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公开(公告)号：US08418554B2
公开(公告)日：2013-04-16
申请号：US12475963
申请日：2009-06-01
申请人： Richard J. Joyce
发明人： Richard J. Joyce
IPC分类号： G01C19/00
CPC分类号： G01C19/5663 , G01C19/5684 , Y10T29/49124
摘要： Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. In one embodiment, a packaged resonator gyroscope comprises a carrier, a substrate layer mounted to the carrier, a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate, and a resonator mounted to the baseplate and suspended in the cavity. Other embodiments may be described.
摘要翻译： 公开了平面谐振器陀螺仪的包装技术，例如盘式谐振器陀螺仪（DRG）。 在一个实施例中，封装谐振器陀螺仪包括载体，安装到载体的基底层，耦合到基底以限定基底和基板之间的空腔的基板，以及安装到基板并悬挂在空腔中的谐振器。 可以描述其他实施例。
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2.发明授权Method to locate and eliminate manufacturing defects in a quartz resonator gyro 失效定位和消除石英谐振器陀螺仪制造缺陷的方法公开(公告)号：US07972552B1
公开(公告)日：2011-07-05
申请号：US12269590
申请日：2008-11-12
申请人： Richard J. Joyce
发明人： Richard J. Joyce
IPC分类号： B29C35/08
CPC分类号： G01N21/8806 , G01N2021/8841 , G01N2021/8845
摘要： A method for locating and eliminating defects on a substrate wafer includes illuminating a top surface of the substrate wafer with a first illumination source, illuminating a bottom surface of the substrate wafer with a second illumination source, forming an image of a portion of the top surface of the substrate wafer while the substrate wafer is illuminated by the first and second illumination sources, adjusting a contrast of the image to accentuate defects on the top surface of the substrate wafer, locating defects in the image, and ablating the defects on the top surface with a laser.
摘要翻译： 用于定位和消除衬底晶片上的缺陷的方法包括用第一照明源照射衬底晶片的顶表面，用第二照明源照射衬底晶片的底表面，形成顶表面的一部分的图像 的衬底晶片，同时衬底晶片被第一和第二照明源照亮，调整图像的对比度以突出衬底晶片的顶表面上的缺陷，定位图像中的缺陷，并消除顶表面上的缺陷 用激光。
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公开(公告)号：US20100300202A1
公开(公告)日：2010-12-02
申请号：US12475963
申请日：2009-06-01
申请人： Richard J. Joyce
发明人： Richard J. Joyce
CPC分类号： G01C19/5663 , G01C19/5684 , Y10T29/49124
摘要： Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. In one embodiment, a packaged resonator gyroscope comprises a carrier, a substrate layer mounted to the carrier, a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate, and a resonator mounted to the baseplate and suspended in the cavity. Other embodiments may be described.
摘要翻译： 公开了平面谐振器陀螺仪的包装技术，例如盘式谐振器陀螺仪（DRG）。 在一个实施例中，封装谐振器陀螺仪包括载体，安装到载体的基底层，耦合到基底以限定基底和基板之间的空腔的基板，以及安装到基板并悬挂在空腔中的谐振器。 可以描述其他实施例。
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4.发明授权公开(公告)号：US06922118B2
公开(公告)日：2005-07-26
申请号：US10286375
申请日：2002-11-01
CPC分类号： H03H3/0077
摘要： A method for tuning an electro-mechanical device such as a MEMS device is disclosed. The method comprises operating a MEMS device in a depressurized system and using FIB micromachining to remove a portion of the MEMS device. Additionally, a method for tuning a plurality of MEMS devices by depositing an active layer and then removing a portion of the active layer using FIB micromachining. Also, a method for tuning a MEMS device and vacuum packaging the MEMS device in situ are provided.
摘要翻译： 公开了一种用于调整诸如MEMS器件的机电装置的方法。 该方法包括在减压系统中操作MEMS装置，并使用FIB微机械加工来去除MEMS装置的一部分。 另外，一种用于通过沉积有源层然后使用FIB微加工来去除一部分有源层来调谐多个MEMS器件的方法。 此外，提供了一种用于调谐MEMS器件并原位真空封装MEMS器件的方法。
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5.发明授权
公开(公告)号：US4885534A
公开(公告)日：1989-12-05
申请号：US244217
申请日：1988-09-14
申请人： Robert E. Eck , Richard J. Joyce
发明人： Robert E. Eck , Richard J. Joyce
IPC分类号： G01Q30/04 , G01R31/265
CPC分类号： G01R31/2653
摘要： Photodiode testing apparatus having the capability of directly measuring photodiode impedance. An E-beam machine is used for photodiode testing, the beam being selectively directed to different diodes in an array. A varying level of infrared flux is applied to the photodiode, causing the photodiode to develop ac voltage and current signals which are used for the direct measurement of impedance.
摘要翻译： 具有直接测量光电二极管阻抗能力的光电二极管测试装置。 电子束机用于光电二极管测试，光束被选择性地导向阵列中的不同二极管。 对光电二极管施加不同程度的红外线通量，使光电二极管产生用于直接测量阻抗的交流电压和电流信号。
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公开(公告)号：US4695794A
公开(公告)日：1987-09-22
申请号：US739832
申请日：1985-05-31
IPC分类号： G01R31/26 , G01R19/00 , G01R31/302 , G01R31/305 , H01L21/66 , H01L31/10 , G01R31/28
CPC分类号： G01R31/305
摘要： Method and apparatus for calibrating equipment used for testing photodiode arrays by reference to the diode under test. The diodes are illuminated with infrared radiation and different bias voltages, developed by bombardment with an electron beam, are measured at zero current. The measured voltage values are correlated with secondary emission sensor readouts to calibrate the sensor according to the specific diode being tested. Remote light emitting diodes generate the infrared radiation which is coupled to the photodiode array via optical fiber elements.
摘要翻译： 参考被测二极管校准用于测试光电二极管阵列的设备的方法和装置。 二极管用红外辐射照射，并且在零电流下测量通过用电子束轰击而产生的不同偏置电压。 测量的电压值与二次发射传感器读数相关，以根据正在测试的特定二极管校准传感器。 远程发光二极管产生经由光纤元件耦合到光电二极管阵列的红外辐射。
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公开(公告)号：US06238539B1
公开(公告)日：2001-05-29
申请号：US09344729
申请日：1999-06-25
IPC分类号： C25D2112
CPC分类号： C25D21/12
摘要： The dominant physical parameter that affects the internal stress of electroplated metals on substrates have been identified and their effects have been systematically studied. Thin electroplated metals have very high internal stresses, even though the substrate displacements are small. Increasing the electroplated metal's thickness greatly reduces the magnitude of the stress, which can be either tensile or compressive depending on the plating conditions, but it may not necessarily reduce the displacement of the substrate. Based on the research done in connection to this application, the relationship between the plating temperatures and the current density needed to obtain near-zero-stress state for electroplated nickel on silicon substrate can be deduced.
摘要翻译： 影响电镀金属对衬底内应力的主要物理参数已被确定，并对其影响进行了系统研究。 薄的电镀金属具有非常高的内应力，即使衬底位移较小。 增加电镀金属的厚度大大减小了应力的大小，其可以根据电镀条件而拉伸或压缩，但是它可能不一定会降低基板的位移。 基于与本申请相关的研究，可以推导出电镀温度与电解镍在硅衬底上获得接近零应力状态所需的电流密度之间的关系。
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8.发明授权Method to locate and eliminate manufacturing defects in a quartz resonator gyro 有权定位和消除石英谐振器陀螺仪制造缺陷的方法公开(公告)号：US08144317B1
公开(公告)日：2012-03-27
申请号：US13075784
申请日：2011-03-30
申请人： Richard J. Joyce
发明人： Richard J. Joyce
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N2021/8841 , G01N2021/8845
摘要： A method for locating and eliminating defects on a substrate wafer includes illuminating a top surface of the substrate wafer with a first illumination source, illuminating a bottom surface of the substrate wafer with a second illumination source, forming an image of a portion of the top surface of the substrate wafer while the substrate wafer is illuminated by the first and second illumination sources, adjusting a contrast of the image to accentuate defects on the top surface of the substrate wafer, locating defects in the image, and ablating the defects on the top surface with a laser.
摘要翻译： 用于定位和消除衬底晶片上的缺陷的方法包括用第一照明源照射衬底晶片的顶表面，用第二照明源照射衬底晶片的底表面，形成顶表面的一部分的图像 的衬底晶片，同时衬底晶片被第一和第二照明源照亮，调整图像的对比度以突出衬底晶片的顶表面上的缺陷，定位图像中的缺陷，并消除顶表面上的缺陷 用激光。
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9.发明授权公开(公告)号：US07282834B2
公开(公告)日：2007-10-16
申请号：US11148389
申请日：2005-06-07
IPC分类号： H01L41/08
CPC分类号： H03H3/0077
摘要： A method for tuning an electro-mechanical device such as a MEMS device is disclosed. The method comprises operating a MEMS device in a depressurized system and using FIB micromachining to remove a portion of the MEMS device. Additionally, a method for tuning a plurality of MEMS devices by depositing an active layer and then removing a portion of the active layer using FIB micromachining. Also, a method for tuning a MEMS device and vacuum packaging the MEMS device in situ are provided.
摘要翻译： 公开了一种用于调整诸如MEMS器件的机电装置的方法。 该方法包括在减压系统中操作MEMS装置，并使用FIB微机械加工来去除MEMS装置的一部分。 另外，一种用于通过沉积有源层然后使用FIB微加工来去除一部分有源层来调谐多个MEMS器件的方法。 此外，提供了一种用于调谐MEMS器件并原位真空封装MEMS器件的方法。
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10.发明授权
公开(公告)号：US5568124A
公开(公告)日：1996-10-22
申请号：US64680
申请日：1993-05-20
申请人： Richard J. Joyce , Allan R. Kramer
发明人： Richard J. Joyce , Allan R. Kramer
CPC分类号： G08B13/126
摘要： Apparatus and method for detecting unauthorized disturbance of a protected surface, includes a substrate adapted to conformably encase and adhere to the surface that is to be protected. A plurality of layers, each comprising a plurality of frangible conduits is embedded in the substrate and randomly overlays a majority of the protected surface. Each of the conduits has its ends protruding from the substrate to permit a monitor to be coupled thereto for monitoring the integrity of the continuity of each conduits, and for switching from a first state to a second state whenever the continuity of any of the conduits is broken. A warning alarm is coupled to the monitor for displaying the state of the monitor.
摘要翻译： 用于检测受保护表面的未经授权的干扰的装置和方法包括适于一致地包围并粘附到要被保护的表面的基底。 每个包括多个易碎导管的多个层被嵌入衬底中并随机地覆盖大部分受保护表面。 每个导管的端部从基板突出，以允许监视器与其连接，用于监视每个导管的连续性的完整性，并且每当导管的连续性是第一状态时，从第一状态切换到第二状态 破碎。 警告警报耦合到监视器以显示监视器的状态。
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