公开(公告)号：US08461556B2

公开(公告)日：2013-06-11

申请号：US12877666

申请日：2010-09-08

Applicant: Daniel Distaso ,  Russell J. Low

Inventor： Daniel Distaso ,  Russell J. Low

IPC: G21K5/10

CPC classification number: H01J37/3026 ,  H01J37/3171 ,  H01J2237/31703

Abstract: Blockers in an ion beam blocker unit selectively block or trim an ion beam. In one instance, the ion beam has first current regions and second current regions. These current regions may be unequal. The ion beam is then implanted into a workpiece to form regions with different doses. The workpiece may be scanned so that the entirety of its surface is implanted.

Abstract translation: 离子束阻挡单元中的阻挡剂选择性地阻挡或修整离子束。 在一种情况下，离子束具有第一电流区域和第二电流区域。 这些当前区域可能不相等。 然后将离子束植入工件中以形成具有不同剂量的区域。 可以扫描工件以使其整个表面被植入。

公开(公告)号：US08330127B2

公开(公告)日：2012-12-11

申请号：US12080028

申请日：2008-03-31

Applicant: Russell J. Low ,  Jay T. Scheuer ,  Alexander S. Perel ,  Craig R. Chaney ,  Neil J. Bassom

Inventor： Russell J. Low ,  Jay T. Scheuer ,  Alexander S. Perel ,  Craig R. Chaney ,  Neil J. Bassom

IPC: G21K5/00

CPC classification number: H01J27/022 ,  H01J37/04 ,  H01J37/08 ,  H01J37/16 ,  H01J2237/082

Abstract: Liner elements to protect the ion source housing and also increase the power efficiency of the ion source are disclosed. Two liner elements, preferably constructed from tungsten, are inserted into the ion source chamber, one placed against each of the two sidewalls. These inserts are electrically biased so as to induce an electrical field that is perpendicular to the applied magnetic field. Such an arrangement has been unexpectedly found to increase the life of not only the ion chamber housing, but also the indirectly heated cathode (IHC) and the repeller. In addition, the use of these biased liner elements also improved the power efficiency of the ion source; allowing more ions to be generated at a given power level, or an equal number of ions to be generated at a lower power level.

Abstract translation: 公开了用于保护离子源壳体的衬垫元件并且还提高了离子源的功率效率。 将优选由钨构成的两个衬垫元件插入到离子源室中，一个放置在两个侧壁中的每一个上。 这些插入物被电偏置以便引起垂直于所施加的磁场的电场。 已经意外地发现这种布置不仅增加了离子室壳体的寿命，而且延长了间接加热的阴极（IHC）和排斥器的使用寿命。 此外，使用这些偏置的衬垫元件也提高了离子源的功率效率; 允许在给定功率水平下产生更多的离子，或者在较低功率水平下产生相等数量的离子。

公开(公告)号：US20120056110A1

公开(公告)日：2012-03-08

申请号：US12877666

申请日：2010-09-08

Applicant: Daniel DISTASO ,  Russell J. Low

Inventor： Daniel DISTASO ,  Russell J. Low

IPC: G21K5/04

CPC classification number: H01J37/3026 ,  H01J37/3171 ,  H01J2237/31703

Abstract: Blockers in an ion beam blocker unit selectively block or trim an ion beam. In one instance, the ion beam has first current regions and second current regions. These current regions may be unequal. The ion beam is then implanted into a workpiece to form regions with different doses. The workpiece may be scanned so that the entirety of its surface is implanted.

Abstract translation: 离子束阻挡单元中的阻挡剂选择性地阻挡或修整离子束。 在一种情况下，离子束具有第一电流区域和第二电流区域。 这些当前区域可能不相等。 然后将离子束植入工件中以形成具有不同剂量的区域。 可以扫描工件以使其整个表面被植入。

公开(公告)号：US20120017938A1

公开(公告)日：2012-01-26

申请号：US13187078

申请日：2011-07-20

Applicant: William T. Weaver ,  Kevin M. Daniels ,  Dale K. Stone ,  Russell J. Low ,  Benjamin B. Riordon ,  Jeffrey Blahnik

Inventor： William T. Weaver ,  Kevin M. Daniels ,  Dale K. Stone ,  Russell J. Low ,  Benjamin B. Riordon ,  Jeffrey Blahnik

IPC: B08B1/00

CPC classification number: H01L21/67028 ,  B08B1/008 ,  H01J2237/31711 ,  H01L21/67046

Abstract: To achieve cost efficiency, solar cells must be processed at a high throughput. Breakages, which may leave debris on the clamping surface of the platen, adversely affect this throughput. A plurality of embodiments are disclosed which may be used to remove debris from the clamping surface without breaking the vacuum condition within the processing station. In some embodiments, a brush is used to sweep the debris from the surface of the platen. In other embodiments, an adhesive material is used to collect the debris. In some embodiments, the automation equipment used to handle masks may also be used to handle the platen cleaning mechanisms. In still other embodiments, stream of gas or ion beams are used to clean debris from the clamping surface of the platen.

Abstract translation: 为了实现成本效益，必须以高产量处理太阳能电池。 碎片可能会使碎片在压板的夹紧表面上产生不利影响。 公开了多个实施例，其可以用于从夹紧表面去除碎屑而不破坏处理站内的真空状况。 在一些实施例中，刷子用于从压板的表面扫掠碎屑。 在其他实施例中，使用粘合剂材料来收集碎屑。 在一些实施例中，用于处理掩模的自动化设备也可用于处理压板清洁机构。 在其它实施例中，气流或离子束用于从压板的夹紧表面清洁碎屑。

公开(公告)号：US07863531B2

公开(公告)日：2011-01-04

申请号：US11861796

申请日：2007-09-26

Applicant: Douglas E. May ,  Kasegn D. Tekletsadik ,  Eric Hermanson ,  Piotr R. Lubicki ,  Russell J. Low ,  Joseph C. Olson ,  Stephen E. Krause

Inventor： Douglas E. May ,  Kasegn D. Tekletsadik ,  Eric Hermanson ,  Piotr R. Lubicki ,  Russell J. Low ,  Joseph C. Olson ,  Stephen E. Krause

IPC: H01H9/00

CPC classification number: H01H1/06 ,  H01H1/385 ,  H01H3/36 ,  H01H31/003 ,  H01H31/026 ,  H01H35/38

Abstract: Techniques for making high voltage connections are disclosed. In one particular exemplary embodiment, the techniques may be realized as an electrical switch. The electrical switch may comprise a component extending from a first electrical contact to a second electrical contact. The component may also comprise a non-conductive section and a conductive section. In a first mode of operation, at least a portion of the non-conductive section may be positioned between the two electrical contacts to insulate the two electrical contacts. In a second mode of operation, the conductive section may be positioned between the two electrical contacts to connect the two electrical contacts.

Abstract translation: 公开了用于制造高压连接的技术。 在一个特定的示例性实施例中，这些技术可以被实现为电开关。 电开关可以包括从第一电触头延伸到第二电触点的部件。 该部件还可以包括非导电部分和导电部分。 在第一操作模式中，非导电部分的至少一部分可以位于两个电触点之间，以使两个电触头绝缘。 在第二操作模式中，导电部分可以位于两个电触头之间，以连接两个电触点。

公开(公告)号：US07675046B2

公开(公告)日：2010-03-09

申请号：US11527842

申请日：2006-09-27

Applicant: Kasegn D. Tekletsadik ,  Russell J. Low

Inventor： Kasegn D. Tekletsadik ,  Russell J. Low

IPC: H01J37/317

CPC classification number: H01J37/3171 ,  H01J37/09 ,  H01J37/16 ,  H01J2237/0206 ,  H01J2237/026 ,  H01J2237/038 ,  H01J2237/08

Abstract: An apparatus includes a conductive structure and an insulated conductor disposed proximate an exterior portion of the conductive structure to modify an electric field about the conductive structure. The insulated conductor has an insulator with a dielectric strength greater than 75 kilovolts (kV)/inch disposed about a conductor. An ion implanter is also provided. The ion implanter includes an ion source configured to provide an ion beam, a terminal structure defining a cavity, the ion source at least partially disposed within the cavity, and an insulated conductor. The insulated conductor is disposed proximate an exterior portion of the terminal structure to modify an electric field about the terminal structure. The insulated conductor has an insulator with a dielectric strength greater than 75 kV/inch disposed about a conductor.

Abstract translation: 一种装置包括导电结构和布置在导电结构的外部附近的绝缘导体，以修改围绕导电结构的电场。 绝缘导体具有介于绝缘体上的介电强度大于75千伏（kV）/英寸的导体周围。 还提供了离子注入机。 离子注入机包括被配置为提供离子束的离子源，限定空腔的端子结构，至少部分地设置在空腔内的离子源和绝缘导体。 绝缘导体设置在端子结构的外部附近以修改围绕端子结构的电场。 绝缘导体具有介于绝缘体上的介电强度大于75kV /英寸的导体周围。

公开(公告)号：US20090147435A1

公开(公告)日：2009-06-11

申请号：US12327888

申请日：2008-12-04

Applicant: Stephen E. Krause ,  Russell J. Low ,  Kasegn D. Tekletsadik

Inventor： Stephen E. Krause ,  Russell J. Low ,  Kasegn D. Tekletsadik

IPC: H01G7/02

CPC classification number: H01J37/3171 ,  H01J37/16 ,  H01J2237/022 ,  H01J2237/028 ,  H01J2237/038

Abstract: An apparatus and method for trapping particles in a housing is disclosed. A high voltage terminal/structure is situated within a housing. A conductive material, having a plurality of holes, such as a mesh, is disposed a distance away from an interior surface of the housing, such as the floor of the housing, forming a particle trap. The conductive mesh is biased so that the electrical field within the trap is either non-existent or pushing toward the floor, so as to retain particles within the trap. Additionally, a particle mover, such as a fan or mechanical vibration device, can be used to urge particles into the openings in the mesh. Furthermore, a conditioning phase may be used prior to operating the high voltage terminal, whereby a voltage is applied to the conductive mesh so as to attract particles toward the particle trap.

Abstract translation: 公开了一种用于将颗粒捕获在壳体中的装置和方法。 高压端子/结构位于壳体内。 具有诸如网的多个孔的导电材料设置成远离壳体的内表面（例如壳体的地板）一定距离，形成颗粒捕集器。 导电网被偏置，使得陷阱内的电场不存在或者朝向地板推动，以便将颗粒保持在陷阱内。 此外，诸如风扇或机械振动装置的颗粒移动器可用于将颗粒推入网中的开口中。 此外，可以在操作高电压端子之前使用调节阶段，由此将电压施加到导电网，以将颗粒吸引到颗粒捕集器。

公开(公告)号：US20090050347A1

公开(公告)日：2009-02-26

申请号：US11841086

申请日：2007-08-20

Applicant: Kasegn D. Tekletsadik ,  Steve Krause ,  Eric Hermanson ,  Russell J. Low

Inventor： Kasegn D. Tekletsadik ,  Steve Krause ,  Eric Hermanson ,  Russell J. Low

IPC: H01B7/00 ,  H05K5/02

CPC classification number: H01J37/3171 ,  H01J37/09 ,  H01J2237/2001 ,  H01J2237/26

Abstract: Insulated conducting devices and related methods are disclosed. An insulated conducting device for a voltage structure comprises: a conductor connected to a voltage; and multiple insulation segments enclosing the conductor, the multiple insulation segments interfacing with one another.

Abstract translation: 公开了绝缘导电装置及相关方法。 一种用于电压结构的绝缘导电装置包括：连接到电压的导体; 以及包围导体的多个绝缘段，多个绝缘段彼此接合。

公开(公告)号：US07446326B2

公开(公告)日：2008-11-04

申请号：US11394825

申请日：2006-03-31

Applicant: Craig R. Chaney ,  Russell J. Low ,  Jonathan Gerald England

Inventor： Craig R. Chaney ,  Russell J. Low ,  Jonathan Gerald England

IPC: G21K5/10

CPC classification number: H01J37/3171 ,  H01J37/08 ,  H01J2237/022 ,  H01J2237/082 ,  H01J2237/0822 ,  H01J2237/0827 ,  H01J2237/31705

Abstract: A technique for improving ion implanter productivity is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for improving productivity of an ion implanter having an ion source chamber. The method may comprise supplying a gaseous substance to the ion source chamber, the gaseous substance comprising one or more reactive species for generating ions for the ion implanter. The method may also comprise stopping the supply of the gaseous substance to the ion source chamber. The method may further comprise supplying a hydrogen containing gas to the ion source chamber for a period of time after stopping the supply of the gaseous substance.

Abstract translation: 公开了一种改善离子注入机生产率的技术。 在一个特定的示例性实施例中，该技术可以被实现为用于提高具有离子源室的离子注入机的生产率的方法。 该方法可以包括向离子源室供应气态物质，该气态物质包含用于产生用于离子注入机的离子的一种或多种反应性物质。 该方法还可以包括停止向离子源室供应气态物质。 该方法还可以包括在停止供应气态物质后的一段时间内向离子源室供应含氢气体。

公开(公告)号：US08756021B2

公开(公告)日：2014-06-17

申请号：US12912312

申请日：2010-10-26

Applicant: Russell J. Low ,  Kevin M. Daniels ,  Bon-Woong Koo ,  Richard M. White ,  James W. Blanchette

Inventor： Russell J. Low ,  Kevin M. Daniels ,  Bon-Woong Koo ,  Richard M. White ,  James W. Blanchette

IPC: G01B3/44

CPC classification number: H01J37/3171 ,  H01J37/08 ,  H01J37/242 ,  H01J2237/304

Abstract: A method of controlling operation of an indirectly-heated cathode (IHC) ion source includes a step of measuring a rate of loss of cathode weight of the IHC ion source that occurs during operation using a first cathode configuration and under a first set of operation conditions. A maximum weight loss for the first cathode configuration is determined, and a cathode lifetime is calculated based upon the rate of cathode weight loss and the maximum weight loss. A further method includes receiving a minimum source bias power value for operation of a cathode in a first configuration, measuring a rate of decrease in source bias power for a cathode in the first configuration, and calculating a lifetime of the cathode based upon the minimum source bias power and rate of decrease in source bias power.

Abstract translation: 控制间接加热的阴极（IHC）离子源的操作的方法包括以下步骤：测量在使用第一阴极配置的操作期间和在第一组操作条件下发生的IHC离子源的阴极重量损失率 。 确定第一阴极构造的最大重量损失，并且基于阴极重量损失率和最大重量损失计算阴极寿命。 另一种方法包括：在第一配置中接收用于阴极操作的最小源偏置功率值，测量第一配置中阴极的源极偏置功率的降低率，以及基于最小源计算阴极的寿命 偏置功率和源偏置功率的降低率。