliary electrodes (503 and 505) are arranged on two sides of the pair of primary radiofrequency electrodes (501 and 502). The auxiliary electrodes (503 and 505) are arranged in duality to the primary symmetric plane (506). At least one of the auxiliary electrodes (503 and 505) is provided with a finite number of symmetric planes (507), while a minimal angle greater than 0 degrees and less than 90 degrees is provided between each symmetric plane (507) and the symmetric plane (506) of the primary radiofrequency electrodes (501 and 502). By means of this, a quadrupole field component of an ion beam bonding radiofrequency electric field within the ion beam bonding apparatus is strengthened.
Abstract translation: 一种线性离子束接合装置及其阵列结构，包括沿着轴向延伸并且相对设置在线性离子束接合装置的中心轴线的两侧的一对初级射频电极（501和502）。 主要射频电极（501和502）的每一个并且垂直于中心轴的不同截面的截面图案都通过中心轴的主对称平面（506）保持对称。 附加到主射频电极（501和502）的射频电压具有相同的相位。 离子提取槽（84）布置在主射频电极（501和502）中的至少一个上，而至少一对辅助电极（503和505）布置在一对主射频电极 501和502）。 辅助电极（503和505）与主对称平面（506）的对置布置。 至少一个辅助电极（503和505）设置有有限数量的对称平面（507），而在每个对称平面（507）和对称平面（507）之间提供大于0度且小于90度的最小角度 平面（506）的主射频电极（501和502）。 由此，离子束接合装置内的离子束结合射频电场的四极场成分被加强。
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公开(公告)号：US20140087063A1
公开(公告)日：2014-03-27
申请号：US14094132
申请日：2013-12-02
Inventor： Hui Mu , Gongyu Jiang , Li Ding , Jianliang Li , Wenjian Sun
IPC: H05K3/10
CPC classification number: H05K3/107 , B05D3/002 , B05D5/12 , C23C14/0021 , C23C14/046 , C23C14/34 , C23C18/1806 , H01J37/04 , H01J49/063 , H01J49/421 , H05K1/119 , H05K3/0014 , H05K3/14
Abstract: The present invention provides a method for preparing an ion optical device. A substrate is fabricated with a hard material adapted for a grinding process, the substrate at least including a planar surface, and including at least one insulating material layer. Next, one or more linear grooves are cut on the planar surface, to form multiple discrete ion optical electrode regions on the planar surface separated by the linear grooves. Then, conductive leads are fabricated on other substrate surfaces than the planar surface and in a through hole inside the substrate, to provide voltages required on ion optical electrodes. By using high-hardness materials in cooperation with high-precision machining, higher precision and a desired discrete electrode contour can be obtained.
Abstract translation: 本发明提供了一种离子光学器件的制备方法。 用适于磨削工艺的硬质材料制造衬底，所述衬底至少包括平坦表面，并且包括至少一个绝缘材料层。 接下来，在平坦表面上切割一个或多个线性沟槽，以在由线性沟槽分隔开的平面上形成多个离散的离子光电极区域。 然后，在平坦表面和衬底内的通孔中的其它衬底表面上制造导电引线，以提供离子光电电极所需的电压。 通过与高精度加工配合使用高硬度材料，可以获得更高精度和期望的分立电极轮廓。
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