GATE STRUCTURE AND SEMICONDUCTOR DEVICE INCLUDING THE SAME

    公开(公告)号:US20250040124A1

    公开(公告)日:2025-01-30

    申请号:US18442274

    申请日:2024-02-15

    Abstract: A gate structure includes a gate electrode on a substrate, the gate electrode including a lower portion and an upper portion sequentially stacked in a first direction substantially perpendicular to an upper surface of the substrate; a spacer structure including a second spacer and a first spacer sequentially stacked in a second direction substantially parallel to the upper surface of the substrate on a sidewall of the upper portion of the gate electrode; and a gate insulation pattern on a lower surface and a sidewall of the lower portion of the gate electrode and an outer sidewall of the spacer structure; wherein a cross-section of the first spacer has a shape of an “L”, and wherein the second spacer includes a material that is configured to induce a dipole at an interface of the first spacer and the gate insulation pattern.

    INTEGRATED CIRCUIT DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20250151265A1

    公开(公告)日:2025-05-08

    申请号:US18740568

    申请日:2024-06-12

    Abstract: An integrated circuit device includes gate structures arranged on an upper surface of a substrate, a first impurity region arranged at the upper surface of the substrate, wherein the first impurity region is adjacent to a first gate structure of the gate structures, a first contact pad arranged on the upper surface of the substrate, wherein the first contact pad comprises a recess recessed in a vertical direction perpendicular to the upper surface of the substrate from an upper surface of the first contact pad toward the upper surface of the substrate, a metal silicide layer disposed in the recess, and a contact via connected to the metal silicide layer and extending in the vertical direction. A lower end of the contact via is disposed in the recess and connected to the metal silicide layer. The contact via is spaced apart from the substrate in the vertical direction.

    Semiconductor devices including channel dopant layer
    5.
    发明授权
    Semiconductor devices including channel dopant layer 有权
    包括沟道掺杂剂层的半导体器件

    公开(公告)号:US09484409B2

    公开(公告)日:2016-11-01

    申请号:US14846176

    申请日:2015-09-04

    Abstract: A semiconductor device includes a semiconductor substrate including a well dopant layer having a first conductivity type, a gate electrode on the well dopant layer, a channel dopant layer in the well dopant layer and spaced apart from a top surface of the semiconductor substrate, a channel region between the gate electrode and the channel dopant layer, and source/drain regions in the well dopant layer at both sides of the gate electrode. The channel dopant layer and the channel region have the first conductivity type. The source/drain regions have a second conductivity type. A concentration of dopants having the first conductivity type in the channel dopant layer is higher than a concentration of dopants having the first conductivity type in the channel region. The semiconductor device may be used in a sense amplifier of a memory device.

    Abstract translation: 一种半导体器件包括:半导体衬底,包括具有第一导电类型的阱掺杂剂层,阱掺杂剂层上的栅极电极,阱掺杂剂层中的沟道掺杂剂层,并且与半导体衬底的顶表面间隔开;沟道 栅电极和沟道掺杂剂层之间的区域以及栅电极两侧的阱掺杂剂层中的源/漏区。 沟道掺杂剂层和沟道区具有第一导电类型。 源极/漏极区域具有第二导电类型。 在沟道掺杂剂层中具有第一导电类型的掺杂剂的浓度高于沟道区中具有第一导电类型的掺杂剂的浓度。 半导体器件可以用在存储器件的读出放大器中。

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