Nonvolatile semiconductor storage device and method for manufacturing the same
    4.
    发明授权
    Nonvolatile semiconductor storage device and method for manufacturing the same 有权
    非易失性半导体存储装置及其制造方法

    公开(公告)号:US09331167B2

    公开(公告)日:2016-05-03

    申请号:US14313501

    申请日:2014-06-24

    摘要: According to an aspect of the present invention, there is provided a nonvolatile semiconductor storage device including: a semiconductor substrate; a source region and a drain region that are formed in the semiconductor substrate so as to be separated from each other and so as to define a channel region therebetween; a tunnel insulating film that is formed on the channel region; an insulative charge storage film that is formed on the tunnel insulating film; a conductive charge storage film that is formed on the insulative charge storage film so as to be shorter than the insulative charge storage film in a channel direction; an interlayer insulating film that is formed on the conductive charge storage film; and a gate electrode that is formed on the interlayer insulating film.

    摘要翻译: 根据本发明的一个方面,提供了一种非易失性半导体存储装置,包括:半导体衬底; 源极区和漏极区,形成在所述半导体衬底中以便彼此分离并且在其间限定沟道区; 形成在沟道区上的隧道绝缘膜; 形成在隧道绝缘膜上的绝缘电荷存储膜; 形成在绝缘性电荷存储膜上的导电性电荷存储膜比沟道方向上的绝缘性电荷存储膜短; 形成在导电性电荷存储膜上的层间绝缘膜; 以及形成在层间绝缘膜上的栅电极。

    Nonvolatile semiconductor storage device
    5.
    发明授权
    Nonvolatile semiconductor storage device 有权
    非易失性半导体存储器件

    公开(公告)号:US08796753B2

    公开(公告)日:2014-08-05

    申请号:US14146585

    申请日:2014-01-02

    IPC分类号: H01L29/423 H01L27/115

    摘要: According to an aspect of the present invention, there is provided a nonvolatile semiconductor storage device including: a semiconductor substrate; a source region and a drain region that are formed in the semiconductor substrate so as to be separated from each other and so as to define a channel region therebetween; a tunnel insulating film that is formed on the channel region; an insulative charge storage film that is formed on the tunnel insulating film; a conductive charge storage film that is formed on the insulative charge storage film so as to be shorter than the insulative charge storage film in a channel direction; an interlayer insulating film that is formed on the conductive charge storage film; and a gate electrode that is formed on the interlayer insulating film.

    摘要翻译: 根据本发明的一个方面,提供了一种非易失性半导体存储装置,包括:半导体衬底; 源极区和漏极区,形成在所述半导体衬底中以便彼此分离并且在其间限定沟道区; 形成在沟道区上的隧道绝缘膜; 形成在隧道绝缘膜上的绝缘电荷存储膜; 形成在绝缘性电荷存储膜上的导电性电荷存储膜比沟道方向上的绝缘性电荷存储膜短; 形成在导电性电荷存储膜上的层间绝缘膜; 以及形成在层间绝缘膜上的栅电极。