发明授权
US08766745B1 Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
有权
具有超薄导电外电极的基于石英的盘式谐振器陀螺仪及其制造方法
- 专利标题: Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
- 专利标题(中): 具有超薄导电外电极的基于石英的盘式谐振器陀螺仪及其制造方法
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申请号: US12488784申请日: 2009-06-22
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公开(公告)号: US08766745B1公开(公告)日: 2014-07-01
- 发明人: Randall L. Kubena , David T. Chang , Robert L. Larson
- 申请人: Randall L. Kubena , David T. Chang , Robert L. Larson
- 申请人地址: US CA Malibu US IL Chicago
- 专利权人: HRL Laboratories, LLC,The Boeing Company
- 当前专利权人: HRL Laboratories, LLC,The Boeing Company
- 当前专利权人地址: US CA Malibu US IL Chicago
- 代理机构: Ladas & Parry
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; G01C19/00 ; H03H9/24
摘要:
A disk resonator gyroscope includes a quartz base, a quartz resonator disk having a central pillar connected to the base, the quartz resonator disk having a surface facing the base and having plurality of circumferential slots in the surface of the quartz resonator disk around the central pillar, and an electrode comprised of quartz and connected to the base outside of an outer edge of the resonator disk.
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