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公开(公告)号:US10989985B2
公开(公告)日:2021-04-27
申请号:US16831532
申请日:2020-03-26
Inventor: Kentaro Miyano , Naoya Ryoki , Akihiko Ishibashi , Masaki Nobuoka
Abstract: Provided herein is a wavelength converter capable of producing shorter wavelengths by wavelength conversion than in related art. A wavelength converter of the present disclosure includes: a first layer formed of a single crystal represented by general formula RAMO4; and a second layer formed of a single crystal represented by the general formula RAMO4 and having a direction of polarization reversed 180° from a direction of polarization of the first layer, wherein, in the general formula, R represents one or more trivalent elements selected from the group consisting of Sc, In, Y, and a lanthanoid element, A represents one or more trivalent elements selected from the group consisting of Fe(III), Ga, and Al, and M represents one or more divalent elements selected from the group consisting of Mg, Mn, Fe(II), Co, Cu, Zn, and Cd.
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公开(公告)号:US11441237B2
公开(公告)日:2022-09-13
申请号:US16691542
申请日:2019-11-21
Inventor: Naoya Ryoki , Kentaro Miyano , Masaki Nobuoka , Akihiko Ishibashi
Abstract: A RAMO4 substrate that does not easily crack during or after the formation of group III nitride crystal includes a single crystal represented by general formula RAMO4 (wherein R represents one or more trivalent elements selected from the group consisting of Sc, In, Y, and lanthanoid elements, A represents one or more trivalent elements selected from the group consisting of Fe(III), Ga, and Al, and M represents one or more divalent elements selected from the group consisting of Mg, Mn, Fe(II), Co, Cu, Zn, and Cd). The RAMO4 substrate has a crystal plane with a curvature radius r of 52 m or more, and a square value of correlation coefficient ρ of 0.81 or more. The curvature radius r is calculated as an absolute value from X-ray peak position ωi and measurement position Xi after the measurements of X-ray peak positions ωi at a plurality of positions Xi lying on a straight line passing through the center of the RAMO4 substrate. The correlation coefficient ρ is a measure of correlation between ω and measurement position Xi.
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公开(公告)号:US10350725B2
公开(公告)日:2019-07-16
申请号:US15424529
申请日:2017-02-03
Inventor: Yoshifumi Takasu , Yoshio Okayama , Akihiko Ishibashi , Isao Tashiro , Akio Ueta , Masaki Nobuoka , Naoya Ryoki
Abstract: A RAMO4 substrate is formed from single crystal represented by a formula of RAMO4 (in the formula, R indicates one or a plurality of trivalent elements selected from a group consisting of Sc, In, Y, and a lanthanoid element, A indicates one or a plurality of trivalent elements selected from a group consisting of Fe(III), Ga, and Al, and M indicates one or a plurality of bivalent elements selected form a group consisting of Hg, Mn, Fe(II), Co, Cu, Zn, and Cd). An epitaxially-grown surface is provided on at least one surface of the RAMO4 substrate. The epitaxially-grown surface includes a plurality of cleavage surfaces which are regularly distributed, and are separated from each other.
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公开(公告)号:US11643752B2
公开(公告)日:2023-05-09
申请号:US16739105
申请日:2020-01-09
Inventor: Kentaro Miyano , Naoya Ryoki , Akihiko Ishibashi , Masaki Nobuoka
Abstract: A ScAlMgO4 monocrystalline substrate that is highly cleavable and that does not easily cause cracking in the GaN film id grown on the substrate and a method for manufacturing such a ScAlMgO4 monocrystalline substrate are provided. The ScAlMgO4 monocrystalline substrate has a crystal oxygen concentration of 57 atom % or less as measured by inductively coupled plasma atomic emission spectroscopy analysis.
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公开(公告)号:US11370076B2
公开(公告)日:2022-06-28
申请号:US15424244
申请日:2017-02-03
Inventor: Yoshifumi Takasu , Yoshio Okayama , Akihiko Ishibashi , Isao Tashiro , Akio Ueta , Masaki Nobuoka , Naoya Ryoki
Abstract: A RAMO4 substrate includes a single crystal represented by a formula of RAMO4 (in the formula, R indicates one or a plurality of trivalent elements selected from a group consisting of Sc, In, Y, and a lanthanoid element, A indicates one or a plurality of trivalent elements selected from a group consisting of Fe(III), Ga, and Al, and M indicates one or a plurality of bivalent elements selected from a group consisting of Mg, Mn, Fe(II), Co, Cu, Zn, and Cd). An epitaxially-grown surface is provided on one surface of the RAMO4 substrate, a satin-finish surface is provided on another surface. The satin-finish surface has surface roughness which is larger than that of the epitaxially-grown surface.
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公开(公告)号:US11437773B2
公开(公告)日:2022-09-06
申请号:US16889279
申请日:2020-06-01
Inventor: Naoya Ryoki , Kentaro Miyano , Hiroshi Ohno , Akihiko Ishibashi , Masaki Nobuoka
Abstract: A wavelength conversion device including a cavity that includes an RAMO4 crystal having a single crystal represented by a first general formula of RAMO4, a laser crystal, and a mirror, in which in the first general formula, R represents one or a plurality of trivalent elements selected from the group consisting of Sc, In, Y, and lanthanoid elements, A represents one or a plurality of trivalent elements selected from the group consisting of Fe (III), Ga, and Al, and M represents one or a plurality of divalent elements selected from the group consisting of Mg, Mn, Fe (II), Co, Cu, Zn, and Cd.
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公开(公告)号:US10304740B2
公开(公告)日:2019-05-28
申请号:US15825035
申请日:2017-11-28
Inventor: Shinsuke Komatsu , Yoshio Okayama , Masaki Nobuoka
Abstract: An RAMO4 substrate that includes an RAMO4 monocrystalline substrate formed of a single crystal represented by general formula RAMO4, wherein R represents one or more trivalent elements selected from the group consisting of Sc, In, Y, and lanthanoid elements, A represents one or more trivalent elements selected from the group consisting of Fe(III), Ga, and Al, and M represents one or more divalent elements selected from the group consisting of Mg, Mn, Fe(II), Co, Cu, Zn, and Cd. The RAMO4 monocrystalline substrate has a principal surface with a plurality of grooves. The principal surface has an off-angle θ with respect to a cleaving surface of the single crystal. The RAMO4 monocrystalline substrate satisfies tan θ≤Wy/Wx, where Wx is the width at the top surface of a raised portion between the grooves, and Wy is the height of the raised portion.
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