公开(公告)号：US20160181065A1

公开(公告)日：2016-06-23

申请号：US14966521

申请日：2015-12-11

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Sumito NAKADA

IPC: H01J37/317 ,  H01J37/302

CPC classification number: H01J37/3177 ,  H01J37/304 ,  H01J2237/30466 ,  H01J2237/31793

Abstract: A charged particle beam drawing apparatus has a drawing unit including a charged particle source, a deflector and a stage on which a target object is placed, to perform drawing with a charged particle beam on a plurality of drawing regions on the target object, and a calculator to calculate a drawing progress ratio on the target object using a ratio of a drawn area of the drawing regions to a total area of the drawing regions.

Abstract translation: 带电粒子束描绘装置具有包括带电粒子源，偏转器和放置目标物体的台阶的绘图单元，以在目标物体上的多个绘图区域上进行带电粒子束的绘制，以及 使用绘制区域的绘制面积与绘制区域的总面积的比率来计算目标对象上的绘制进度比。

公开(公告)号：US20140166869A1

公开(公告)日：2014-06-19

申请号：US14090041

申请日：2013-11-26

Applicant: NuFlare Technology, Inc.

Inventor： Sumito NAKADA ,  Hikaru Yamamura ,  Osamu IIzuka ,  Hideyuki Tsurumaki

IPC: H01J37/304 ,  H01J37/317

CPC classification number: H01J37/3045 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3002 ,  H01J37/3174 ,  H01J37/3177

Abstract: A charged particle beam writing method according to embodiments of the present disclosure includes: storing in a charged particle beam writing apparatus a position coordinate at which a drift amount is diagnosed; storing in the charged particle beam writing apparatus first and second time interval patterns which define time intervals to diagnose the drift amount of the charged particle beam; performing first writing of irradiating a target object with the charged particle beam, and writing a writing pattern on the target object while diagnosing the drift amount based on the first time interval pattern during the writing; and performing second writing of writing a predetermined writing pattern while diagnosing the drift amount when the writing reaches the position coordinate and diagnosing the drift amount based on the second time interval pattern during the writing after the writing reaches the position coordinate.

Abstract translation: 根据本公开实施例的带电粒子束写入方法包括：在带电粒子束写入装置中存储测量漂移量的位置坐标; 存储在带电粒子束写入装置中的第一和第二时间间隔图案，其限定时间间隔以诊断带电粒子束的漂移量; 执行用带电粒子束照射目标物体的第一写入，并且在写入期间基于第一时间间隔图案来诊断漂移量，将目标对象写入写入模式; 以及在写入到达位置坐标时诊断漂移量并且在写入到达位置坐标之后在写入期间基于第二时间间隔图案来诊断漂移量，执行写入预定写入模式的第二写入。

公开(公告)号：US20130177855A1

公开(公告)日：2013-07-11

申请号：US13737707

申请日：2013-01-09

Applicant: NuFlare Technology, Inc.

Inventor： Sumito NAKADA ,  Osamu IIZUKA ,  Hikaru YAMAMURA

IPC: G21K5/10

CPC classification number: G21K5/10 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/30455 ,  H01J2237/31761 ,  H01J2237/31776 ,  H01J2237/31796

Abstract: A charged-particle beam drawing method includes: storing a plurality of time interval patterns defining time intervals for performing a diagnosis of a drift amount of charged-particle beam; drawing a predetermined drawing pattern on a sample by irradiating the beam on the sample; receiving first event information including occurrence of event and type of event; acquiring region information specifying a region being drawn by the beam; selecting a specific time interval pattern from the plurality of time interval patterns based on the type of the event of the first event information and the region information; diagnosing the drift amount of the beam based on the specific time interval pattern, until second event information is received, the second event information includes occurrence of event and type of event; and drawing a predetermined drawing pattern on the sample while performing a drift correction of the charged-particle beam, based on the diagnosing.

Abstract translation: 带电粒子束描绘方法包括：存储多个时间间隔图案，其限定用于执行带电粒子束漂移量的诊断的时间间隔; 通过将光束照射在样品上，在样品上绘制预定的图形; 接收包括事件发生和事件类型的第一事件信息; 获取指定由所述光束绘制的区域的区域信息; 基于所述第一事件信息和所述区域信息的事件的类型，从所述多个时间间隔模式中选择特定时间间隔模式; 基于所述特定时间间隔模式来诊断所述波束的漂移量，直到接收到第二事件信息，所述第二事件信息包括事件的发生和事件的类型; 并且基于诊断，在进行带电粒子束的漂移校正的同时，在样本上绘制预定的绘图图案。