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公开(公告)号:US08338906B2
公开(公告)日:2012-12-25
申请号:US12329677
申请日:2008-12-08
Applicant: Ping-Chun Yeh , Der-Chyang Yeh , Ruey-Hsin Liu , Mingo Liu
Inventor: Ping-Chun Yeh , Der-Chyang Yeh , Ruey-Hsin Liu , Mingo Liu
IPC: H01L29/66
CPC classification number: H01L27/0814 , H01L29/0692 , H01L29/417 , H01L29/872
Abstract: An integrated circuit structure has a metal silicide layer formed on an n-type well region, a p-type guard ring formed on the n-type well region and encircling the metal silicide layer. The outer portion of the metal silicide layer extends to overlap the inner edge of the guard ring, and a Schottky barrier is formed at the junction of the internal portion of the metal silicide layer and the well region. A conductive contact is in contact with the internal portion and the outer portion of the metal silicide layer.
Abstract translation: 集成电路结构具有形成在n型阱区上的金属硅化物层,形成在n型阱区上并环绕金属硅化物层的p型保护环。 金属硅化物层的外部部分延伸成与保护环的内边缘重叠,并且在金属硅化物层的内部部分与阱区域的接合处形成肖特基势垒。 导电接触件与金属硅化物层的内部部分和外部部分接触。
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公开(公告)号:US20090283841A1
公开(公告)日:2009-11-19
申请号:US12329677
申请日:2008-12-08
Applicant: Ping-Chun Yeh , Der-Chyang Yeh , Ruey-Hsin Liu , Mingo Liu
Inventor: Ping-Chun Yeh , Der-Chyang Yeh , Ruey-Hsin Liu , Mingo Liu
IPC: H01L29/872 , H01L29/78 , H01L27/088
CPC classification number: H01L27/0814 , H01L29/0692 , H01L29/417 , H01L29/872
Abstract: An integrated circuit structure has a metal silicide layer formed on an n-type well region, a p-type guard ring formed on the n-type well region and encircling the metal silicide layer. The outer portion of the metal silicide layer extends to overlap the inner edge of the guard ring, and a Schottky barrier is formed at the junction of the internal portion of the metal silicide layer and the well region. A conductive contact is in contact with the internal portion and the outer portion of the metal silicide layer.
Abstract translation: 集成电路结构具有形成在n型阱区上的金属硅化物层,形成在n型阱区上并环绕金属硅化物层的p型保护环。 金属硅化物层的外部部分延伸成与保护环的内边缘重叠,并且在金属硅化物层的内部部分与阱区域的接合处形成肖特基势垒。 导电接触件与金属硅化物层的内部部分和外部部分接触。
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公开(公告)号:US09818859B2
公开(公告)日:2017-11-14
申请号:US13219283
申请日:2011-08-26
Applicant: Chi-Chih Chen , Kun-Hsuan Tien , Ruey-Hsin Liu
Inventor: Chi-Chih Chen , Kun-Hsuan Tien , Ruey-Hsin Liu
IPC: H01L29/78 , H01L21/336 , H01L29/66 , H01L29/417 , H01L29/423 , H01L29/08
CPC classification number: H01L29/7809 , H01L29/0878 , H01L29/41766 , H01L29/41775 , H01L29/42368 , H01L29/42376 , H01L29/66734
Abstract: A MOSFET includes a semiconductor substrate having a top surface, a body region of a first conductivity type in the semiconductor substrate, and a double diffused drain (DDD) region having a top surface lower than a bottom surface of the body region. The DDD region is of a second conductivity type opposite the first conductivity type. The MOSFET further includes a gate oxide, and a gate electrode separated from the body region by the gate oxide. A portion of the gate oxide and a portion of the gate electrode are below the top surface of the body region.
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公开(公告)号:US09450056B2
公开(公告)日:2016-09-20
申请号:US13351295
申请日:2012-01-17
Applicant: Chun-Wai Ng , Ruey-Hsin Liu , Jun Cai , Hsueh-Liang Chou , Chi-Chih Chen
Inventor: Chun-Wai Ng , Ruey-Hsin Liu , Jun Cai , Hsueh-Liang Chou , Chi-Chih Chen
IPC: H01L29/78 , H01L29/40 , H01L29/423 , H01L29/06
CPC classification number: H01L29/7816 , H01L29/0649 , H01L29/0696 , H01L29/1095 , H01L29/402 , H01L29/42368
Abstract: An LDMOS transistor with a dummy gate comprises an extended drift region formed over a substrate, a drain region formed in the extended drift region, a channel region formed in the extended drift region, a source region formed in the channel region and a dielectric layer formed over the extended drift region. The LDMOS transistor with a dummy gate further comprises an active gate formed over the channel region and a dummy gate formed over the extended drift region. The dummy gate helps to reduce the gate charge of the LDMOS transistor while maintaining the breakdown voltage of the LDMOS transistor.
Abstract translation: 具有伪栅极的LDMOS晶体管包括形成在衬底上的扩展漂移区,形成在扩展漂移区中的漏极区,形成在扩展漂移区中的沟道区,形成在沟道区中的源极区和形成的电介质层 在扩展漂移区域上。 具有伪栅极的LDMOS晶体管还包括形成在沟道区上的有源栅极和形成在扩展漂移区上的伪栅极。 虚拟栅极有助于降低LDMOS晶体管的栅极电荷,同时保持LDMOS晶体管的击穿电压。
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5.
公开(公告)号:US09373619B2
公开(公告)日:2016-06-21
申请号:US13195156
申请日:2011-08-01
Applicant: Ru-Yi Su , Fu-Chih Yang , Chun Lin Tsai , Chih-Chang Cheng , Ruey-Hsin Liu
Inventor: Ru-Yi Su , Fu-Chih Yang , Chun Lin Tsai , Chih-Chang Cheng , Ruey-Hsin Liu
CPC classification number: H01L29/0646 , H01L23/535 , H01L27/0802 , H01L28/20 , H01L29/0623 , H01L29/063 , H01L29/36 , H01L29/404 , H01L29/405 , H01L29/66136 , H01L29/7835 , H01L29/8611
Abstract: Provided is a high voltage semiconductor device. The high voltage semiconductor device includes a substrate that includes a doped well disposed therein. The doped well and the substrate have opposite doping polarities. The high voltage semiconductor device includes an insulating device disposed over the doped well. The high voltage semiconductor device includes an elongate resistor disposed over the insulating device. A non-distal portion of the resistor is coupled to the doped well. The high voltage semiconductor device includes a high-voltage junction termination (HVJT) device disposed adjacent to the resistor.
Abstract translation: 提供高压半导体器件。 高电压半导体器件包括其中布置有掺杂阱的衬底。 掺杂阱和衬底具有相反的掺杂极性。 高电压半导体器件包括设置在掺杂阱上的绝缘器件。 高电压半导体器件包括设置在绝缘器件上的细长电阻器。 电阻器的非远端部分耦合到掺杂阱。 高电压半导体器件包括邻近电阻器设置的高压结端接(HVJT)器件。
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公开(公告)号:US08933507B2
公开(公告)日:2015-01-13
申请号:US13545131
申请日:2012-07-10
Applicant: Chun-Wai Ng , Hsueh-Liang Chou , Po-Chih Su , Ruey-Hsin Liu
Inventor: Chun-Wai Ng , Hsueh-Liang Chou , Po-Chih Su , Ruey-Hsin Liu
IPC: H01L29/66
CPC classification number: H01L29/7813 , H01L21/823418 , H01L21/823456 , H01L27/0922 , H01L29/407 , H01L29/41766 , H01L29/456 , H01L29/4941 , H01L29/66734 , H01L29/78 , H01L29/7809 , H01L29/7816 , H01L29/7835
Abstract: The present disclosure relates to a power MOSFET device having a relatively low resistance hybrid gate electrode that enables good switching performance. In some embodiments, the power MOSFET device has a semiconductor body. An epitaxial layer is disposed on the semiconductor body. A hybrid gate electrode, which controls the flow of electrons between a source electrode and a drain electrode, is located within a trench extending into the epitaxial layer. The hybrid gate electrode has an inner region having a low resistance metal, an outer region having a polysilicon material, and a barrier region disposed between the inner region and the outer region. The low resistance of the inner region provides for a low resistance to the hybrid gate electrode that enables good switching performance for the power MOSFET device.
Abstract translation: 本公开涉及具有相对低电阻的混合栅电极的功率MOSFET器件,其实现良好的开关性能。 在一些实施例中,功率MOSFET器件具有半导体本体。 外延层设置在半导体本体上。 控制源电极和漏电极之间的电子流的混合栅电极位于延伸到外延层中的沟槽内。 混合栅极具有具有低电阻金属的内部区域,具有多晶硅材料的外部区域和设置在内部区域和外部区域之间的阻挡区域。 内部区域的低电阻提供了对功率MOSFET器件具有良好开关性能的混合栅电极的低电阻。
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公开(公告)号:US08796760B2
公开(公告)日:2014-08-05
申请号:US13420248
申请日:2012-03-14
Applicant: Chih-Chang Cheng , Fu-Yu Chu , Ruey-Hsin Liu
Inventor: Chih-Chang Cheng , Fu-Yu Chu , Ruey-Hsin Liu
IPC: H01L29/78 , H01L21/336
CPC classification number: H01L29/7809 , H01L21/265 , H01L21/2815 , H01L29/0696 , H01L29/0878 , H01L29/407 , H01L29/41741 , H01L29/41766 , H01L29/4236 , H01L29/42364 , H01L29/42368 , H01L29/42376 , H01L29/66666 , H01L29/66734 , H01L29/7813 , H01L29/7827
Abstract: A manufacture includes a doped layer, a body structure over the doped layer, a trench defined in the doped layer, an insulator partially filling the trench, and a first conductive feature buried in, and separated from the doped layer and the body structure by, the insulator. The doped layer has a first type doping. The body structure has an upper surface and includes a body region. The body region has a second type doping different from the first type doping. The trench has a bottom surface. The first conductive feature extends from a position substantially leveled with the upper surface of the body structure toward the bottom surface of the trench. The first conductive feature overlaps the doped layer for an overlapping distance, and the overlapping distance ranging from 0 to 2 μm.
Abstract translation: 一种制造方法包括掺杂层,掺杂层上的体结构,在掺杂层中限定的沟槽,部分地填充沟槽的绝缘体,以及掩埋在掺杂层和体结构中并与掺杂层和体结构分离的第一导电特征, 绝缘体。 掺杂层具有第一类掺杂。 身体结构具有上表面并且包括身体区域。 体区具有不同于第一类掺杂的第二类型掺杂。 沟槽有一个底面。 第一导电特征从基本上与主体结构的上表面平齐的位置延伸到沟槽的底表面。 第一导电特征与掺杂层重叠重叠距离,重叠距离范围为0至2μm。
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公开(公告)号:US20140008724A1
公开(公告)日:2014-01-09
申请号:US13541539
申请日:2012-07-03
Applicant: Hsueh-Liang Chou , Chun-Wai Ng , Po-Chih Su , Ruey-Hsin Liu
Inventor: Hsueh-Liang Chou , Chun-Wai Ng , Po-Chih Su , Ruey-Hsin Liu
IPC: H01L27/088
CPC classification number: H01L29/1083 , H01L21/761 , H01L27/088 , H01L27/092 , H01L29/0623 , H01L29/0638 , H01L29/0653 , H01L29/0696 , H01L29/0852 , H01L29/1095 , H01L29/66659 , H01L29/7816 , H01L29/7833 , H01L29/7835
Abstract: A MOS transistor comprises a substrate of a first conductivity, a first region of the first conductivity formed over the substrate, a second region of the first conductivity formed in the first region, a first drain/source region of a second conductivity formed in the second region, a second drain/source region of the second conductivity and a body contact region of the first conductivity, wherein the body contact region and the first drain/source region are formed in an alternating manner from a top view.
Abstract translation: MOS晶体管包括第一导电性的衬底,在衬底上形成的第一导电体的第一区域,形成在第一区域中的第一导电体的第二区域,形成在第二导电层中的第二导电性的第一漏极/源极区域 区域,第二导电性的第二漏极/源极区域和第一导电体的本体接触区域,其中从顶视图以交替方式形成体接触区域和第一漏极/源极区域。
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9.
公开(公告)号:US20130320431A1
公开(公告)日:2013-12-05
申请号:US13486768
申请日:2012-06-01
Applicant: Po-Chih Su , Hsueh-Liang Chou , Ruey-Hsin Liu , Chun-Wai Ng
Inventor: Po-Chih Su , Hsueh-Liang Chou , Ruey-Hsin Liu , Chun-Wai Ng
IPC: H01L29/78 , H01L21/336
CPC classification number: H01L29/66666 , H01L21/30604 , H01L21/743 , H01L21/76877 , H01L21/823456 , H01L21/823487 , H01L21/823493 , H01L27/088 , H01L27/098 , H01L29/0847 , H01L29/402 , H01L29/7827 , H01L29/7833
Abstract: A device includes a semiconductor region in a semiconductor chip, a gate dielectric layer over the semiconductor region, and a gate electrode over the gate dielectric. A drain region is disposed at a top surface of the semiconductor region and adjacent to the gate electrode. A gate spacer is on a sidewall of the gate electrode. A dielectric layer is disposed over the gate electrode and the gate spacer. A conductive field plate is over the dielectric layer, wherein the conductive field plate has a portion on a drain side of the gate electrode. A deep metal via is disposed in the semiconductor region. A source electrode is underlying the semiconductor region, wherein the source electrode is electrically shorted to the conductive field plate through the deep metal via.
Abstract translation: 一种器件包括半导体芯片中的半导体区域,半导体区域上的栅极电介质层和栅极电介质上的栅电极。 漏极区域设置在半导体区域的顶表面并与栅电极相邻。 栅极间隔物位于栅电极的侧壁上。 电介质层设置在栅电极和栅间隔物上。 导电场板在电介质层的上方,其中导电场板具有在栅电极的漏极侧的一部分。 深金属通孔设置在半导体区域中。 源电极位于半导体区域的下方,其中源电极通过深金属通孔与导电场板电短路。
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公开(公告)号:US08598679B2
公开(公告)日:2013-12-03
申请号:US12956025
申请日:2010-11-30
Applicant: Chih-Chang Cheng , Ruey-Hsin Liu , Ru-Yi Su , Fu-Chih Yang , Chun Lin Tsai
Inventor: Chih-Chang Cheng , Ruey-Hsin Liu , Ru-Yi Su , Fu-Chih Yang , Chun Lin Tsai
IPC: H01L23/52
CPC classification number: H01L27/0288 , H01L23/5256 , H01L27/0255 , H01L27/0629 , H01L2924/0002 , H01L2924/00
Abstract: The present disclosure provides a semiconductor device that includes a transistor including a substrate, a source, a drain, and a gate, and a fuse stacked over the transistor. The fuse includes an anode contact coupled to the drain of the transistor, a cathode contact, and a resistor coupled to the cathode contact and the anode contact via a first Schottky diode and a second Schottky diode, respectively. A method of fabricating such semiconductor devices is also provided.
Abstract translation: 本公开提供了一种半导体器件,其包括晶体管,其包括衬底,源极,漏极和栅极以及堆叠在晶体管上的熔丝。 保险丝包括耦合到晶体管的漏极的阳极触点,阴极触点和分别经由第一肖特基二极管和第二肖特基二极管耦合到阴极触点和阳极触点的电阻器。 还提供了一种制造这种半导体器件的方法。
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