发明授权
- 专利标题: Method of fabricating quartz resonators
- 专利标题(中): 石英谐振器的制造方法
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申请号: US12575634申请日: 2009-10-08
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公开(公告)号: US08176607B1公开(公告)日: 2012-05-15
- 发明人: Randall L. Kubena , Tsung-Yuan Hsu
- 申请人: Randall L. Kubena , Tsung-Yuan Hsu
- 申请人地址: US CA Malibu
- 专利权人: HRL Laboratories, LLC
- 当前专利权人: HRL Laboratories, LLC
- 当前专利权人地址: US CA Malibu
- 代理机构: Ladas & Parry
- 主分类号: H04R17/10
- IPC分类号: H04R17/10 ; B21D53/76
摘要:
A method for fabricating VHF and/or UHF quartz resonators (for higher sensitivity) in a cartridges design with the quartz resonators requiring much smaller sample volumes than required by conventional resonators, and also enjoying smaller size and more reliable assembly. MEMS fabrication approaches are used to fabricate with quartz resonators in quartz cavities with electrical interconnects on a top side of a substrate for electrical connection to the electronics preferably through pressure pins in a plastic module. An analyte is exposed to grounded electrodes on a single side of the quartz resonators, thereby preventing electrical coupling of the detector signals through the analyte. The resonators can be mounted on the plastic cartridge or on arrays of plastic cartridges with the use of inert bonding material, die bonding or wafer bonding techniques. This allows the overall size, cost, and required biological sample volume to be reduced while increasing the sensitivity for detecting small mass changes.
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