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公开(公告)号:US20230329010A1
公开(公告)日:2023-10-12
申请号:US17714771
申请日:2022-04-06
Applicant: Micron Technology, Inc.
Inventor: Fabio Pellizzer , Russell L. Meyer , Stephen W. Russell , Lorenzo Fratin
CPC classification number: H01L27/249 , H01L45/06 , H01L45/141 , H01L45/1675
Abstract: Methods, systems, and devices for trench and pier architectures for three-dimensional memory arrays are described. A semiconductor device (e.g., a memory die) may include pier structures formed in contact with features formed from alternating layers of materials deposited over a substrate, which may provide support for subsequent processing. For example, a memory die may include alternating layers of a first material and a second material, which may be formed into various cross-sectional patterns. Pier structures may be formed in contact with the cross sectional patterns such that, when either the first material or the second material is removed to form voids, the pier structures may provide mechanical support of the cross-sectional pattern of the remaining material. In some examples, such pier structures may be formed within or along trenches or other features aligned along a direction of a memory array, which may provide a degree of self-alignment for subsequent operations.
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公开(公告)号:US20220366974A1
公开(公告)日:2022-11-17
申请号:US17816612
申请日:2022-08-01
Applicant: Micron Technology, Inc.
Inventor: Innocenzo Tortorelli , Russell L. Meyer , Agostino Pirovano , Andrea Redaelli , Lorenzo Fratin , Fabio Pellizzer
Abstract: Disclosed herein is a memory cell including a memory element and a selector device. Data may be stored in both the memory element and selector device. The memory cell may be programmed by applying write pulses having different polarities and magnitudes. Different polarities of the write pulses may program different logic states into the selector device. Different magnitudes of the write pulses may program different logic states into the memory element. The memory cell may be read by read pulses all having the same polarity. The logic state of the memory cell may be detected by observing different threshold voltages when the read pulses are applied. The different threshold voltages may be responsive to the different polarities and magnitudes of the write pulses.
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公开(公告)号:US20190287614A1
公开(公告)日:2019-09-19
申请号:US15925536
申请日:2018-03-19
Applicant: Micron Technology, Inc.
Inventor: Lorenzo Fratin , Fabio Pellizzer , Agostino Pirovano , Russell L. Meyer
IPC: G11C13/00 , H01L23/528
Abstract: Methods, systems, and devices for self-selecting memory with horizontal access lines are described. A memory array may include first and second access lines extending in different directions. For example, a first access line may extend in a first direction, and a second access line may extend in a second direction. At each intersection, a plurality of memory cells may exist, and each plurality of memory cells may be in contact with a self-selecting material (SSM). Further, a dielectric material may be positioned between a first plurality of memory cells and a second plurality of memory cells in at least one direction each cell group (e.g., a first and second plurality of memory cells) may be in contact with one of the first access lines and second access lines, respectively.
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公开(公告)号:US12100447B2
公开(公告)日:2024-09-24
申请号:US17864015
申请日:2022-07-13
Applicant: Micron Technology, Inc.
Inventor: Lorenzo Fratin , Fabio Pellizzer , Agostino Pirovano , Russell L. Meyer
IPC: G11C13/00 , H01L23/528
CPC classification number: G11C13/0007 , G11C13/0026 , H01L23/528 , G11C2213/71
Abstract: Methods, systems, and devices for self-selecting memory with horizontal access lines are described. A memory array may include first and second access lines extending in different directions. For example, a first access line may extend in a first direction, and a second access line may extend in a second direction. At each intersection, a plurality of memory cells may exist, and each plurality of memory cells may be in contact with a self-selecting material. Further, a dielectric material may be positioned between a first plurality of memory cells and a second plurality of memory cells in at least one direction. each cell group (e.g., a first and second plurality of memory cells) may be in contact with one of the first access lines and second access lines, respectively.
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公开(公告)号:US11798620B2
公开(公告)日:2023-10-24
申请号:US17816612
申请日:2022-08-01
Applicant: Micron Technology, Inc.
Inventor: Innocenzo Tortorelli , Russell L. Meyer , Agostino Pirovano , Andrea Redaelli , Lorenzo Fratin , Fabio Pellizzer
CPC classification number: G11C11/5678 , G11C13/0004 , G11C13/004 , G11C13/0061 , G11C13/0069 , G11C2013/005 , G11C2013/0052 , G11C2013/0073 , G11C2013/0092 , G11C2213/71 , G11C2213/76
Abstract: Disclosed herein is a memory cell including a memory element and a selector device. Data may be stored in both the memory element and selector device. The memory cell may be programmed by applying write pulses having different polarities and magnitudes. Different polarities of the write pulses may program different logic states into the selector device. Different magnitudes of the write pulses may program different logic states into the memory element. The memory cell may be read by read pulses all having the same polarity. The logic state of the memory cell may be detected by observing different threshold voltages when the read pulses are applied. The different threshold voltages may be responsive to the different polarities and magnitudes of the write pulses.
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公开(公告)号:US20240312521A1
公开(公告)日:2024-09-19
申请号:US18593671
申请日:2024-03-01
Applicant: Micron Technology, Inc.
Inventor: Fabio Pellizzer , Russell L. Meyer , Stephen W. Russell , Lorenzo Fratin
CPC classification number: G11C16/0483 , H10B43/10 , H10B43/20
Abstract: Methods, systems, and devices for trench and multiple pier architecture for three-dimensional memory arrays are described. Manufacturing operations for a memory device may include forming trenches, and subsequently forming multiple types of pier structures extending between the trenches in a first horizontal direction, in a second horizontal direction or both. For example, the trenches may be arranged in a grid-like structure extending in one or more rows and one or more columns. A set of a first type of pier may be formed along each of the trenches, a set of a second type of pier may be formed between adjacent trenches in the first horizontal direction, and a set of a third type of pier may be formed between adjacent trenches in the second horizontal direction.
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公开(公告)号:US11443799B2
公开(公告)日:2022-09-13
申请号:US16436734
申请日:2019-06-10
Applicant: Micron Technology, Inc.
Inventor: Innocenzo Tortorelli , Russell L. Meyer , Agostino Pirovano , Andrea Redaelli , Lorenzo Fratin , Fabio Pellizzer
Abstract: Disclosed herein is a memory cell including a memory element and a selector device. Data may be stored in both the memory element and selector device. The memory cell may be programmed by applying write pulses having different polarities and magnitudes. Different polarities of the write pulses may program different logic states into the selector device. Different magnitudes of the write pulses may program different logic states into the memory element. The memory cell may be read by read pulses all having the same polarity. The logic state of the memory cell may be detected by observing different threshold voltages when the read pulses are applied. The different threshold voltages may be responsive to the different polarities and magnitudes of the write pulses.
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公开(公告)号:US20200243134A1
公开(公告)日:2020-07-30
申请号:US16781958
申请日:2020-02-04
Applicant: Micron Technology, Inc.
Inventor: Lorenzo Fratin , Fabio Pellizzer , Agostino Pirovano , Russell L. Meyer
IPC: G11C13/00 , H01L23/528
Abstract: Methods, systems, and devices for self-selecting memory with horizontal access lines are described. A memory array may include first and second access lines extending in different directions. For example, a first access line may extend in a first direction, and a second access line may extend in a second direction. At each intersection, a plurality of memory cells may exist, and each plurality of memory cells may be in contact with a self-selecting material. Further, a dielectric material may be positioned between a first plurality of memory cells and a second plurality of memory cells in at least one direction. each cell group (e.g., a first and second plurality of memory cells) may be in contact with one of the first access lines and second access lines, respectively.
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公开(公告)号:US20190088714A1
公开(公告)日:2019-03-21
申请号:US15710972
申请日:2017-09-21
Applicant: Micron Technology, Inc.
Inventor: Fabio Pellizzer , Russell L. Meyer , Agostino Pirovano , Lorenzo Fratin
Abstract: The present disclosure includes three dimensional memory arrays. An embodiment includes a first plurality of conductive lines separated from one another by an insulation material, a second plurality of conductive lines arranged to extend substantially perpendicular to and pass through the first plurality of conductive lines and the insulation material, and a storage element material formed between the first and second plurality of conductive lines where the second plurality of conductive lines pass through the first plurality of conductive lines. The storage element material is between and in direct contact with a first portion of each respective one of the first plurality of conductive lines and a portion of a first one of the second plurality of conductive lines, and a second portion of each respective one of the first plurality of conductive lines and a portion of a second one of the second plurality of conductive lines.
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公开(公告)号:US20250061943A1
公开(公告)日:2025-02-20
申请号:US18814164
申请日:2024-08-23
Applicant: Micron Technology, Inc.
Inventor: Lorenzo Fratin , Fabio Pellizzer , Agostino Pirovano , Russell L. Meyer
IPC: G11C13/00 , H01L23/528
Abstract: Methods, systems, and devices for self-selecting memory with horizontal access lines are described. A memory array may include first and second access lines extending in different directions. For example, a first access line may extend in a first direction, and a second access line may extend in a second direction. At each intersection, a plurality of memory cells may exist, and each plurality of memory cells may be in contact with a self-selecting material. Further, a dielectric material may be positioned between a first plurality of memory cells and a second plurality of memory cells in at least one direction. each cell group (e.g., a first and second plurality of memory cells) may be in contact with one of the first access lines and second access lines, respectively.
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