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公开(公告)号：US08593037B1
公开(公告)日：2013-11-26
申请号：US13434144
申请日：2012-03-29
申请人： Randall L. Kubena , Tsung-Yuan Hsu
发明人： Randall L. Kubena , Tsung-Yuan Hsu
IPC分类号： H01L41/053 , H01L41/047 , H01L41/107 , H01L41/113 , G01P3/26 , G01L7/00
CPC分类号： H04R17/00 , Y10T29/42 , Y10T29/49165 , Y10T29/49401
摘要： A quartz resonator flow cell has a piezoelectric quartz wafer with an electrode, pads, and interconnects disposed on a first side thereof. The piezoelectric quartz wafer has a second electrode disposed on a second side thereof, the second electrode opposing the first electrode. A substrate is provided having fluid ports therein and the piezoelectric quartz wafer is mounted to the substrate such that the second side thereof faces the substrate with a cavity being formed between the substrate and the wafer. The fluid ports in the substrate are aligned with the electrode on the second side of the piezoelectric quartz wafer which is in contact with the cavity.
摘要翻译： 石英谐振器流通池具有压电石英晶片，其具有设置在其第一侧上的电极，焊盘和互连。 压电石英晶片具有设置在其第二侧上的第二电极，第二电极与第一电极相对。 提供了一种衬底，其中具有流体端口，并且将压电石英晶片安装到衬底上，使得其第二面面对衬底，在衬底和晶片之间形成空腔。 衬底中的流体端口与压电石英晶片的与空腔接触的第二侧上的电极对齐。
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公开(公告)号：US08176607B1
公开(公告)日：2012-05-15
申请号：US12575634
申请日：2009-10-08
申请人： Randall L. Kubena , Tsung-Yuan Hsu
发明人： Randall L. Kubena , Tsung-Yuan Hsu
CPC分类号： H04R17/00 , Y10T29/42 , Y10T29/49165 , Y10T29/49401
摘要： A method for fabricating VHF and/or UHF quartz resonators (for higher sensitivity) in a cartridges design with the quartz resonators requiring much smaller sample volumes than required by conventional resonators, and also enjoying smaller size and more reliable assembly. MEMS fabrication approaches are used to fabricate with quartz resonators in quartz cavities with electrical interconnects on a top side of a substrate for electrical connection to the electronics preferably through pressure pins in a plastic module. An analyte is exposed to grounded electrodes on a single side of the quartz resonators, thereby preventing electrical coupling of the detector signals through the analyte. The resonators can be mounted on the plastic cartridge or on arrays of plastic cartridges with the use of inert bonding material, die bonding or wafer bonding techniques. This allows the overall size, cost, and required biological sample volume to be reduced while increasing the sensitivity for detecting small mass changes.
摘要翻译： 一种用于在墨盒设计中制造VHF和/或UHF石英谐振器（用于更高灵敏度）的方法，其中石英谐振器比常规谐振器要求的样品体积要小得多，并且还具有更小的尺寸和更可靠的组装。 MEMS制造方法用于在石英腔中制造石英谐振器，在基底的顶侧具有电互连，用于通过塑料模块中的压力引脚电连接到电子装置。 分析物暴露于石英谐振器单侧的接地电极，从而防止检测器信号通过分析物的电耦合。 谐振器可以使用惰性接合材料，管芯接合或晶片接合技术安装在塑料盒或塑料盒阵列上。 这允许减小整体尺寸，成本和所需的生物样品体积，同时增加用于检测小质量变化的灵敏度。
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公开(公告)号：US07557677B1
公开(公告)日：2009-07-07
申请号：US11643741
申请日：2006-12-20
申请人： Tsung-Yuan Hsu , Randall L. Kubena
发明人： Tsung-Yuan Hsu , Randall L. Kubena
摘要： In one embodiment, a cascaded monolithic crystal filter is provided. A first filter includes two resonators having a pair of electrodes with the monolithic crystal between. At least one electrode has a periphery which includes a feature capable of shifting a frequency associated with an anharmonic mode in the filter. The filter has a second resonator acoustically coupled to the first resonator. A second filter is cascaded with the first filter. The second filter includes a pair of acoustically coupled resonators.
摘要翻译： 在一个实施例中，提供了级联的单片晶体滤波器。 第一滤波器包括具有一对电极的两个谐振器，其间具有整体晶体。 至少一个电极具有外围，其包括能够移动与过滤器中的非调谐模式相关联的频率的特征。 滤波器具有声耦合到第一谐振器的第二谐振器。 第二个过滤器与第一个过滤器级联。 第二滤波器包括一对声耦合谐振器。
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公开(公告)号：US08151640B1
公开(公告)日：2012-04-10
申请号：US12027247
申请日：2008-02-06
申请人： Randall L. Kubena
发明人： Randall L. Kubena
IPC分类号： G01C19/00
CPC分类号： G01C19/5684
摘要： An on-chip navigation system, optionally combined with GPS (Global Positioning System) and/or an imaging array, which incorporates MEMS (MicroElectroMechanical Systems) components is possible by the use of careful material selection and novel bonding techniques used during fabrication. The use of MEMS components permits many of the components of a typical inertial navigation system to reside on a single chip. Because the components are in close proximity, the components can then be used to monitor the environmental changes of the chip, such as temperature and vibration, and correct for the resulting offsets of other components. This allows improved system performance even if the individual sensor components are not ideal.
摘要翻译： 通过使用仔细的材料选择和在制造期间使用的新型结合技术，可以选择结合使用MEMS（微电子机械系统）部件的GPS（全球定位系统）和/或成像阵列的片上导航系统。 使用MEMS组件允许典型惯性导航系统的许多组件驻留在单个芯片上。 由于组件非常接近，因此可以使用组件来监视芯片的环境变化，例如温度和振动，并纠正其他组件产生的偏移。 这样即使各个传感器组件不理想，也可以提高系统性能。
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公开(公告)号：US07802356B1
公开(公告)日：2010-09-28
申请号：US12034852
申请日：2008-02-21
IPC分类号： H04R31/00
摘要： A method for manufacturing a resonator is presented in the present application. The method includes providing a handle substrate, providing a host substrate, providing a quartz substrate comprising a first surface opposite a second surface, applying interposer film to the first surface of the quartz substrate, bonding the quartz substrate to the handle substrate wherein the interposer film is disposed between the quartz substrate and the handle substrate, thinning the second surface of the quartz substrate, removing a portion of the bonded quartz substrate to expose a portion of the interposer film, bonding the quartz substrate to the host substrate, and removing the handle substrate and the interposer film, thereby releasing the quartz substrate.
摘要翻译： 在本申请中提出了一种用于制造谐振器的方法。 该方法包括提供处理衬底，提供主体衬底，提供包括与第二表面相对的第一表面的石英衬底，将中介层膜施加到石英衬底的第一表面，将石英衬底接合到处理衬底，其中插入膜 设置在石英基板和手柄基板之间，使石英基板的第二表面变薄，去除一部分键合的石英基板以暴露中间层膜的一部分，将石英基板接合到主基板，并且移除手柄 基板和内插膜，从而释放石英基板。
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6.发明授权Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects 失效具有晶片间互连的三叶草微型陀螺仪和具有贯穿晶片互连的三叶草微型制造器的制造方法公开(公告)号：US07671431B1
公开(公告)日：2010-03-02
申请号：US11330376
申请日：2006-01-10
IPC分类号： H01L23/00
CPC分类号： G01C19/5719 , H01L21/76898
摘要： The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, preparing a base wafer with through-wafer interconnects, attaching the resonator wafer to the base wafer, wherein the bottom post fits into a post hole in the base wafer, forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, and attaching a cap wafer on top of the base wafer.
摘要翻译： 本发明涉及一种制造含有一体式立柱的三叶草微陀螺的方法，其特征在于，包括：将后晶片连接到谐振晶片，从后晶片形成底柱，附着于谐振晶片，制备带晶圆的基晶片 互连，将谐振器晶片连接到基底晶片，其中底部支架装配到基底晶片中的柱孔中，从谐振器晶片形成顶部柱，其中底部和顶部柱围绕相同的轴线对称地形成，并且附接 在基底晶片顶部的盖子晶片。
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7.发明授权公开(公告)号：US07282834B2
公开(公告)日：2007-10-16
申请号：US11148389
申请日：2005-06-07
IPC分类号： H01L41/08
CPC分类号： H03H3/0077
摘要： A method for tuning an electro-mechanical device such as a MEMS device is disclosed. The method comprises operating a MEMS device in a depressurized system and using FIB micromachining to remove a portion of the MEMS device. Additionally, a method for tuning a plurality of MEMS devices by depositing an active layer and then removing a portion of the active layer using FIB micromachining. Also, a method for tuning a MEMS device and vacuum packaging the MEMS device in situ are provided.
摘要翻译： 公开了一种用于调整诸如MEMS器件的机电装置的方法。 该方法包括在减压系统中操作MEMS装置，并使用FIB微机械加工来去除MEMS装置的一部分。 另外，一种用于通过沉积有源层然后使用FIB微加工来去除一部分有源层来调谐多个MEMS器件的方法。 此外，提供了一种用于调谐MEMS器件并原位真空封装MEMS器件的方法。
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8.发明授权Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense 失效集成全硅电容式微型电机具有垂直差分感应和控制以及用于制备具有垂直差分感的集成全硅电容式微型电机公开(公告)号：US07232700B1
公开(公告)日：2007-06-19
申请号：US11008715
申请日：2004-12-08
申请人： Randall L. Kubena
发明人： Randall L. Kubena
IPC分类号： H01L21/00
CPC分类号： G01C19/5719
摘要： The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching the resonator wafer to a base wafer, wherein the bottom post fits into a post hole in the base wafer, forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, preparing a cap with backside metallization, and attaching a cap wafer on top of the base wafer. The present invention relates further to a gyroscope containing an integrated post with on or off-chip electronics.
摘要翻译： 本发明涉及一种制造含有一体式立柱的三叶草微陀螺仪的方法，该方法包括：将后晶片连接到共振器晶片，从后晶片形成底柱，附着于谐振晶片，将谐振晶片连接到基片 ，其中所述底柱装配到所述基底晶片中的柱孔中，从所述谐振器晶片形成顶部柱，其中所述底部和顶部柱围绕相同轴线对称地形成，制备具有背侧金属化的盖，并且附接盖片 在基础晶片的顶部。 本发明还涉及一种包含具有片上或片外电子器件的集成柱的陀螺仪。
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公开(公告)号：US08769802B1
公开(公告)日：2014-07-08
申请号：US12831028
申请日：2010-07-06
IPC分类号： H04R31/00
摘要： A method for manufacturing a resonator is presented in the present application. The method includes providing a handle substrate, providing a host substrate, providing a quartz substrate comprising a first surface opposite a second surface, applying interposer film to the first surface of the quartz substrate, bonding the quartz substrate to the handle substrate wherein the interposer film is disposed between the quartz substrate and the handle substrate, thinning the second surface of the quartz substrate, removing a portion of the bonded quartz substrate to expose a portion of the interposer film, bonding the quartz substrate to the host substrate, and removing the handle substrate and the interposer film, thereby releasing the quartz substrate.
摘要翻译： 在本申请中提出了一种用于制造谐振器的方法。 该方法包括提供处理衬底，提供主体衬底，提供包括与第二表面相对的第一表面的石英衬底，将中介层膜施加到石英衬底的第一表面，将石英衬底接合到处理衬底，其中插入膜 设置在石英基板和手柄基板之间，使石英基板的第二表面变薄，去除一部分键合的石英基板以暴露中间层膜的一部分，将石英基板接合到主基板，并且移除手柄 基板和内插膜，从而释放石英基板。
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10.发明授权Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same 有权具有超薄导电外电极的基于石英的盘式谐振器陀螺仪及其制造方法公开(公告)号：US08766745B1
公开(公告)日：2014-07-01
申请号：US12488784
申请日：2009-06-22
CPC分类号： G01P1/00 , G01C19/5684 , H03H3/0072 , H03H9/02244 , H03H9/0552 , H03H9/1057 , H03H9/2436 , H03H2009/02283 , H03H2009/02496
摘要： A disk resonator gyroscope includes a quartz base, a quartz resonator disk having a central pillar connected to the base, the quartz resonator disk having a surface facing the base and having plurality of circumferential slots in the surface of the quartz resonator disk around the central pillar, and an electrode comprised of quartz and connected to the base outside of an outer edge of the resonator disk.
摘要翻译： 盘式谐振器陀螺仪包括石英基座，具有连接到基座的中心柱的石英谐振器盘，石英谐振器盘具有面向基座的表面，并且在石英谐振器盘周围的中心支柱的表面中具有多个周向槽 以及由石英组成并且连接到谐振器盘的外边缘外部的基座的电极。
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