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    GLASS INSPECTION EQUIPMENT AND METHOD OF GLASS INSPECTION
    3.
    发明公开
    GLASS INSPECTION EQUIPMENT AND METHOD OF GLASS INSPECTION 审中-公开

    公开(公告)号：US20240027363A1

    公开(公告)日：2024-01-25

    申请号：US18120124

    申请日：2023-03-10

    申请人： Samsung Display Co., Ltd.

    发明人： YUNKU KANG ,  KITAEK KIM ,  SUNGMIN PARK ,  JANGHOON LEE ,  LEEGU HAN

    IPC分类号： G01N21/95 ,  G01N21/88 ,  G01N33/38

    CPC分类号： G01N21/95 ,  G01N21/8806 ,  G01N33/386 ,  G01N2021/8841

    摘要： A glass inspection equipment includes a first transfer rail extending in a first direction, where a glass including first sides and second sides extending in a direction intersecting the first sides reciprocates in the first direction, a rotation part on the first transfer rail to rotate the glass, an edge inspection part on the first transfer rail to inspect the first and second sides of the glass, and a surface inspection part which inspects a surface of the glass, the edge inspection part inspects the first sides when the glass with the first sides arranged parallel to the first direction is transferred under the edge inspection part, and the edge inspection part inspects the second sides when the glass transferred through the edge inspection part is rotated by the rotation part and the glass with the second sides parallel to the first direction is transferred under the edge inspection part.

    VISUAL INSPECTION SYSTEM FOR ANNULAR PRODUCT
    4.
    发明公开
    VISUAL INSPECTION SYSTEM FOR ANNULAR PRODUCT 审中-公开

    公开(公告)号：US20230298153A1

    公开(公告)日：2023-09-21

    申请号：US18119939

    申请日：2023-03-10

    申请人： DAIICHI JITSUGYO VISWILL CO., LTD.

    发明人： Koji MATSUI ,  Koichi SASAKI

    IPC分类号： G06T7/00 ,  G01N21/88

    CPC分类号： G06T7/0004 ,  G01N21/8806 ,  G01N2021/8841

    摘要： A visual inspection system includes a conveyance device conveying an inspection target on a glass plate in a rotating direction of the glass plate, an outer-side-surface image capturing device capturing an image of the inspection target at an outer-side-surface image capturing position, and a judgment device judging based on the captured image whether the inspection target is defective in appearance or not. The outer-side-surface image capturing device has an illumination unit for inspection and three image capturing units arranged around the illumination unit. Each image capturing unit includes first and second mirrors receiving light reflected from an outer side surface of the inspection target at position below the illumination unit, a third mirror reflecting reflected light from the first and second mirrors upward, and an imaging camera arranged above the third mirror.

    Upper Surface Foreign Material Detecting Device of Ultra-Thin Transparent Substrate
    7.
    发明申请
    Upper Surface Foreign Material Detecting Device of Ultra-Thin Transparent Substrate 有权
    超薄透明基板上表面异物检测装置

    公开(公告)号：US20160327494A1

    公开(公告)日：2016-11-10

    申请号：US14949335

    申请日：2015-11-23

    申请人： Nanoprotech Co., Ltd.

    发明人： Hyung Seok Lee ,  Yeong Ryeol Kim ,  Cheul Ock Chae ,  Jin Yong Kim ,  Soung Jin Kim

    IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/47

    CPC分类号： G01N21/94 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/4735 ,  G01N2021/8841 ,  G01N2021/8848 ,  G01N2021/8967

    摘要： Provided are a foreign material detecting device and method for detecting only a foreign material on a surface of a substrate except for a foreign material on a lower surface of the substrate in a manufacturing process of a transparent substrate passing light therethrough, such as a glass substrate used in a flat panel display (FPD) such as a liquid crystal display (LCD), an organic light emitting diode (OLED), a plasma display panel (PDP), etc., a sapphire wafer used in some of semiconductors, or the like, and in a pattern forming process in a manufacturing process of the FPD and the semiconductor using the transparent substrate. More particularly, provided are a foreign material detecting device and method for detecting only a foreign material on a surface of an ultra-thin transparent substrate having a thickness of 0.3 T or less.

    摘要翻译： 本发明提供一种外来物质检测装置和方法，用于在通过光的透明基板的制造过程中仅检测在基板的下表面上的异物的表面上的异物，例如玻璃基板 用于诸如液晶显示器（LCD），有机发光二极管（OLED），等离子体显示面板（PDP）等的平板显示器（FPD），用于一些半导体中的蓝宝石晶片，或者 并且在FPD的制造工艺和使用透明基板的半导体的图案形成工艺中。 更具体地，提供了一种异物检测装置和方法，用于仅检测厚度为0.3T或更小的超薄透明基板的表面上的异物。

    Edge inspection
    8.
    发明授权
    Edge inspection 有权
    边缘检查

    公开(公告)号：US07822260B2

    公开(公告)日：2010-10-26

    申请号：US12042052

    申请日：2008-03-04

    申请人： Cory Watkins ,  Mark Harless ,  Francy Abraham

    发明人： Cory Watkins ,  Mark Harless ,  Francy Abraham

    IPC分类号： G06K9/00 ,  G01N21/86

    CPC分类号： G01N21/9503 ,  G01N2021/8825 ,  G01N2021/8841

    摘要： A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.

    摘要翻译： 半导体检测工具包括用于获得晶片顶部边缘的图像的边缘顶部相机，用于获得晶片的正常边缘的图像的边缘正常照相机，以及用于接收晶片顶部边缘的图像的控制器，以及 晶片的正常边缘的图像并且用于分析晶片的顶部边缘的图像以及用于晶片边缘缺陷的晶片的法线边缘的图像。

    Dust and scratch detection for an image scanner
    9.
    发明申请
    Dust and scratch detection for an image scanner 失效
    图像扫描仪的灰尘和划痕检测

    公开(公告)号：US20050023492A1

    公开(公告)日：2005-02-03

    申请号：US10931317

    申请日：2004-08-31

    申请人： Robert Gann ,  Kurt Spears

    发明人： Robert Gann ,  Kurt Spears

    IPC分类号： G01N21/88 ,  H04N1/409 ,  G01N21/86 ,  G01V8/00

    CPC分类号： G01N21/8806 ,  G01N2021/8841 ,  H04N1/4097

    摘要： Multiple scans of the same object are obtained, where for any given line on the object to be scanned, the angle of the illumination is different for each scan. The different scans are obtained from different rows of photosensors that are separated. Because the angles of illumination are different, the resulting shadows in each scan are different. The multiple scans may be combined into a single composite color image. In a composite image, a dust particle may generate a series of overlapping shadows, where each shadow is a different color. Searching the composite image for the unique pattern of colors may identify artifacts or defects. Alternatively, the data for one scanned image may be compared to the data for another scanned image, and any differences may be due to shadows, which may indicate defects.

    摘要翻译： 获得相同对象的多次扫描，对于要扫描的对象上的任何给定行，每次扫描的照明角度不同。 从分离的不同行的光电传感器获得不同的扫描。 因为照明角度不同，所以每次扫描中产生的阴影是不同的。 多个扫描可以组合成单个复合彩色图像。 在复合图像中，灰尘颗粒可能产生一系列重叠的阴影，其中每个阴影是不同的颜色。 搜索合成图像以获得唯一的颜色图案可能会识别伪影或缺陷。 或者，可以将一个扫描图像的数据与另一扫描图像的数据进行比较，并且任何差异可能是由于阴影引起的，这可能表示缺陷。

    Dust and scratch detection for an image scanner
    10.
    发明申请
    Dust and scratch detection for an image scanner 审中-公开
    图像扫描仪的灰尘和划痕检测

    公开(公告)号：US20020195577A1

    公开(公告)日：2002-12-26

    申请号：US10226859

    申请日：2002-08-22

    发明人： Robert G. Gann ,  Kurt E. Spears

    IPC分类号： G01N021/88

    CPC分类号： G01N21/8806 ,  G01N2021/8841 ,  H04N1/4097

    摘要： Multiple scans of the same object are obtained, where for any given line on the object to be scanned, the angle of the illumination is different for each scan. The different scans are obtained from different rows of photosensors that are separated. Because the angles of illumination are different, the resulting shadows in each scan are different. The multiple scans may be combined into a single composite color image. In a composite image, a dust particle may generate a series of overlapping shadows, where each shadow is a different color. Searching the composite image for the unique pattern of colors may identify artifacts or defects. Alternatively, the data for one scanned image may be compared to the data for another scanned image, and any differences may be due to shadows, which may indicate defects.

    摘要翻译： 获得相同对象的多次扫描，对于要扫描的对象上的任何给定行，每次扫描的照明角度不同。 从分离的不同行的光电传感器获得不同的扫描。 因为照明角度不同，所以每次扫描中产生的阴影是不同的。 多个扫描可以组合成单个复合彩色图像。 在复合图像中，灰尘颗粒可能产生一系列重叠的阴影，其中每个阴影是不同的颜色。 搜索合成图像以获得唯一的颜色图案可能会识别伪影或缺陷。 或者，可以将一个扫描图像的数据与另一扫描图像的数据进行比较，并且任何差异可能是由于阴影引起的，这可能表示缺陷。